Local store for a wafer processing station

Abstract

A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncharge the buffer apparatus by means of a guided vehicle, an overhead vehicle, or a human. A buffer system includes a buffer apparatus and a processing system load port to transfer carriers from the buffer apparatus to a processing system load port. An arrayed buffer system includes a plurality of buffer systems where each buffer system interacts with an individual set of load ports or a pair of buffer systems interacts with a shared set of load ports. A combination of arrayed buffer systems includes a plurality of adjacent arrayed buffer systems capable of sharing a single, environmental front-end mechanism maintenance space and capable of being serviced from the front.

1 . An apparatus (hereinafter “buffer apparatus”) comprising: 
 a plurality of first mechanisms (hereinafter “horizontally moving mechanisms”) capable of horizontally moving through a first distance;  
 a second mechanism (hereinafter “vertically moving mechanism”) capable of moving vertically through a second distance, each horizontally moving mechanism in the plurality being mounted on the vertically moving mechanism; and  
 a frame comprising a foot on which the vertically moving mechanism is fixedly supported, the frame further comprising a shelf fixedly attached to the foot by a support, wherein the shelf is horizontally separated from the foot by approximately the first distance and the shelf is vertically separated from the foot by approximately the second distance.  
 
     
     
         2 . The apparatus of  claim 1 , wherein the horizontally moving mechanism comprises: 
 a guide mechanism;    a drive mechanism guided by the guide mechanism; and    a carrier receiver mounted at an end of the drive mechanism.    
     
     
         3 . The apparatus of  claim 2 , wherein the carrier receiver comprises a forked end effector.  
     
     
         4 . The apparatus of  claim 1 , wherein the vertically moving mechanism comprises a guide mechanism and a drive mechanism.  
     
     
         5 . The apparatus of  claim 1  further comprising a kinematic mount attached to an upper surface of the shelf.  
     
     
         6 . The apparatus of  claim 1  wherein the foot comprises: 
 a cleanroom floor-mounted part of a docking mechanism.  
 
     
     
         7 . The apparatus of  claim 1  wherein the foot comprises: 
 slide mechanism including casters or skids.  
 
     
     
         8 . The apparatus of  claim 1  wherein the foot comprises: 
 a freewheeling mechanism or a driven wheeled mechanism located on the bottom side of said foot to allow for movement by a human or robotic transport mechanism.  
 
     
     
         9 . A method of storing a plurality of carriers adjacent to a processing station, the method comprising: 
 transferring a carrier from an upper load port to a column of space adjacent to the processing station;    transferring the carrier from the column of space to a lower load port while the upper load port remains unpopulated.    
     
     
         10 . The method of  claim 9  further comprising: 
 transferring the carrier to or from the upper load port from or to an overhead vehicle (OHV) prior to the acts of transferring.  
 
     
     
         11 . The method of  claim 9  further comprising: 
 transferring the carrier to either the upper load port or the lower load port from a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV) prior to the acts of transferring.  
 
     
     
         12 . The method of  claim 9  further comprising: 
 transferring a carrier to or from the upper load port from or to an overhead vehicle (OHV) and simultaneously transferring another carrier from the lower load port to a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV).  
 
     
     
         13 . The method of  claim 9  wherein the column of space is enclosed within a buffer apparatus, and the method further comprising: 
 docking the buffer apparatus to the processing station; and  
 servicing the buffer apparatus from the front while docked.  
 
     
     
         14 . A system comprising: 
 a box opener/loader having a load port (hereinafter “load port of the box opener/loader”); and    an apparatus (hereinafter “buffer apparatus”) located adjacent to the box opener/loader, the buffer apparatus comprising a plurality of first mechanisms (hereinafter “horizontally moving mechanisms”) capable of horizontally moving through a first distance, a second mechanism (hereinafter “vertically moving mechanism”) supporting each horizontally moving mechanism and capable of moving each horizontally moving mechanism vertically through a second distance, the vertically moving mechanism being fixedly supported on a foot of the buffer apparatus;    wherein a transfer position for the buffer apparatus is at the load port of the box opener/loader, and the second distance is larger than the vertical distance between the foot and the load port of the box opener/loader.    
     
     
         15 . The system of  claim 14  wherein the buffer apparatus is placed adjacent to the load port of the box opener/loader and the buffer apparatus has an additional load port above said load port of the box opener/loader {hereinafter “buffer apparatus load port”).  
     
     
         16 . The system of  claim 14  wherein the load port is capable of receiving a carrier from and presenting a carrier to an overhead vehicle (OHV).  
     
     
         17 . The system of  claim 14  wherein the load port is capable of receiving a carrier from and presenting a carrier to a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV).  
     
     
         18 . The system of  claim 14  comprising a plurality of load ports capable of simultaneously receiving a carrier from and presenting a carrier to an overhead vehicle on said uppermost load port and to one of the following: a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV).  
     
     
         19 . A system comprising: 
 a box opener/loader having a load port (hereinafter “load port of the box opener/loader”); and    a pair of apparatuses located adjacent to the box opener/loader on either side thereof, each apparatus (hereinafter referred to as “buffer apparatus”) comprising a plurality of first mechanisms (hereinafter “horizontally moving mechanisms”) capable of horizontally moving through a first distance, a second mechanism (hereinafter “vertically moving mechanism”) supporting each horizontally moving mechanism and capable of moving each horizontally moving mechanism vertically through a second distance, the vertically moving mechanism being fixedly supported on a foot of the buffer apparatus;    wherein a transfer position for each buffer apparatus is at the load port of the box opener/loader, and the second distance is larger than the vertical distance between the foot and the load port of the box opener/loader.    
     
     
         20 . The system of  claim 19  wherein the buffer apparatus is placed adjacent to the load port of the box opener/loader on either side thereof and the pair of buffer apparatus has an additional load port above said load port of the box opener/loader {hereinafter “buffer apparatus load port”), such that said pair of buffer apparatus are located on either side thereof of the buffer apparatus load port.  
     
     
         21 . The system of  claim 19  wherein the load port is capable of receiving a carrier from and presenting a carrier to an overhead vehicle (OHV).  
     
     
         22 . The system of  claim 19  wherein the load port is capable of receiving a carrier from and presenting a carrier to a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV).  
     
     
         23 . The system of  claim 19  comprising a plurality of load ports capable of simultaneously receiving a carrier from and presenting a carrier to an overhead vehicle on said uppermost load port and to one of the following: a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV).  
     
     
         24 . A method of receiving and presenting a plurality of carriers to a buffer apparatus adjacent to a processing station, the method comprising: 
 transferring a carrier through a column of space adjacent to a buffer apparatus and above a load port of said buffer apparatus.    
     
     
         25 . The method of  claim 24  further comprising: 
 transferring a carrier between an overhead vehicle (OHV) and the load port of the buffer apparatus.  
 
     
     
         26 . The method of  claim 24  further comprising: 
 transferring a carrier between a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV) and the load port of a buffer apparatus.  
 
     
     
         27 . The method of  claim 24  further comprising: 
 transferring a carrier from an overhead vehicle (OHV) to the load port of the buffer apparatus and simultaneously transferring another carrier between the processing system load port and a personal guided vehicle (PGV), an automated guided vehicle (AGV), or a rail guided vehicle (RGV).  
 
     
     
         28 . The method of  claim 24  wherein a second column of space located adjacent to a second buffer apparatus and above a second load port of said second buffer apparatus, and the method further comprising: 
 receiving and presenting a carrier to the second buffer apparatus through the second column of space; and  
 transferring the carrier through the second column of space to the load port of the second buffer apparatus.  
 
     
     
         29 . A method of docking a buffer apparatus adjacent to a box opener/loader, the method comprising: 
 attaching a moving member of a docking mechanism to the buffer apparatus; and    mounting a fixed member of said docking mechanism to a cleanroom floor.    
     
     
         30 . The method of  claim 29  further comprising: 
 said means of docking is accomplished by locating the buffer apparatus adjacent to the box opener/loader, such that the moving member of the docking mechanism couples to the fixed member of said docking mechanism.  
 
     
     
         31 . The method of  claim 29  wherein a fixed member of a second docking mechanism is fixedly attached to the cleanroom floor, adjacent to a second box opener/loader, the method further comprising: 
 undocking said buffer apparatus; and  
 moving said buffer apparatus adjacent to the second box opener/loader; and  
 docking said buffer apparatus.  
 
     
     
         32 . A method of relocating a buffer apparatus, the method comprising: 
 undocking the buffer apparatus from a first processing system; and    moving the buffer apparatus adjacent to a second processing system; and    docking the buffer apparatus to the second processing system.    
     
     
         33 . The method of  claim 32  wherein said movement is accomplished by a human operator.  
     
     
         34 . The method of  claim 32  wherein the foot of the buffer comprises: 
 a freewheeling mechanism or a driven wheeled mechanism to allow for movement by a human.  
 
     
     
         35 . A movable buffer apparatus comprising: 
 a plurality of first mechanisms (hereinafter “horizontally moving mechanisms”) capable of horizontally moving through a first distance; and    a second mechanism (hereinafter “vertically moving mechanism”) capable of moving vertically through a second distance, each horizontally moving mechanism in the plurality being mounted on the vertically moving mechanism; and    a frame comprising a foot on which the vertically moving mechanism is fixedly supported; and    a driven wheeled mechanism fixedly attached to the perimeter of said foot; and    a battery system to supply power to the apparatus.    
     
     
         36 . The apparatus of  claim 35  wherein the driven wheeled mechanism comprises: 
 a handle to allow for guidance of the movable buffer apparatus movement by a human; and  
 a force feedback system coupled to the handle to allow for a speed-controlled movement of the movable buffer apparatus by a human.  
 
     
     
         37 . The apparatus of  claim 35  wherein the driven wheeled mechanism comprises: 
 an autonomous computer system to allow for automated-guided movement of the movable buffer apparatus.  
 
     
     
         38 . The apparatus of  claim 35  wherein the driven wheeled mechanism comprises: 
 a guide mechanism to allow the movable buffer apparatus to follow the path of the guide rail; and  
 a computer system to allow for rail-guided movement of the movable buffer apparatus.  
 
     
     
         39 . A movable buffer system comprising: 
 a plurality of buffer apparatuses fixedly mounted to a movable platform and said buffer apparatuses being arranged in line with each other and in a common direction; and    a driven wheeled mechanism fixedly attached to the perimeter of said movable platform; and    a battery system to supply power to the apparatus.    
     
     
         40 . The system of  claim 39  wherein the driven wheeled mechanism further comprises: 
 a handle to allow for guidance of the movable buffer system movement by a human; and  
 a force feedback system coupled to the handle to allow for a speed-controlled movement of the movable buffer system by a human.  
 
     
     
         41 . The system of  claim 39  wherein the driven wheeled mechanism further comprises: 
 an autonomous computer system to allow for automated-guided movement of the movable buffer system.  
 
     
     
         42 . The system of  claim 39  wherein the driven wheeled mechanism further comprises: 
 a guide mechanism to allow the movable buffer system to follow the path of the guide rail; and  
 a computer system to allow for rail-guided movement of the movable buffer system.  
 
     
     
         43 . A method of arranging a plurality of buffer apparatus on a movable platform, the method comprising: 
 locating the plurality of buffer apparatus adjacent to each other in a row on said movable platform; and    locating said buffer apparatuses such that each faces a common direction.    
     
     
         44 . The method of  claim 43  further comprising: 
 arranging two rows of buffer apparatuses adjacent to each other such that a first row of buffer apparatuses faces the opposite direction of a second row of buffer apparatuses.  
 
     
     
         45 . The method of  claim 43  further comprising: 
 transferring carriers between the first row of buffer apparatuses and the processing systems on a first side of a manufacturing line; and  
 transferring carriers between the second row of buffer apparatuses and the processing systems on a second side of said manufacturing line.