Intra-cylinder tubular pressure regulator

Abstract

A fluid control system for use with toxic or corrosive gases (for example) has been provided that includes a fluid pressure regulator comprising a fluid inlet; a fluid outlet; a first fluid flow path between the fluid inlet and the fluid outlet; a valve seat positioned in the first fluid flow path and dividing the fluid inlet and the fluid outlet; a valve element regulating flow through the valve seat; a generally cylindrical membrane defining an inflatable fluid cavity that moves axially, responsive to inflation; a wall portion of the cavity that moves responsive to inflation and deflation of the cavity; a second fluid flow path communicating between the cavity and a source of pressure outside the cavity; and a link transmitting the movement of the wall portion to the valve element, thereby moving the valve element with respect to the valve seat responsive to inflation and deflation of the cavity.

1 . A fluid control system comprising: 
 a standard fluid cylinder having a cylinder inlet of ¾ inch National Gas Taper; and    a fluid pressure regulator disposed within said standard fluid cylinder, said fluid pressure regulator comprising: 
 a fluid inlet;  
 a fluid outlet;  
 a first fluid flow path between said fluid inlet and said fluid outlet;  
 a valve seat positioned in said first fluid flow path and dividing said fluid inlet and said fluid outlet;  
 a valve element regulating flow through said valve seat;  
 a generally cylindrical membrane defining an inflatable fluid cavity;  
 a wall portion of said cavity that moves responsive to inflation and deflation of said cavity;  
 a second fluid flow path communicating between said cavity and a source of pressure outside said cavity; and  
 a link transmitting the movement of said wall portion to said valve element, thereby moving said valve element with respect to said valve seat responsive to inflation and deflation of said cavity.  
   
     
     
         2 . The fluid control system of  claim 1 , wherein said valve element regulating flow between said fluid inlet and said fluid outlet is a poppet comprising a valve disk and a valve stem.  
     
     
         3 . The fluid control system of  claim 2 , wherein said valve stem defines said link.  
     
     
         4 . The fluid control system of  claim 1 , wherein said generally cylindrical membrane expands radially and contracts axially, responsive to inflation.  
     
     
         5 . The fluid control system of  claim 1 , further comprising at least one radially flexible stiffening member extending generally axially along said membrane and having a first portion, a second portion spaced axially from said first portion, and a third portion between said first and second portions, said third portion being positioned to contact and be flexed by said membrane when said membrane moves radially.  
     
     
         6 . The fluid control system of  claim 1 , wherein said wall portion of said generally cylindrical fluid cavity is at least a first end cap of said cavity.  
     
     
         7 . The fluid control system of  claim 6 , further comprising a second end cap of said cavity, axially spaced from said first end cap.  
     
     
         8 . The fluid control system of  claim 7 , wherein said first portion of said at least one stiffening member is secured with respect to said first end cap and said second portion of said stiffening member is secured with respect to said second end cap.  
     
     
         9 . The fluid control system of  claim 1 , wherein said wall portion of said generally cylindrical fluid cavity is a distal end cap of said cavity, relative to said valve element.  
     
     
         10 . The fluid control system of  claim 1 , wherein said second fluid flow path communicates between said inflatable fluid cavity and said fluid outlet.  
     
     
         11 . A fluid control system for dispensing high-pressure fluid at reduced pressure, said system comprising: 
 a container for storage and dispensing of a fluid, said container having an outlet; and    a fluid flow control device connected to said outlet of said container, said fluid flow control device comprising: 
 at least a first fluid flow path having a main fluid inlet in fluid communication with said container and a main fluid outlet;  
 a high-pressure shut-off valve in said first fluid flow path to selectively open or close said fluid flow path; and  
 a fluid pressure regulator in said first fluid flow path for providing fluid at said main fluid outlet at a selected pressure, said fluid pressure regulator being downstream of said high-pressure shut-off valve and being located inside said container.  
   
     
     
         12 . The fluid control system of  claim 11 , wherein said fluid pressure regulator comprises: 
 A fluid inlet;    A fluid outlet;    A first fluid flow path between said fluid inlet and said fluid outlet;    a valve seat positioned in said first fluid flow path and dividing said fluid inlet and said fluid outlet;    a valve element regulating flow through said valve seat;    a generally cylindrical membrane defining an inflatable fluid cavity that contracts axially, responsive to inflation;    a wall portion of said cavity that moves responsive to inflation and deflation of said cavity;    a second fluid flow path communicating between said cavity and a source of pressure outside said cavity; and    a link transmitting the movement of said wall portion to said valve element, thereby moving said valve element with respect to said valve seat responsive to inflation and deflation of said cavity.    
     
     
         13 . The fluid pressure regulator of  claim 11 , wherein said fluid pressure regulator is of a generally tubular configuration having a fixed inlet end and a moveable closed end.  
     
     
         14 . The fluid pressure regulator of  claim 12 , wherein said generally cylindrical membrane comprises a longitudinally corrugated metal tube.  
     
     
         15 . The fluid pressure regulator of  claim 12 , further comprising a rigid housing, wherein said rigid housing isolates said generally cylindrical membrane from the fluid within said container.  
     
     
         16 . The system of any  claim 11  further comprising a low-pressure shut-off valve positioned downstream of said fluid pressure regulator in said fluid flow path, wherein said low-pressure shut-off valve selectively opens said fluid flow path.  
     
     
         17 . The system of  claim 11  wherein said container is a standard fluid cylinder having a cylinder inlet of ¾ inch NGT.  
     
     
         18 . The system of  claim 11  wherein said fluid is provided at said main fluid outlet at a subatmospheric pressure.  
     
     
         19 . The system of  claim 11  wherein said fluid is provided at said main fluid outlet at atmospheric pressure.  
     
     
         20 . The system of  claim 11  wherein said fluid is provided at said fluid outlet at a superatmospheric pressure.  
     
     
         21 . The system of  claim 11  used within a semiconductor manufacturing process.  
     
     
         22 . The system of  claim 11 , wherein said container contains at least one of toxic and corrosive gas.