Programmable mask and method for fabricating biomolecule array using the same

Abstract

A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.

What is claimed is:  
     
         1 . A programmable mask comprising: 
 a lower substrate of which an upper surface has a polysilicon thin film transistor for switching a pixel area in accordance with an electrical signal applied thereto, a lower pixel electrode composed of a transparent electrode and connected to the drain electrode of said thin film transistor, and an orientation film formed on said lower pixel electrode and said thin film transistor, and of which an lower surface has a polarizer formed thereon;    an upper substrate of which an lower surface has an upper pixel electrode composed of a transparent electrode and an orientation film formed under said upper pixel electrode, and of which an upper surface has a polarizer formed thereon;    liquid crystal injected between said lower substrate and said upper substrate and varied in accordance with a voltage applied thereto to selectively transmit light; and    a driving circuit formed on the upper surface of said lower substrate, for driving the polysilicon thin film transistor in said pixel area.    
     
     
         2 . The programmable mask according to  claim 1 , wherein said polarizer has a high transmissivity with respect to ultraviolet light having wavelength of 330-400 nm and is composed of a polymer film which is not deactivated by said ultraviolet light or an inorganic crystal having birefringence characteristics.  
     
     
         3 . The programmable mask according to  claim 2 , wherein said polymer film is composed of polyvinyl alcohol, and said inorganic crystal is composed of calcite, quartz, or tourmaline.  
     
     
         4 . The programmable mask according to  claim 1 , wherein further comprises a shielding film formed on said upper substrate or said lower substrate for shielding the ultraviolet light incident from said thin film transistor.  
     
     
         5 . The programmable mask according to  claim 1 , wherein further comprises a depolarizer for changing the ultraviolet light incident to the lower portion of said lower substrate to non-polarized light.  
     
     
         6 . The programmable mask according to  claim 1 , wherein said polarizer has a high transmissivity with respect to ultraviolet light having wavelength of 330-400 nm and is composed of a substance which is not deactivated by said ultraviolet light.  
     
     
         7 . The programmable mask according to  claim 6 , wherein said substance which is not deactivated by said ultraviolet light is a polyimid film resistant to the ultraviolet light, a silicon oxide film formed by a slope sputtering method or a slope thermal deposition method, or a diamond-like-carbon (DLC) film for allowing the liquid crystal to be oriented by illuminating an ion beam.  
     
     
         8 . A programmable mask comprising: 
 a lower substrate of which an upper surface has a polysilicon thin film transistor for switching a pixel area in accordance with an electrical signal, a lower pixel electrode composed of a transparent electrode and connected to the drain electrode of said thin film transistor, and an orientation film formed on said lower pixel electrode and said thin film transistor;    an upper substrate of which an lower surface has an upper pixel electrode composed of a transparent electrode and an orientation film formed under said upper pixel electrode, and of which an upper surface has a polarizer formed thereon;    Guest-Host liquid crystal injected between said lower substrate and said upper substrate, for shielding or transmitting light by allowing the oscillation direction of linearly-polarized light to be equal or orthogonal to the light absorbing axis of a dye in accordance with a voltage applied thereto; and    a driving circuit formed on the upper surface of said lower substrate, for driving the polysilicon thin film transistor in said pixel area.    
     
     
         9 . The programmable mask according to  claim 8 , wherein said polarizer has a high transmissivity with respect to ultraviolet light having wavelength of 330-400 nm and is composed of a polymer film which is not deactivated by said ultraviolet light or an inorganic crystal having birefringence characteristics.  
     
     
         10 . The programmable mask according to  claim 9 , wherein said polymer film is composed of polyvinyl alcohol, and said inorganic crystal is composed of calcite, quartz, or tourmaline.  
     
     
         11 . The programmable mask according to  claim 8 , wherein further comprises a shielding film formed on said upper substrate or said lower substrate for shielding the ultraviolet light incident from said thin film transistor.  
     
     
         12 . The programmable mask according to  claim 8 , wherein further comprises a depolarizer for changing the ultraviolet light incident to the lower portion of said lower substrate to non-polarized light.  
     
     
         13 . The programmable mask according to  claim 8 , wherein said polarizer has a high transmissivity with respect to ultraviolet light having wavelength of 330-400 nm and is composed of a substance which is not deactivated by said ultraviolet light.  
     
     
         14 . The programmable mask according to  claim 13 , wherein said substance which is not deactivated by said ultraviolet light is a polyimid film resistant to the ultraviolet light, a silicon oxide film formed by a slope sputtering method or a slope thermal deposition method, or a diamond-like-carbon (DLC) film for allowing the liquid crystal to be oriented by illuminating an ion beam.  
     
     
         15 . A programmable mask comprising: 
 a lower substrate of which an upper surface has a polysilicon thin film transistor for switching a pixel area in accordance with an electrical signal applied thereto, a lower pixel electrode composed of a transparent electrode and connected to the drain electrode of said thin film transistor, a first dielectric mirror formed on said lower pixel electrode for generating constructive interference of incident light, and an orientation film formed on said first dielectric mirror;    an upper substrate of which lower surface has an upper pixel electrode composed of a transparent electrode, a second dielectric mirror formed on said upper pixel electrode for generating constructive interference of incident light, and an orientation film formed on said second dielectric mirror; and    liquid crystal injected between said lower substrate and said upper substrate and varied in accordance with a voltage applied thereto to selectively transmitting light,    wherein said first dielectric mirror and said second dielectric mirror forms a Febry-Parot type optical filter, and only the constructive-interfered light having a specific wavelength is selectively transmitted by said Febry-Parot type optical filter.    
     
     
         16 . The programmable mask according to  claim 15 , wherein said liquid crystal includes nematic liquid crystal and dye added thereto, and is Guest-Host liquid crystal which can shield or transmit light by allowing the oscillation of linearly-polarized light to be equal or orthogonal to the light absorbing axis of the dye in accordance with a voltage applied thereto.  
     
     
         17 . The programmable mask according to  claim 15 , wherein further comprises a shielding film formed on said upper substrate or said lower substrate for shielding the ultraviolet light incident from said thin film transistor.  
     
     
         18 . The programmable mask according to  claim 15 , wherein further comprises a depolarizer for changing the ultraviolet light incident to the lower portion of said lower substrate to non-polarized light.  
     
     
         19 . The programmable mask according to  claim 15 , wherein said polarizer has a high transmissivity with respect to ultraviolet light having wavelength of 330-400 nm and is composed of a substance which is not deactivated by said ultraviolet light.  
     
     
         20 . The programmable mask according to  claim 19 , wherein said substance which is not deactivated by said ultraviolet light is a polyimid film resistant to the ultraviolet light, a silicon oxide film formed by a slope sputtering method or a slope thermal deposition method, or a diamond-like-carbon (DLC) film for allowing the liquid crystal to be oriented by illuminating an ion beam.  
     
     
         21 . A method for fabricating a biomolecule array using the programmable mask according to claims  1 , comprising the steps of: 
 preparing said programmable mask;    providing a sample substrate under said programmable mask;    supplying a electrical signal to said programmable mask to adjusting the transmission of light in a selected pixel area by arrangement of the liquid crystal,    illuminating the light selectively passing through said pixel area to said sample substrate; and    generating optical reaction in a biomolecule contained in said sample substrate by the light illuminated thereto to form a biomolecule array according to the pattern of said programmable mask.    
     
     
         22 . The method for fabricating the biomolecule array according to  claim 21 , wherein the light selectively passing through said pixel area is changed to non-polarized light by a depolarizer so that the non-polarized light is illuminated to said sample substrate, and the optical reaction is generated by the non-polarized light to form the biomolecule array.  
     
     
         23 . The method for fabricating the biomolecule array according to  claim 21 , wherein said liquid crystal includes nematic liquid crystal and dye added thereto, and is Guest-Host liquid crystal which can shield or transmit light by allowing the oscillation direction of linearly-polarized light to be equal or orthogonal to the light absorbing axis of the dye in accordance with a voltage applied thereto, 
 wherein the arranged state of said Guest-Host liquid crystal is adjusted by the electrical signal applied to said programmable mask to selectively irradiate the light to said sample substrate such that the biomolecule array is formed.    
     
     
         24 . A method for fabricating a biomolecule array using the programmable mask according to  claim 8 , comprising the steps of: 
 preparing said programmable mask;    providing a sample substrate under said programmable mask;    supplying a electrical signal to said programmable mask to adjusting the transmission of light in a selected pixel area by arrangement of the liquid crystal,    illuminating the light selectively passing through said pixel area to said sample substrate; and    generating optical reaction in a biomolecule contained in said sample substrate by the light illuminated thereto to form a biomolecule array according to the pattern of said programmable mask.    
     
     
         25 . The method for fabricating the biomolecule array according to  claim 24 , wherein the light selectively passing through said pixel area is changed to non-polarized light by a depolarizer so that the non-polarized light is illuminated to said sample substrate, and the optical reaction is generated by the non-polarized light to form the biomolecule array.  
     
     
         26 . The method for fabricating the biomolecule array according to  claim 24 , wherein said liquid crystal includes nematic liquid crystal and dye added thereto, and is Guest-Host liquid crystal which can shield or transmit light by allowing the oscillation direction of linearly-polarized light to be equal or orthogonal to the light absorbing axis of the dye in accordance with a voltage applied thereto, 
 wherein the arranged state of said Guest-Host liquid crystal is adjusted by the electrical signal applied to said programmable mask to selectively irradiate the light to said sample substrate such that the biomolecule array is formed.    
     
     
         27 . A method for fabricating a biomolecule array using the programmable mask according to  claim 15 , comprising the steps of: 
 preparing said programmable mask;    providing a sample substrate under said programmable mask;    supplying a electrical signal to said programmable mask to adjusting the transmission of light in a selected pixel area by arrangement of the liquid crystal,    illuminating the light selectively passing through said pixel area to said sample substrate; and    generating optical reaction in a biomolecule contained in said sample substrate by the light illuminated thereto to form a biomolecule array according to the pattern of said programmable mask.    
     
     
         28 . The method for fabricating the biomolecule array according to  claim 27 , wherein the light selectively passing through said pixel area is changed to non-polarized light by a depolarizer so that the non-polarized light is illuminated to said sample substrate, and the optical reaction is generated by the non-polarized light to form the biomolecule array.  
     
     
         29 . The method for fabricating the biomolecule array according to  claim 27 , wherein said liquid crystal includes nematic liquid crystal and dye added thereto, and is Guest-Host liquid crystal which can shield or transmit light by allowing the oscillation direction of linearly-polarized light to be equal or orthogonal to the light absorbing axis of the dye in accordance with a voltage applied thereto, 
 wherein the arranged state of said Guest-Host liquid crystal is adjusted by the electrical signal applied to said programmable mask to selectively irradiate the light to said sample substrate such that the biomolecule array is formed.