Method of connecting individual conducting layers of a nanolaminate structure

Abstract

Nanolaminate materials are composed of alternating layers of two materials, such as conducting and insulating materials, that are synthesized by sputter coating on a flat substrate with a large number of layers. By employing lithographic processing during the deposition process, it is possible to make separate electrical contact to specific subsets of the metallic layers in the composite nanolaminate. Any number of separate electrodes is possible, in principle. This allows for multiple electrochemical circuits for simultaneous cyclic voltammetry in a single detection electrophoretic channel. The improvement allows for electrophoretic flow of 1 electrolyte and the electrochemical detection and discrimination of various analyte particles. The microfluidic component can be incorporated in a device for the purpose of analyzing or performing a chemical or biological assay on a very small fluid electrolyte, such as water. Such devices can be used as pathogen detectors.

What is claimed is:  
     
         1 . In a method for fabricating nanolaminate structures having conducting and insulating layers, the improvement comprising: 
 forming an electrical contact with at least one conducting layer during or after deposition of the conducting and insulating layers.    
     
     
         2 . The improvement of  claim 1 , wherein the forming of the electrical contact is carried out utilizing lithographic processing.  
     
     
         3 . The improvement of  claim 1 , wherein the forming of the electrical contact is carried out to form a separate electrical contact with specific subsets of the conducting layers of the nanolaminate.  
     
     
         4 . The improvement of  claim 1 , wherein forming of the electrical contact is carried out by: 
 depositing a layer of conducting material,    patterning at least an area of the layer of conducting material,    depositing a layer of insulating material on the layer of conducting material except in the patterned area so as to define a void in the layer of insulating material, and    depositing a layer of conducting material on the layer of insulating material and in the void thereby producing an electric contact between the layers of conducting material.    
     
     
         5 . The improvement of  claim 1 , additional including forming a number of electrical contacts with conducting layers of the nanolaminate structure to produce at least one interdigitated electrode.  
     
     
         6 . The improvement of  claim 6 , additionally including providing a plurality of interdigitated electrodes on a plurality of nanolaminate structures.  
     
     
         7 . A nanolaminate structure, comprising: 
 a number of conducting layers,    a number of insulating layers,    said conductive layers being intermediate adjacent insulating layers, and    at least one separate electric contact operatively connected to at least one of said conducting layers.    
     
     
         8 . The nanolaminate structure of  claim 7 , wherein said electric contact is operatively connected to a number of said conductive layers.  
     
     
         9 . The nanolaminate structure of  claim 7 , additionally including a number of electric contacts operatively connected to a number of conducting layers.  
     
     
         10 . The nanolaminate structure of  claim 7 , wherein said electric contact is of an interdigitated configuration.  
     
     
         11 . The nanolaminate structure of  claim 7 , including a number of electrical conducting means defining a plurality of interdigitated electrodes.  
     
     
         12 . A method for connecting individual conducting layers of a nanolaminated structure, comprising: 
 forming alternating layers of conducting and insulating layers, and    during deposition of the conducting and insulating layer forming at least one electric contact layer so as to be in electrical contact with at least one conducting layer.    
     
     
         13 . The method of  claim 12 , wherein forming at least one electric contact layer, is carried out utilizing lithographic processing.