Method for safely storing an object and apparatus having a storage box and a stocker for storing an object

Abstract

A method for safely storing an object includes loading the object into a storage box for receiving the object, sealing the storage box, spraying a cleaning gas into the storage box containing the object through a first valve connected to the storage box by providing the cleaning gas from an outside source, and exhausting the cleaning gas from the storage box through a second valve connected to the storage box by increasing a pressure of the cleaning gas in the storage box.

What is claimed is:  
     
         1 . A method for safely storing an object comprising: 
 loading the object into a storage box for receiving the object;    sealing the storage box;    spraying a cleaning gas into the storage box containing the object through a first valve connected to the storage box by providing the cleaning gas from an outside source; and    exhausting the cleaning gas from the storage box through a second valve connected to the storage box by increasing a pressure of the cleaning gas in the storage box.    
     
     
         2 . The method as claimed in  claim 1 , further comprising: 
 operating the first valve by varying a pressure of the cleaning gas provided to the storage box from the outside source; and    operating the second valve by varying a pressure of the cleaning gas in the storage box.    
     
     
         3 . An apparatus for storing an object, comprising: 
 a stocker having a first housing and a gas inflow member, wherein the first housing has an open face and an opposing face defining an opening, and the gas inflow member is connected to the first housing through the opening; and    a storage box having: 
 i) a second housing including an open upper face, the second housing being received in the stocker,  
 ii) a cover coupled to the upper face of the second housing,  
 iii) a gas supply member including a first valve for controlling a flow of a cleaning gas into the storage box, the gas supply member being installed at a first end portion of the second housing, and  
 iv) a gas exhausting member including a second valve for controlling the flow of the cleaning gas from the storage box, the gas exhausting member being installed at a second end portion of the second housing.  
   
     
     
         4 . The apparatus as claimed in  claim 3 , wherein the gas inflow member comprises: 
 a gas supply pipe for providing the cleaning gas;    an inlet connected to the gas supply pipe;    a supply passage formed in the inlet and connected to the gas supply member; and    a third valve installed in the supply passage for opening or closing the supply passage.    
     
     
         5 . The apparatus as claimed in  claim 4 , wherein the inlet and the gas exhausting member include quick coupling sockets and the gas supply member includes a quick coupling plug.  
     
     
         6 . The apparatus as claimed in  claim 3 , wherein the storage box further comprises a cassette separated from the second housing at a predetermined interval and inserted into the second housing, and wherein at least one slot is formed on an inner wall of the cassette and at least one gas hole is formed adjacent the slot.  
     
     
         7 . The apparatus as claimed in  claim 3 , wherein the gas supply member further comprises a first gas passage connected to the second housing, and wherein the first valve is disposed in the first gas passage for opening or closing the first gas passage.  
     
     
         8 . The apparatus as claimed in  claim 7 , wherein the first valve comprises a pressure valve operated in accordance with a variation of a pressure of the cleaning gas provided through the first gas passage.  
     
     
         9 . The apparatus as claimed in  claim 3 , further comprising an insertion groove formed at an end portion of the gas exhausting member in order to receive a gas supply member of an adjacent storage box; and 
 a second gas passage formed in the gas exhausting member to connect the insertion groove to the second housing, wherein the second valve is disposed in the second gas passage for opening or closing the second gas passage.    
     
     
         10 . The apparatus as claimed in  claim 9 , wherein the second valve comprises a pressure valve operated in accordance with a variation of a pressure of the cleaning gas in the second housing.  
     
     
         11 . The apparatus as claimed in  claim 3 , further comprising a plurality of additional storage boxes connectable to the storage box.  
     
     
         12 . A stocker for receiving a storage box, comprising: 
 a housing having an open face and an opposing face defining an opening; and    a gas introducing means having a gas inflow member extending into an inside of the housing through the opening, and a gas supply member for providing a cleaning gas to the gas inflow member.    
     
     
         13 . The stocker as claimed in  claim 12 , wherein the gas inflow member comprises a supply passage connected to the gas supply member, and a valve installed in the supply passage for opening and closing the supply passage.  
     
     
         14 . The stocker as claimed in  claim 13 , wherein the valve comprises a pressure valve operated in accordance with a connection between the gas inflow member and the storage box or a separation between the gas inflow member and the storage box.  
     
     
         15 . The stocker as claimed in  claim 14 , wherein the gas inflow member comprises a quick coupling socket.  
     
     
         16 . A storage box for receiving an object, comprising: 
 a housing having an open upper face;    a cover for sealing the housing;    a gas supply member having a first valve for controlling a flow of a cleaning gas into the housing, the gas supply member being installed at a first end portion of the housing; and    a gas exhausting member having a second valve for controlling the flow of the cleaning gas from the housing, the gas exhausting member being installed at a second end portion of the housing.    
     
     
         17 . The storage box as claimed in  claim 16 , further comprising: 
 a cassette separated from an inner wall of the housing and inserted into the housing, wherein at least one slot is formed on a side portion of the cassette, and at least one gas hole is formed adjacent the slot.    
     
     
         18 . The storage box as claimed in  claim 16 , wherein the housing includes a first connection hole formed at one end portion for fixing the gas supply member, and a second connection hole formed at an opposite end portion for receiving the gas exhausting member.  
     
     
         19 . The storage box as claimed in  claim 16 , wherein the gas supply member further comprises a first gas passage, wherein the first valve is disposed in the first gas passage for opening and closing the first gas passage.  
     
     
         20 . The storage box as claimed in  claim 19 , further comprising an insertion groove formed at an end portion of the gas exhausting member to receive a gas supply member of an adjacent additional storage box, and a second gas passage in the gas exhausting member for connecting the insertion groove to the housing.  
     
     
         21 . The storage box as claimed in  claim 20 , wherein the first valve includes a pressure valve operated in accordance with a variation of a pressure of the cleaning gas provided through the first passage, and the second valve includes a pressure valve operated in accordance with a variation of a pressure of the cleaning gas in the housing.  
     
     
         22 . The storage box as claimed in  claim 21 , wherein the gas supply member includes a quick coupling plug, and the gas exhausting member includes a quick coupling socket.