Polishing sheet and method of producing same

Abstract

A polishing sheet is produced by preparing a woven cloth sheet with single fibers, fiber bundles obtained by tying a plurality of fibers together, or bundle groups obtained by tying together these fiber bundles and impregnating such a woven cloth sheet with a resin solution such that the fibers and/or fiber bundles are fixed together. A backing sheet may be used to attach such a polishing sheet. Sateen woven cloths with sateen number 3-15 are preferred.

What is claimed is:  
     
         1 . A polishing sheet comprising: 
 a woven cloth sheet with single fibers, fiber bundles obtained by tying a plurality of fibers together, or bundle groups obtained by tying together said fiber bundles; and    a resin fixing said fibers or said fiber bundles together.    
     
     
         2 . The polishing sheet of  claim 1  wherein said woven cloth sheet has a sateen number in the range of 2-15.  
     
     
         3 . The polishing sheet of  claim 1  wherein said woven cloth sheet has a sateen number in the range of 3-15.  
     
     
         4 . The polishing sheet of  claim 1  wherein said fibers are of thickness 0.1 deniers or less.  
     
     
         5 . The polishing sheet of  claim 1  further comprising a backing sheet having a surface, on which said woven cloth sheet is affixed.  
     
     
         6 . A method of producing a polishing sheet, said method comprising the steps of: 
 impregnating with a resin solution a woven cloth sheet with single fibers, fiber bundles obtained by tying a plurality of fibers together, or bundle groups obtained by tying together said fiber bundles;    drying said woven cloth sheet impregnated with said resin solution and thereby fixing said fibers or said fiber bundles together.    
     
     
         7 . The method of  claim 6  further comprising the step of attaching said dried woven cloth sheet on a surface of a backing sheet.  
     
     
         8 . A method of polishing a surface of a target object to be polished, said method comprising the steps of: 
 preparing a polishing pad or a polishing tape from a polishing sheet which comprises a woven cloth sheet with single fibers, fiber bundles obtained by tying a plurality of fibers together, or bundle groups obtained by tying together said fiber bundles and a resin fixing said fibers or said fiber bundles together;    causing a polishing liquid to be present between said polishing pad or polishing tape and said surface, said polishing liquid containing a component which reacts chemically with said target surface; and    causing said polishing pad or polishing tape and said target object to move with respect to each other.    
     
     
         9 . The method of  claim 8  wherein said woven cloth sheet is sateen woven with sateen number 1-15.  
     
     
         10 . The method of  claim 8  wherein said woven cloth sheet is sateen woven with sateen number 3-15.  
     
     
         11 . The method of  claim 8  wherein said fibers are of thickness 0.1 deniers or less.  
     
     
         12 . The method of  claim 8  wherein said polishing sheet further comprises a backing sheet on which said woven cloth sheet is affixed.