Wafer processing apparatus and transfer device adjustment system

Abstract

An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of, a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.

What is claimed is:  
     
         1 . A substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, 
 identification marks being attached to the respective component parts, said apparatus comprising:    a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark;    an input unit for inputting an identification mark of a component part to be ordered; and    a display unit for displaying the part information in said storage unit corresponding to the inputted identification mark.    
     
     
         2 . The substrate processing apparatus as set forth in  claim 1 , further comprising: 
 a communication unit for obtaining via the Internet the part information in said storage unit from a main storage unit on a side of a vendor of said processing apparatus.    
     
     
         3 . The substrate processing apparatus as set forth in  claim 1 , wherein 
 the part information includes image information on the component part.    
     
     
         4 . The substrate processing apparatus as set forth in  claim 1 , further comprising: 
 an obtaining unit for obtaining via the Internet stock information on the component part to be ordered.    
     
     
         5 . A substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, 
 identification marks being attached to the respective component parts, said apparatus comprising:    an input unit for inputting, when placing an order for a component part, the identification mark of the component part;    a transmitter for transmitting via the Internet the inputted identification mark to a side of a vendor of said processing apparatus;    a receiver for receiving via the Internet part information on the component part transmitted from the vendor based on the transmitted identification mark; and    a display unit for displaying the received part information.    
     
     
         6 . The substrate processing apparatus as set forth in  claim 5 , wherein 
 the part information includes image information on the component part.    
     
     
         7 . The substrate processing apparatus as set forth in  claim 5 , further comprising: 
 an obtaining unit for obtaining via the Internet stock information on the component part to be ordered.    
     
     
         8 . A substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, comprising: 
 a storage unit for storing part information on each of the component parts and specification information for specifying each of the component parts necessary when placing an order for a component part;    an input unit for inputting specification information for a component part to be ordered;    a search unit for searching a component part matching with the inputted specification information from said storage unit; and    a display unit for displaying component part candidate information on the searched component part and displaying the part information in said storage unit on a component part selected from the component part candidate information.    
     
     
         9 . The substrate processing apparatus as set forth in  claim 8 , wherein 
 the component part candidate information includes image information on the component part.    
     
     
         10 . The substrate processing apparatus as set forth in  claim 8 , wherein 
 the part information includes image information on the component part.    
     
     
         11 . The substrate processing apparatus as set forth in  claim 8 , further comprising: 
 an obtaining unit for obtaining via the Internet stock information on the component part to be ordered.    
     
     
         12 . A substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, comprising: 
 a storage unit for storing part information on each of the component parts necessary when placing an order for the component part;    an image pickup unit for picking up an image of a component part to be ordered;    a transmitter for transmitting via the Internet image pickup information on the component part whose image is picked up by said image pickup unit to a side of a vendor of said processing apparatus;    a receiver for receiving via the Internet component part candidate information derived on the vendor side based on the image pickup information; and    a display unit for displaying the received component part candidate information and displaying the part information in said storage unit on a component part selected from the component part candidate information.    
     
     
         13 . The substrate processing apparatus as set forth in  claim 12 , wherein 
 said image pickup unit is movable.    
     
     
         14 . The substrate processing apparatus as set forth in  claim 12 , wherein 
 the component part candidate information includes image information on the component part.    
     
     
         15 . The substrate processing apparatus as set forth in  claim 12 , wherein 
 the part information includes image information on the component part.    
     
     
         16 . The substrate processing apparatus as set forth in  claim 12 , further comprising: 
 an obtaining unit for obtaining via the Internet stock information on the component part to be ordered.    
     
     
         17 . A substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, comprising: 
 a storage unit for storing part information on each of the component parts necessary when placing an order for the, component part,    an image pickup unit for picking up an image of a component part to be ordered;    a transmitter for transmitting via the Internet image pickup information on the component part whose image is picked up by said image pickup unit to a side of a vendor of said processing apparatus;    a receiver for receiving via the Internet a specification result of a component part specified on the vendor side based on the image pickup information; and    a display unit for displaying the part information in said storage unit on the specified component part.    
     
     
         18 . The substrate processing apparatus as set forth in  claim 17 , wherein 
 said receiver also receives the part information on the component part together with the specification result of the component part specified on the vendor side.    
     
     
         19 . The substrate processing apparatus as set forth in  claim 17 , wherein 
 said image pickup unit is movable.    
     
     
         20 . The substrate processing apparatus as set forth in  claim 17 , wherein 
 the part information includes image information on the component part.    
     
     
         21 . The substrate processing apparatus as set forth in  claim 17 , further comprising: 
 an obtaining unit for obtaining via the Internet stock information on the component part to be ordered.    
     
     
         22 . A substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, comprising: 
 an image pickup unit for picking up an image of a component part to be ordered;    a transmitter for transmitting via the Internet image pickup information on the component part whose image is picked up by said image pickup unit to a side of a vendor of said processing apparatus;    a receiver for receiving via the Internet part information on a component part specified on the vendor side based on the image pickup information; and    a display unit for displaying the received part information,    wherein the part information is information on the component part necessary when placing an order for the component part.    
     
     
         23 . The substrate processing apparatus as set forth in  claim 22 , wherein 
 said image pickup unit is movable.    
     
     
         24 . The substrate processing apparatus as set forth in  claim 22 , wherein 
 the part information includes image information on the component part.    
     
     
         25 . The substrate processing apparatus as set forth in  claim 22 , further comprising: 
 an obtaining unit for obtaining via the Internet stock information on the component part to be ordered.    
     
     
         26 . A carrier adjusting system which adjusts a stop position at a destination with respect to a carrier which carries an object to be carried such as a substrate, 
 wherein said carrier is mounted on a substrate processing apparatus;    wherein on a side of a factory in which said processing apparatus is placed, a control device which controls the stop position of said carrier, and a detector which detects an actual stop position of the destination of said carrier are provided; and    wherein on a side of a vender of said processing apparatus, an obtaining device which obtains detection information detected by said detector via Internet, and a providing device which provides correction information to correct the stop position of said carrier, which is derived based on the obtained detection information, to said processing apparatus via the Internet are provided.    
     
     
         27 . The carrier adjusting system as set forth in  claim 26 , 
 wherein said providing device directly outputs the correction information to said control device via the Internet, and is able to directly correct the stop position at the destination of said carrier.    
     
     
         28 . The carrier adjusting system as set forth in  claim 26 , 
 wherein said detector has an image pickup device.    
     
     
         29 . The carrier adjusting system as set forth in  claim 26 , 
 wherein said carrier carries a treatment solution supplying member which supplies a treatment solution to the substrate.    
     
     
         30 . The carrier adjusting system as set forth in  claim 28 , 
 wherein said carrier carries the substrate; and    wherein said image pickup device is provided at a detecting substrate in a same shape as the substrate.    
     
     
         31 . The carrier adjusting system as set forth in  claim 28 , 
 wherein said carrier carries the substrate;    wherein said image pickup device is provided to be fixed to said processing apparatus to be able to pick up an image of the detecting substrate carried to the stop position of said carrier;    wherein said detecting substrate is given a mark by which a position of this detecting substrate after being carried is recognized on an image of said image pickup device; and    wherein a reference mark on a occasion of adjusting the stop position of said carrier is displayed on a screen on which the image of said image pickup device is displayed.    
     
     
         32 . The carrier adjusting system as set forth in  claim 30 , 
 wherein said processing apparatus is provided with a waiting part at which said detecting substrate is waited; and    wherein said carrier is able to carry said detecting substrate waited at said waiting part.    
     
     
         33 . The carrier adjusting system as set forth in  claim 31 , 
 wherein said processing apparatus is provided with a waiting part at which said detecting substrate is waited; and    wherein said carrier is able to carry said detecting substrate waited at said waiting part.    
     
     
         34 . A substrate processing apparatus comprising a carrier which carries an object to be carried such as a substrate or a treatment solution supplying member, comprising: 
 a control device which controls a stop position at a destination of said carrier;    a detector which detects an actual stop position at the destination of said carrier;    a transmitter which transmits detection information detected at said detector to a side of a vender of said processing apparatus via Internet; and    a receiver which receives correction information to correct the stop position at the destination of said carrier, which is derived based on the transmitted detection information, via the Internet.