US2004208752A1PendingUtilityA1

Method for reducing the partial pressure of undesired gases in a small vacuum vessel

38
Priority: Feb 20, 2003Filed: Feb 19, 2004Published: Oct 21, 2004
Est. expiryFeb 20, 2023(expired)· nominal 20-yr term from priority
H01J 9/38F04B 37/02
38
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Claims

Abstract

This invention relates to a method for reducing the partial pressure of undesired gases in a small vacuum vessel. The method comprises using a getter pump with a sufficient sorption capacity to eliminate the need for a bakeout step.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A method for reducing the partial pressure of undesired gases in a small vacuum vessel with a vacuum volume of about 1 liter or less, comprising: 
 (a) providing a getter pump as an integral part of said small vacuum vessel, wherein said getter pump has sufficient sorption capacity to adsorb undesired gases;    (b) evacuating said small vacuum vessel;    (c) activating said getter pump; and    (d) sealing said small vacuum vessel.    
     
     
         2 . The method of  claim 1 , wherein said getter pump is an appendage getter pump.  
     
     
         3 . The method of claims  1  or  2 , wherein said getter pump is activated by heating with an external heater.  
     
     
         4 . The method of  claim 3 , wherein the getter material in said getter pump is a zirconium alloy.  
     
     
         5 . A method for reducing the partial pressure of undesired gases in a small vacuum vessel with a vacuum volume of about 1 liter or less, comprising providing a getter pump as an integral part of said small vacuum vessel, wherein said getter pump has sufficient sorption capacity to adsorb undesired gases and thereby eliminates the need for a bakeout cycle.  
     
     
         6 . The method of  claim 5 , wherein said getter pump is an appendage getter pump.  
     
     
         7 . The method of claims  5  or  6 , wherein said getter pump is activated by heating with an external heater.  
     
     
         8 . The method of  claim 7 , wherein the getter material in said getter pump is a zirconium alloy.  
     
     
         9 . A method for reducing the partial pressure of undesired gases in a small vacuum vessel with a vacuum volume of about 1 liter or less, said small vacuum vessel having undergone an incomplete outgassing bakeout step, comprising providing a getter as an integral part of said small vacuum vessel, wherein said getter has sufficient sorption capacity to adsorb remaining undesired gasses.  
     
     
         10 . The method of  claim 9 , wherein said getter pump is an appendage getter pump.  
     
     
         11 . The method of claims  9  or  10 , wherein said getter pump is activated by heating with an external heater.  
     
     
         12 . The method of  claim 11 , wherein the getter material in said getter pump is a zirconium alloy.  
     
     
         13 . A small vacuum vessel with a vacuum volume of about 1 liter or less, comprising a getter pump as an integral part of said small vacuum vessel, wherein said getter pump has sufficient sorption capacity to adsorb undesired gases without the necessity of an outgassing bakeout step.  
     
     
         14 . The small vacuum vessel of  claim 13 , wherein said getter pump is an appendage getter pump.  
     
     
         15 . The small vacuum vessel of  claim 13  or  14 , wherein the getter material in said getter pump is a zirconium alloy.

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