Robotic arm for preventing electrostatic damage

Abstract

A robotic arm that has a main body and pads thereon can prevent electrostatic damage. These pads are used to carry substrates between and in processing machines. A material of these pads is the same as or similar to the material of the substrate to lower the amount of the electrostatic charges produced during the manufacturing process. Therefore, the electrostatic charges cannot damage the electronic devices on the substrate.

1 . A robotic arm for preventing electrostatic damage and applied in manufacturing liquid crystal display, the robotic arm comprising: 
 a main body; and    pads allocated on the main body to load a substrate, wherein a material of the pads is identical to that of the substrate.    
   
   
       2 . A robotic arm for preventing electrostatic damage and applied in manufacturing liquid crystal display, the robotic arm comprising: 
 a main body; and    pads allocated on the main body to load a substrate, wherein a material of the pads is similar to that of the substrate to avoid damaging electronic devices on the substrate by electrostatic charges generated by friction during the manufacturing process.    
   
   
       3 . The robotic arm of  claim 2 , wherein the material of the pads is quartz when the material of the substrate is glass.  
   
   
       4 . An improved robotic arm for preventing electrostatic damage, the robotic arm comprising a main body and pads allocated on the main body to load a substrate, wherein the improvement comprises: 
 a material of the pads being identical to that of the substrate.    
   
   
       5 . An improved robotic arm for preventing electrostatic damage, the robotic arm comprising a main body and pads allocated on the main body to load a substrate, wherein the improvement comprises: 
 a material of the pads being similar to that of the substrate to avoid damaging electronic devices on the substrate by electrostatic charges generated by friction during the manufacturing process.    
   
   
       6 . The robotic arm of  claim 5 , wherein the material of the pads is quartz when the material of the substrate is glass.