Storage device slider with sacrificial lapping extension

Abstract

A process for fabricating sliders with one or more sacrificial structures (extensions) that facilitate lapping to create the air-bearing surface (ABS) is described. Prior to separating individual sliders from a wafer, a mask of material that is not removable by deep reactive ion etching (DRIE) is patterned on the surface of the sliders. The mask outlines a sacrificial extension around portions of the magnetic transducer elements that are nearest the predetermined plane which will become the ABS. The sacrificial extension makes the surface of the slider which will be lapped non-planar. The sacrificial extension extends below the predetermined ABS plane. When the sliders are individually separated by DRIE, the shape of the mask including the sacrificial extension is projected down into and along the slider body.

1 . A data storage device including: 
 magnetic media;    a slider including a magnetic transducer and having a remaining portion of a sacrificial extension protruding on an air-bearing surface, the remaining portion of the sacrificial extension being narrower than the air-bearing surface and aligned with the magnetic transducer; and    means for moving the magnetic media in relation to the magnetic transducer to write and read magnetic transitions on the magnetic media.    
     
     
         2 . The data storage device of  claim 1  wherein the slider has a channel on a surface parallel to the remaining portion of the sacrificial extension  
     
     
         3 . The data storage device of  claim 1  wherein the slider shape includes a guide rail on the air-bearing surface.  
     
     
         4 . The data storage device of  claim 1  wherein the sacrificial extension is offset from the mid-line of the air-bearing surface.  
     
     
         5 . The data storage device of  claim 1  wherein the slider includes a channel on a surface parallel to an air-bearing surface, the channel being aligned with the sacrificial extension to allow a sacrificial extension of an adjacent slider on a wafer during manufacturing to protrude into the channel.  
     
     
         6 . The data storage device of  claim 1  wherein the slider includes a guide rail on the air-bearing surface.  
     
     
         7 . The data storage device of  claim 1  wherein the sacrificial extension is offset from a mid-line of the air-bearing surface.