Nanosyringe array and method

Abstract

A nanosyringe is constructed using micro fabrication and nano fabrication techniques on a silicon substrate. The nanosyringe includes a membrane of silicon carbide. The position and operation of individual nanosyringes, arranged in an array of nanosyringes, can be independently controlled. A nanosyringe array can inject or extract a fluid from one or more cells or other structures. Microfluidic structures coupled to the nanosyringe allow external pumping or extraction. A cell matrix or organelles of individual cells can be non-destructively sampled in real time.

1 . A method comprising: 
 forming a column on a silicon substrate, the column having an atomically sharp tip;    depositing a membrane on the column;    removing a portion of the column after depositing the membrane; and    etching the membrane to form a nozzle end.    
     
     
         2 . A device comprising: 
 a membrane formed by depositing a conformal layer of silicon nitride on a silicon post oriented perpendicular to a silicon substrate, the membrane having an orifice; and    a fluid reservoir in fluidic communication with the orifice.    
     
     
         3 . The device of  claim 2  further comprising a cell retention cavity.  
     
     
         4 . A method comprising: 
 transferring a pattern of dots onto a silicon substrate;    oxidizing the substrate to form an atomically sharp silicon tip corresponding to each dot;    creating a shaft for each silicon tip;    forming a pedestal at the base of each shaft;    coating the silicon tips with a membrane material; and    removing a portion of the silicon from each tip.    
     
     
         5 . The method of  claim 4  further comprising forming an opening in each tip.