Compliant polishing element and method of manufacturing the same

Abstract

A precision polishing element polishes a general surface, such as an aspheric optical surface. A compliant polishing member is mounted to a substantially rigid support member. The compliant polishing member has plurality of spaced compliant polishing portions for engaging the surface to be polished and trapping polishing fluid between the interface of the surface to be polished and nearest polishing portion in contact with the surface. An important advantage derived from the polishing element of the invention is that it enables the polishing fluid to evenly distribute across the surface to be polished.

1 . A precision polishing element, comprising: 
 a substantially rigid support member having an outer perimeter for cooperating with a tool, said outer perimeter terminating at one end in a mounting surface;    a polishing member mountable to said mounting surface of said substantially rigid support member, said polishing member having a plurality of spaced compliant polishing portions, nearest adjacent ones of said plurality of spaced compliant polishing portions being separated by a recessed portion, said recessed portion forming a fluid transport region when nearest adjacent compliant polishing portions are in compressive contact with a surface to be polished.    
   
   
       2 . The precision polishing element recited in  claim 1  wherein said polishing member has a substantially toroidal shape.  
   
   
       3 . The precision polishing element recited in  claim 1  wherein said polishing member has a substantially polygonal shape.  
   
   
       4 . The precision polishing element recited in  claim 1  wherein said polishing member has a substantially star-like shape having irregularly configured lobes.  
   
   
       5 . The precision polishing element recited in  claim 1  wherein said polishing member has a continuous groove formed in a circumferential portion thereof.  
   
   
       6 . The precision polishing element recited in  claim 1  wherein said compliant polishing member comprises a material selected from the group consisting of an elastic solid material, a polymeric material, and a mixture thereof.  
   
   
       7 . The precision polishing element recited in  claim 6  wherein said polymeric material is selected from the group consisting of: polyurethane, chloroprene, fluorocarbon, fluorosilicone, ethylene propylene, and nitrile.  
   
   
       8 . The precision polishing element recited in  claim 7  wherein said polymeric material is nitrile.  
   
   
       9 . The precision polishing element recited in  claim 1  wherein said substantially rigid support member is mounted to said polishing member by chemical bonding.  
   
   
       10 . The precision polishing element recited in  claim 1  wherein said substantially rigid support member is mounted to said polishing member by thermal bonding.  
   
   
       11 . The precision polishing element recited in  claim 1  wherein said substantially rigid support member is mounted to said polishing member by mechanical bonding.  
   
   
       12 . The precision polishing element recited in  claim 1  wherein said substantially rigid support member is mounted to said polishing member by direct molding.  
   
   
       13 . The precision polishing element recited in  claim 1  wherein each of said plurality of spaced compliant polishing portions has a Shore A hardness in the range of about 40-95.