Microactuator having a ferromagnetic substrate

Abstract

An electromagnetic microactuator having a ferromagnetic substrate, preferably steel. A plurality of layers are deposited upon the substrate including an insulating layer, a seed layer and first and second photoresist layers. The first photoresist layer provides a coil well which defines the deposition location of a coil metal. The second photoresist layer provides central and peripheral core wells which define the deposition locations of a central core and a peripheral core, respectively. The second photoresist layer intersticially fills and protectively covers the coil.

1 . An electromagnetic microactuator, comprising: 
 a steel substrate;    an insulating layer selectively located on said substrate;    a metallic seed layer selectively located on said substrate and said insulating layer;    a copper coil located on said seed layer, said coil having a spiral shape defining a center and an outer periphery and being intersticially filled and covered by a photoresist;    a central core of nickel iron located on said seed layer at said center of said coil; and    a peripheral core of ferrous material located on said seed layer adjacent said outer periphery of said coil.    
   
   
       2 . (canceled)  
   
   
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       4 . (canceled)