Rubber plate used in an ion implanter and method of preparing the same

Abstract

The present invention provides a method and a set of trimming accessories for trimming rubber plate used in an ion implanter. The rubber plate is suitable for use in an ion implanter, wherein the ion implanter has a platform with multiple primary holes and multiple primary notches. In specific embodiments, the set of trimming accessories includes trimming equipment such as a knife or preferably a laser; a template with secondary holes corresponding to primary holes and secondary notches corresponding to primary notches. The template is used as a guide to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template. The trimmed rubber plate can then be placed on the platform so that the tertiary holes of the rubber plate match the primary holes of the platform and the tertiary notches of the rubber plate match the primary notches of the platform.

1 . A set of trimming accessories for trimming a rubber plate which is configured to be placed on a platform of an ion implanter, the platform of the ion implanter including a plurality of primary holes and a plurality of primary notches, the set of trimming accessories comprising: 
 a trimming member configured to trim the rubber plate; and    a template including a plurality of secondary holes corresponding to the plurality of primary holes of the platform of the ion implanter and a plurality of secondary notches corresponding to the plurality of primary notches of the platform of the ion implanter, the template being adapted to guide the trimming member to trim the rubber plate to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.    
   
   
       2 . The set of trimming accessories of  claim 1  wherein the trimming member comprises a knife.  
   
   
       3 . The set of trimming accessories of  claim 1  wherein the trimming member comprises a laser.  
   
   
       4 . The set of trimming accessories of  claim 1  further comprising an optical detector configured to detect contours of the template formed by the plurality of secondary holes and the plurality of secondary notches.  
   
   
       5 . The set of trimming accessories of  claim 4  further comprising a controller coupled to the trimming member and to the optical detector to control the trimming member based on the detected contours of the template from the optical detector to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.  
   
   
       6 . The set of trimming accessories of  claim 1  wherein the template is adapted to be placed over the rubber plate for guiding the trimming member to trim the rubber plate.  
   
   
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       19 . A trimming apparatus for trimming a rubber plate which is configured to be placed on a platform of an ion implanter, the platform of the ion implanter including a plurality of primary holes and a plurality of primary notches, the trimming apparatus comprising: 
 a template including a plurality of secondary holes corresponding to the plurality of primary holes of the platform of the ion implanter and a plurality of secondary notches corresponding to the plurality of primary notches of the platform of the ion implanter, the template being configured to guide trimming of the rubber plate to form a plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form a plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.    
   
   
       20 . The trimming apparatus of  claim 19  further comprising a trimming member configured to trim the rubber plate.  
   
   
       21 . The trimming apparatus of  claim 20  wherein the trimming member comprises a knife.  
   
   
       22 . The trimming apparatus of  claim 20  wherein the trimming member comprises a laser.  
   
   
       23 . The trimming apparatus of  claim 20  further comprising an optical detector configured to detect contours of the template formed by the plurality of secondary holes and the plurality of secondary notches.  
   
   
       24 . The trimming apparatus of  claim 23  further comprising a controller coupled to the trimming member and to the optical detector to control the trimming member based on the detected contours of the template from the optical detector to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.  
   
   
       25 . The trimming apparatus of  claim 19  wherein the template is configured to be placed over the rubber plate for guiding the trimming of the rubber plate.  
   
   
       26 . The trimming apparatus of  claim 25  further comprising a trimming member configured to trim the rubber plate.  
   
   
       27 . The trimming apparatus of  claim 26  wherein the trimming member comprises a knife.  
   
   
       28 . The trimming apparatus of  claim 26  wherein the trimming member comprises a laser.  
   
   
       29 . The trimming apparatus of  claim 26  further comprising an optical detector configured to detect contours of the template formed by the plurality of secondary holes and the plurality of secondary notches.  
   
   
       30 . The trimming apparatus of  claim 29  further comprising a controller coupled to the trimming member and to the optical detector to control the trimming member based on the detected contours of the template from the optical detector to trim the rubber plate to form the plurality of tertiary holes in the rubber plate corresponding to the plurality of secondary holes of the template and to form the plurality of tertiary notches in the rubber plate corresponding to the plurality of secondary notches of the template.