Transfer of optical element patterns on a same side of a substrate already having a feature thereon

Abstract

A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.

1 . An optical element comprising: 
 a refractive optical element in a first surface of a substrate;    a diffractive optical element in the first surface of the substrate, the diffractive optical element in a separate portion of the substrate than the refractive optical element, the refractive and the diffractive optical elements having been transferred into the first surface of the substrate.    
   
   
       2 - 35 . (canceled)  
   
   
       36 . The optical element as claimed in  claim 1 , further comprising alignment features on the first surface.  
   
   
       37 . The optical element as claimed in  claim 1 , further comprising electro-optical elements on the first surface.  
   
   
       38 . The optical element as claimed in  claim 1 , further comprising metal portions on the first surface.  
   
   
       39 . The optical element as claimed in  claim 1 , further comprising one of dichroic portions and dielectric portions on the first surface.  
   
   
       40 . The optical element as claimed in  claim 1 , further comprising a protective portion over the diffractive optical element.  
   
   
       41 . The optical element as claimed in  claim 40 , wherein the protective portion is made of a same material as a refractive optical element pattern used to transfer the refractive optical element to the substrate.  
   
   
       42 . The optical element as claimed in  claim 40 , wherein the protective portion is made of a same class of material as the refractive optical element, but of a different specific material.  
   
   
       43 . The optical element as claimed in  claim 42 , wherein the protective portion is made of a first photoresist and a refractive optical element pattern used to transfer the refractive optical element to the substrate is made of a second photoresist, the first and second photoresist being different.  
   
   
       44 . The optical element as claimed in  claim 43 , wherein the first photoresist does not reflow under conditions for reflowing the second photoresist.  
   
   
       45 . The optical element as claimed in  claim 43 , wherein the first photoresist is resistant to removal under conditions for removing the second photoresist.