Image sensor having micro-lenses with integrated color filter and method of making

Abstract

An image sensor comprising a plurality of pixels formed in a semiconductor substrate, each pixel including a light sensitive element, and a color filter material formed over the light sensitive element, the color filter material formed in a micro-lens shape.

1 . An image sensor comprising: 
 a plurality of pixels formed in a semiconductor substrate, each pixel including a light sensitive element; and    a color filter material formed over said light sensitive element, said color filter material formed in a micro-lens shape.    
   
   
       2 . The image sensor of  claim 1  wherein said color filter material comprises red color filter material, green color filter material, and blue color filter material.  
   
   
       3 . The image sensor of  claim 1  further including a color filter material comprises cyan color filter material, yellow color filter material, and magenta color filter material.  
   
   
       4 . The image sensor of  claim 1  wherein the color filter material is pigmented or dyed polymethylmethacrylate (PMMA) or polyglycidylmethacrylate (PGMA).  
   
   
       5 . The image sensor of  claim 1  further including a passivation layer formed over said color filter material.  
   
   
       6 . The image sensor of  claim 5  wherein said passivation layer has a molecular number of between 50,000 and 200,000.  
   
   
       7 . A pixel of an image sensor comprising: 
 a light sensitive element formed in a semiconductor substrate; and    a color filter material formed over said light sensitive element, said color filter material formed in a micro-lens shape.    
   
   
       8 . The pixel of  claim 7  wherein said color filter material is selected from the group of red color filter material, green color filter material, and blue color filter material.  
   
   
       9 . The pixel of  claim 7  further including a color filter material is selected from the group of cyan color filter material, yellow color filter material, and magenta color filter material.  
   
   
       10 . The pixel of  claim 7  wherein the color filter material is pigmented or dyed polymethyl methacrylate (PMMA) or polyglycidyl methacrylate (PGMA).  
   
   
       11 . The pixel of  claim 7  further including a passivation layer formed over said color filter material.  
   
   
       12 . The pixel of  claim 11  wherein said passivation layer has a molecular number of between 50,000 and 200,000.  
   
   
       13 .- 18 . (canceled)