Magnetic recording medium, the manufacturing method and magnetic recording apparatus using the same

Abstract

This magnetic recording medium is characterized in that in the magnetic recording medium having a magnetic film on a non-magnetic substrate by intercalating at least an under layer, the proportion of functional groups per 100 carbon atoms in a diamond-like carbon protective coating mainly composed of carbon for protecting the magnetic film exceeds 20%. The bonding force between the protective coating layer and the lubricating layer of the magnetic recording medium is increased so that under high speed rotation, a decrease in the lubricating layer is not caused so as to provide a magnetic recording apparatus having high reliability.

1 . A manufacturing method for a magnetic recording medium, the magnetic recording medium having a magnetic film on a non-magnetic substrate formed by intercalating at least an under layer, comprising forming a protective film mainly composed of carbon for protecting the magnetic film by an ion beam method or a chemical vapor deposition method, in which at least one gas among CO 2 , NO 2 , N 2 O is added.  
     
     
         2 . The manufacturing method for a magnetic recording medium according to  claim 1 , wherein the protective coating is diamond-like carbon.  
     
     
         3 . The manufacturing method for a magnetic recording medium according to  claim 1 , wherein when the protective coating is formed by the ion beam method or the chemical vapor deposition method, at least one of N 2 , Ne, Ar, Kr, Xe and hydrocarbon gas or hydrocarbon gas is used.  
     
     
         4 . A manufacturing method for a magnetic recording medium, the magnetic recording medium having a magnetic film on a non-magnetic substrate formed by intercalating at least an under layer, comprising forming a diamond-like carbon protective coating mainly composed of carbon for protecting the magnetic film by an ion beam method or a chemical vapor deposition method, in which at least one gas among CO 2 , NO 2 , N 2 O is added.  
     
     
         5 . A manufacturing method for a magnetic recording medium, the magnetic recording medium having a magnetic film, a protective coating mainly composed of carbon for protecting the magnetic film and a lubricating film of perfluoroether having at least one functional group on a non-magnetic substrate, comprising forming the protective coating by an ion beam method or a chemical vapor deposition method using at least one of N 2 , Ne, Ar, Kr, Xe and hydrocarbon gas or hydrocarbon gas, in which at least one gas among CO 2 , NO 2 , and N 2 O is added.  
     
     
         6 . A manufacturing method of a magnetic recording medium comprising the steps of: 
 forming an under layer on a non-magnetic substrate;    forming a magnetic film above said under layer;    forming a diamond-like carbon film above said magnetic film layer by a chemical vapor deposition method in which N 2 O gas is added.    
     
     
         7 . The manufacturing method of a magnetic recording medium further comprising the steps of: 
 forming a lubricating film of perfluoroether on said diamond-like film.