Aluminum-alloy reflection film for optical information-recording, optical information-recording medium, and aluminum-alloy sputtering target for formation of the aluminum-alloy reflection film for optical information-recording

Abstract

There are provided an aluminum-alloy reflection film for optical information-recording, having low thermal conductivity, low melting temperature, and high corrosion resistance, capable of coping with laser marking, an optical information-recording medium comprising the reflection film described, and an aluminum-alloy sputtering target for formation of the reflection film described. The invention includes (1) an aluminum-alloy reflection film for optical information-recording, containing an element Al as the main constituent, 1.0 to 10.0 at. % of at least one element selected from the group of rare earth elements, and 0.5 to 5.0 at. % of at least one element selected from the group consisting of elements Cr, Ta, Ti, Mo, V, W, Zr, Hf, Nb, and Ni, (2) an optical information-recording medium comprising any of the aluminum-alloy reflection films described as above, and (3) a sputtering target having the same composition as that for any of the aluminum-alloy reflection films described as above.

1 . An aluminum-alloy reflection film for optical information-recording, said aluminum-alloy reflection film, containing: 
 an element Al as the main constituent;    1.0 to 10.0 at. % of at least one element selected from the group of rare earth elements; and    0.5 to 5.0 at. % of at least one element selected from the group consisting of elements Cr, Ta, Ti, Mo, V, W, Zr, Hf, Nb, and Ni.    
     
     
         2 . An aluminum-alloy reflection film for optical information-recording according to  claim 1 , wherein the rare earth elements are elements Nd and/or Y.  
     
     
         3 . An aluminum-alloy reflection film for optical information-recording according to  claim 1 , containing 1.0 to 5.0 at. % of at least one element selected from the group consisting of elements Fe, and Co.  
     
     
         4 . An aluminum-alloy reflection film for optical information-recording according to  claim 1 , containing 1.0 to 10.0 at. % of at least one element selected from the group consisting of elements. In, Zn, Ge, Cu, and Li.  
     
     
         5 . An aluminum-alloy reflection film for optical information-recording according to  claim 1 , containing not more than 5.0 at. % of at least one element selected from the group consisting of elements Si, and Mg.  
     
     
         6 . An optical information-recording medium comprising an aluminum-alloy reflection film for optical information-recording, according to  claim 1 .  
     
     
         7 . An optical information-recording medium according to  claim 6 , suitable for use in laser marking.  
     
     
         8 . An aluminum-alloy sputtering target for formation of an aluminum-alloy reflection film for optical information-recording, containing: 
 an element Al as the main constituent;    1.0 to 10.0 at. % of at least one element selected from the group of rare earth elements; and    0.5 to 5.0 at. % of at least one element selected from the group consisting of elements Cr, Ta, Ti, Mo, V, W, Zr, Hf, Nb, and Ni.    
     
     
         9 . An aluminum-alloy sputtering target for formation of an aluminum-alloy reflection film for optical information-recording, according to  claim 8 , containing 1.0 to 5.0 at. % of at least one element selected from the group consisting of elements Fe, and Co.  
     
     
         10 . An aluminum-alloy sputtering target for formation of an aluminum-alloy reflection film for optical information-recording, according to  claim 8 , containing 1.0 to 10.0 at. % of at least one element selected from the group consisting of elements In, Zn, Ge, Cu, and Li.  
     
     
         11 . An aluminum-alloy sputtering target for formation of an aluminum-alloy reflection film for optical information-recording, according to  claim 8 , containing not more than 5.0 at. % of at least one element selected from the group consisting of elements Si, and Mg.