Electron beam irradiation apparatus, electron beam irradiation method, and apparatus for and method of manufacturing disc-shaped object

Abstract

Disclosed are an electron beam irradiation apparatus and an electron beam irradiation method that are capable of easily curing a material that is hard to be cured by irradiation of ultraviolet rays and of reducing the number of electron beam irradiation tubes. The electron beam irradiation apparatus has a motor for rotationally driving an irradiation target object, a shield container for rotatably accommodating the irradiation target object, and an electron beam irradiation unit provided in the shield container so that the surface of the irradiation target object is irradiated with electron beams, wherein the electron beam irradiation unit and the irradiation target object are relatively moved when the electron beam irradiation unit irradiates the surface of the irradiation target object with the electron beams during a rotation of the irradiation target object.

1 . An electron beam irradiation apparatus comprising: 
 a rotary driving unit for rotationally driving an irradiation target object;    a shield container for rotatably accommodating said irradiation target object; and    an electron beam irradiation unit provided in said shield container so that the surface of said irradiation target object is irradiated with electron beams,    wherein said electron beam irradiation unit and said irradiation target object are relatively moved when said electron beam irradiation unit irradiates the surface of said irradiation target object with the electron beams during a rotation of said irradiation target object.    
   
   
       2 . An electron beam irradiation apparatus according to  claim 1 , wherein a width of said electron beam irradiation unit in a direction orthogonal to a rotating direction of said irradiation target object within a rotating plane of said irradiation target object, is smaller than a maximum distance from the center of rotation within the rotating plane of said irradiation target object.  
   
   
       3 . An electron beam irradiation apparatus according to  claim 1 , wherein a rotating speed of said irradiation target object is changed corresponding to a position of the irradiation by said electron beam irradiation unit over said irradiation target object.  
   
   
       4 . An electron beam irradiation apparatus according to  claim 3 , wherein the rotating speed of said irradiation target object is decreased when said electron beam irradiation unit irradiates an outer periphery side of said irradiation target object with the electron beams and is increased when irradiating an inner periphery side with the electron beams.  
   
   
       5 . An electron beam irradiation apparatus according to  claim 1 , wherein a moving velocity of said electron beam irradiation unit is changed corresponding to the position of the irradiation by said electron beam irradiation unit over said irradiation target object.  
   
   
       6 . An electron beam irradiation apparatus according to  claim 5 , wherein the moving velocity of said electron beam irradiation unit is decreased when said electron beam irradiation unit irradiates the outer periphery side of said irradiation target object with the electron beams and is increased when irradiating the inner periphery side with the electron beams.  
   
   
       7 . An electron beam irradiation apparatus according to  claim 1 , wherein said electron beam irradiation unit comprises an irradiation window of a single electron beam irradiation tube.  
   
   
       8 . An electron beam irradiation method comprising the steps of: 
 rotationally driving an irradiation target object accommodated in a shield container that can be air-tightly closed; and    making relative movements of said electron beam irradiation unit and said irradiation target object when said electron beam irradiation unit irradiates the surface of said on-rotating irradiation target object with the electron beams.    
   
   
       9 . An electron beam irradiation method according to  claim 8 , further comprising the steps of changing a rotating speed of said irradiation target object corresponding to a position of the irradiation by said electron beam irradiation unit over said irradiation target object.  
   
   
       10 . An electron beam irradiation method according to  claim 9 , further comprising the steps of decreasing the rotating speed of said irradiation target object when said electron beam irradiation unit irradiates an outer periphery side of said irradiation target object with the electron beams; and 
 increasing the rotating speed when irradiating an inner periphery side with the electron beams.    
   
   
       11 . An electron beam irradiation method according to  claim 8 , further comprising the steps of changing a moving velocity of said electron beam irradiation unit corresponding to the position of the irradiation by said electron beam irradiation unit over said irradiation target object.  
   
   
       12 . An electron beam irradiation method according to  claim 11 , further comprising the steps of decreasing the moving velocity of said electron beam irradiation unit when said electron beam irradiation unit irradiates the outer periphery side of said irradiation target object with the electron beams; and 
 increasing the moving velocity when irradiating the inner periphery side with the electron beams.    
   
   
       13 . An apparatus for manufacturing a disc-shaped object, comprising: 
 a rotary driving unit for rotationally driving said disc-shaped object;    a shield container for rotatably accommodating said disc-shaped object; and    an electron beam irradiation unit provided in said shield container so that the surface of said disc-shaped object is irradiated with electron beams,    wherein said electron beam irradiation unit and said disc-shaped object are relatively moved when said electron beam irradiation unit irradiates the surface of said irradiation target object with the electron beams during a rotation of said irradiation target object, thereby curing a layer having functionability that is formed on said disc-shaped object.    
   
   
       14 . A method of manufacturing a disc-shaped object, comprising the steps of: 
 rotationally driving said disc-shaped object accommodated in a shield container that can be air-tightly closed;    making relative movements of said electron beam irradiation unit and said irradiation target object when said electron beam irradiation unit irradiates the surface of said on-rotating irradiation target object with the electron beams; and    curing a layer having functionability that is formed on said disc-shaped object by irradiating the layer with the electron beams.    
   
   
       15 . An apparatus for manufacturing a disc-shaped object, comprising: 
 an electron beam irradiation apparatus including a first rotational unit provided in an openable/closable shield container and accommodating a disc-shaped object rotationally driven, and an electron beam irradiation unit for irradiating the surface of said on-rotating disc-shaped object with electron beams;    a chamber including a second rotational unit capable of accommodating said disc-shaped object and an exchange chamber that is air-tightly closable and openable/closable independently of said shield container; and    a rotational unit for exchanging said first and second rotational units with each other by rotating said first rotational unit in said shield container and said second rotational unit in said exchange chamber,    wherein said electron beam irradiation unit and said disc-shaped object are relatively moved when irradiating said on-rotating disc-shaped object with the electron beams.    
   
   
       16 . An apparatus for manufacturing a disc-shaped object according to  claim 15 , wherein a width of said electron beam irradiation unit in a direction orthogonal to a rotating direction of said irradiation target object within a rotating plane of said disc-shaped object, is smaller than a radius of said disc-shaped object.  
   
   
       17 . An apparatus for manufacturing a disc-shaped object according to  claim 15 , wherein a rotating speed of said disc-shaped object is changed corresponding to a position of the irradiation by said electron beam irradiation unit over said disc-shaped object.  
   
   
       18 . An apparatus for manufacturing a disc-shaped object according to  claim 17 , wherein said first rotational unit and said second rotational unit are so constructed as to be capable of revolving, and said first rotational unit irradiates the surface of said on-rotating disc-shaped object with the electron beams from said electron beam irradiation unit.  
   
   
       19 . An apparatus for manufacturing a disc-shaped object according to  claim 17 , wherein the rotating speed of said disc-shaped object is decreased when said electron beam irradiation unit irradiates an outer periphery side of said disc-shaped object with the electron beams and is increased when irradiating an inner periphery side with the electron beams.  
   
   
       20 . An apparatus for manufacturing a disc-shaped object according to  claim 15 , wherein a moving velocity of said electron beam irradiation unit is changed corresponding to the position of the irradiation by said electron beam irradiation unit over said disc-shaped object.  
   
   
       21 . An apparatus for manufacturing a disc-shaped object according to  claim 20 , wherein the moving velocity of said electron beam irradiation unit is decreased when said electron beam irradiation unit irradiates the outer periphery side of said disc-shaped object with the electron beams and is increased when irradiating the inner periphery side with the electron beams.  
   
   
       22 . An apparatus for manufacturing a disc-shaped object according to  claim 15 , wherein said electron beam irradiation unit comprises an irradiation window of a single electron beam irradiation tube.