Arrangement for tipping a table

Abstract

The invention relates to a tilting table array for micro-positioning objects, preferably for defined generation of oscillating movements of optical objects, such as for instance mirror elements in projection lens arrays, including a tilting table carrying the object and connected to at least one drive element as well as a tilting table housing that is coupled to the tilting table via an elastic connection. According to the invention, the tilting table, the tilting table housing and the elastic connection comprise one monolithic unit.

1 . A tilting table array for micro-positioning an object, comprising a tilting table carrying the object and connected to at least one drive element and a tilting table housing that is coupled to the tilting table via an elastic connection, wherein the tilting table, the tilting table housing and the elastic connection comprise one monolithic unit.  
   
   
       2 . The tilting table array according to  claim 1 , wherein the monolithic unit comprises a metallic material.  
   
   
       3 . The tilting table array according to  claim 1 , wherein the monolithic unit comprises a non-metallic material.  
   
   
       4 . The tilting table array according to  claim 1 , wherein the monolithic unit is an injection molded part, a diecast part or a combination of the foregoing.  
   
   
       5 . The tilting table array according to  claim 1 , wherein the tilting table housing is connected, to a base plate or a locking lid serving the purpose of dust protection  
   
   
       6 . The tilting table array according to  claim 1 , wherein the at least one drive element is affixed to the base plate or the locking lid and are positively or non-positively connected to the tilting table.  
   
   
       7 . The tilting table array according to  claim 1 , wherein the drive element is attached in the tilting table housing.  
   
   
       8 . The tilting table array according to  claim 1 , wherein the elastic connection comprises at least one bending element, at least one torsion element or a combination of the foregoing.  
   
   
       9 . The tilting table array according to  claim 1 , wherein the elastic connection comprises a torsion element comprises a T-shaped joint modifiable in its geometric dimensions and in its position.  
   
   
       10 . The tilting table array according to  claim 9 , wherein the T-shaped joint is adjustable by variable tools during the injection molding process.  
   
   
       11 . The tilting table array according to  claim 1 , wherein the drive element is arranged such that its dynamic effect is directed adjacent to the elastic connection on the tilting table and wherein a counter-force is generated by a compression spring.  
   
   
       12 . The tilting table array according to  claim 11 , wherein the interior space of the compression spring is filled with an elastic shaping element for the purpose of reducing vibration in the array.  
   
   
       13 . The tilting table array according to  claim 12 , wherein the compression spring comprises a coil spring and the elastic shaping element comprises a silicone rubber mass that completely fills the interior space of the coil spring.  
   
   
       14 . The tilting table array according to  claim 1 , comprising at least two drive elements that are arranged symmetrically or asymmetrically to the elastic connection and that act on the tilting table with the same or different force.  
   
   
       15 . The tilting table array according to  claim 14 , in which the drive elements are arranged symmetrically.  
   
   
       16 . The tilting table array according to  claim 14 , in which the drive elements act with unequal force.  
   
   
       17 . The tilting table array according to  claim 1 , wherein the drive elements comprise piezo-actors.  
   
   
       18 . The tilting table array according to  claim 1  wherein the drive elements operate in accordance with the principle of magnetostriction, the principle of differential transformation, the principle of oscillating capacitors, the principle of bending plates, are step motors, hydraulic actors, pneumatic actors or a combination of the foregoing.  
   
   
       19 . The tilting table array according to  claim 1 , characterized in that the drive element is connected to the tilting table via a sphere.  
   
   
       20 . The tilting table array according to  claim 1 , wherein the object comprises an optical component.  
   
   
       21 . The tilting table array according to  claim 1 , wherein the tilting table supports an object receiver, wherein the connections between the object receiver and the tilting table and between the object receiver and the object are formed adhesive bonds.  
   
   
       22 . The tilting table array according to  claim 21 , wherein, the object receiver is pot-shaped and comprises an exterior base surface receiving the object and an interior wall for attaching to receiving contours of the tilting table for the purpose of attachment and assembly of the object to a reference plane.