Apparatus for manufacturing flat-panel display

Abstract

An flat-panel display (FPD) manufacturing apparatus which has a configuration capable of easily processing large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes.

1 . A separable vacuum chamber of a flat-panel display manufacturing apparatus comprising: 
 a top plate forming a top of the chamber;    a bottom plate facing the top plate and forming a bottom of the chamber;    a peripheral wall plate coupled, at upper and lower ends thereof, to the top plate and the bottom plate, respectively, to define a closed space, the peripheral wall plate having, at an end thereof connected to the bottom plate, an extension extending in a peripheral direction of the chamber inside the chamber to form a step on the bottom plate;    a cover member arranged on the bottom plate to extend in the peripheral direction of the chamber inside the chamber such that the cover member covers the extension of the peripheral wall plate; and    seal members interposed between the extension and the cover member and between the bottom plate and the cover member to shield the closed space from an outside of the chamber.    
   
   
       2 . A separable vacuum chamber of a flat-panel display manufacturing apparatus comprising: 
 a top plate forming a top of the chamber;    a bottom plate facing the top plate and forming a bottom of the chamber;    a peripheral wall plate coupled, at upper and lower ends thereof, to the top plate and the bottom plate, respectively, to define a closed space, the peripheral wall plate having, at an end thereof connected to the top plate, an extension extending in a peripheral direction of the chamber inside the chamber to form a step on the top plate;    a cover member arranged on the top plate to extend in the peripheral direction of the chamber inside the chamber such that the cover member covers the extension of the peripheral wall plate; and    seal members interposed between the extension and the cover member and between the top plate and the cover member to shield the closed space from an outside of the chamber.    
   
   
       3 . The separable vacuum chamber according to  claim 2 , wherein: 
 the peripheral wall plate further has, at an end thereof connected to the bottom plate, an extension extending in a peripheral direction of the chamber inside the chamber to form a step on the bottom plate; and    the vacuum chamber further comprises a cover member arranged on the bottom plate to extend in the peripheral direction of the chamber inside the chamber such that the cover member covers the extension of the peripheral wall plate, and seal members interposed between the extension and the cover member and between the bottom plate and the cover member to shield the closed space from an outside of the chamber.    
   
   
       4 . The separable vacuum chamber according to  claim 1  or  2 , wherein: 
 the seal members are O-rings, respectively; and    the O-ring interposed between the extension and the cover member and the O-ring interposed between the top or bottom plate and the cover member are coupled with each other or are separate from each other.    
   
   
       5 . The separable vacuum chamber according to  claim 4 , wherein the O-ring interposed between the extension and the cover member is arranged on an inner surface of the extension or an end surface of the extension.  
   
   
       6 . A flat-panel display manufacturing apparatus comprising a load lock chamber, a feeding chamber, and a processing chamber, wherein: 
 at least one of the chambers comprises at least two sub chambers, which are vertically stacked; and    the sub chambers have, at contact portions thereof, protrusion/groove type engagement structures engagable with each other, respectively.    
   
   
       7 . The flat-panel display manufacturing apparatus according to  claim 6 , wherein each of the protrusion/groove type engagement structures has protrusions and grooves, each of which has a rectangular shape, a right-angled triangular shape, a semicircular shape, or a polygonal shape.  
   
   
       8 . The flat-panel display manufacturing apparatus according to  claim 6 , wherein the sub chambers perform the same function or performs different functions, respectively.  
   
   
       9 . A separable vacuum chamber used in manufacturing flat-panel displays, comprising: 
 a chamber housing divided into at least two sections,    wherein the vacuum chamber is formed by assembling the chamber housing sections, together with elements to be arranged in the vacuum chamber.    
   
   
       10 . The separable vacuum chamber according to  claim 9 , wherein the vacuum chamber has a circular cross-sectional shape parallel to the ground.  
   
   
       11 . The separable vacuum chamber according to  claim 10 , wherein the vacuum chamber is a feeding chamber arranged between a load lock chamber and a processing chamber to feed a substrate.  
   
   
       12 . The separable vacuum chamber according to  claim 11 , wherein each of the chamber housing sections includes dampers formed at respective coupling ends of the chamber housing section, at which the chamber housing section is coupled with the other chamber housing section, to firmly couple the chamber housing sections.  
   
   
       13 . The separable vacuum chamber according to  claim 12 , wherein: 
 each of the dampers extends radially outwardly from the associated coupling end of the associated chamber housing section; and    each of the dampers has a plurality of uniformly-spaced clamping holes, in which clamping bolts are coupled when the chamber housing sections are assembled, respectively.    
   
   
       14 . The separable vacuum chamber according to  claim 13 , wherein: 
 each of the chamber housing sections has a seal member receiving groove formed at each coupling end of the chamber housing section; and    the chamber housing sections are coupled with each other under the condition in which a seal member is fitted between the seal member receiving grooves of the chamber housing sections.    
   
   
       15 . The separable vacuum chamber according to any one of  claims 10  to  14 , wherein the chamber housing is divided into an intermediate section, and a pair of arc-shaped sections respectively arranged at opposite sides of the intermediate section while facing each other, each of the arc-shaped sections having a central angle of 90°±10°.  
   
   
       16 . A flat-panel display manufacturing apparatus comprising a plurality of chambers each adapted to perform a required process for a substrate, wherein at least one of the chambers comprises: 
 a chamber housing having a gateway formed at a top of the chamber housing;    a top cover mounted to the top of the chamber housing to open/close the gateway, and provided with one or more openings formed through the top cover in a thickness direction of the top cover;    one or more auxiliary covers each mounted to the top cover to open/close an associated one of the one or more openings; and    one or more seal members each interposed between the top cover and an associated one of the one or more auxiliary covers to provide a sealing effect between the top cover and the associated auxiliary cover.    
   
   
       17 . The flat-panel display manufacturing apparatus according to  claim 16 , wherein the chamber is a feeding chamber.  
   
   
       18 . The flat-panel display manufacturing apparatus according to  claim 16 , wherein the chamber is a processing chamber.  
   
   
       19 . The flat-panel display manufacturing apparatus according to  claim 17  or  18 , wherein the top cover is made of stainless steel.  
   
   
       20 . The flat-panel display manufacturing apparatus according to  claim 19 , wherein the number of the one or more auxiliary covers is two or three.  
   
   
       21 . The flat-panel display manufacturing apparatus according to  claim 20 , wherein the one or more auxiliary covers are made of aluminum.  
   
   
       22 . The flat-panel display manufacturing apparatus according to  claim 21 , further comprising: 
 connecting rings fixed to an upper surface of the top cover to connect the top cover to a crane; and    connecting rings fixed to an upper surface of each of the one or more auxiliary covers to connect the auxiliary cover to the crane.    
   
   
       23 . A flat-panel display manufacturing apparatus comprising a load lock chamber, a feeding chamber, and a processing chamber, to manufacture flat-panel displays, wherein the load lock chamber comprises: 
 a vacuum chamber housing, in which vacuum can be established;    an opening formed through a peripheral wall of the vacuum chamber housing to allow a substrate to pass through the opening for loading of the substrate into the vacuum chamber housing and unloading of the substrate from the vacuum chamber housing;    a gate valve adapted to open/close the opening; and    end effecter receiving grooves formed at a bottom wall of the vacuum chamber housing to receive end effectors of a substrate feeding robot installed outside the load lock chamber, respectively, each of the end effecter receiving grooves having a predetermined depth to allow an associated one of the end effectors to move vertically in the end effecter receiving groove.    
   
   
       24 . The flat-panel display manufacturing apparatus according to  claim 23 , wherein the load lock chamber further comprises: 
 a substrate guide arranged along a peripheral edge of the bottom wall of the vacuum chamber housing, the substrate guide having a structure inclined toward a central portion of the vacuum chamber housing.    
   
   
       25 . The flat-panel display manufacturing apparatus according to  claim 23  or  24 , wherein the load lock chamber further comprises: 
 at least two loading dies arranged in the vacuum chamber housing while being vertically spaced apart from one another to load substrates on the loading dies, respectively; and    a plurality of uniformly-spaced substrate support members arranged on each of the loading dies, each of the substrate support members having a length to allow the end effecters to move vertically in a state of being inserted into a gap defined between the loading die and a substrate supported by the substrate support members.    
   
   
       26 . The flat-panel display manufacturing apparatus according to  claim 23  or  24 , wherein the load lock chamber further comprises: 
 substrate protection members arranged on the bottom wall of the vacuum chamber housing at regions where a substrate laid on the bottom wall come into contact with the bottom wall, the substrate protection members being made of a material exhibiting a hardness lower than a hardness of the substrate.    
   
   
       27 . The flat-panel display manufacturing apparatus according to  claim 24 , wherein the substrate guide has a U-shaped structure having, at one side thereof, an opening to allow the end effectors to pass through the substrate guide.  
   
   
       28 . The flat-panel display manufacturing apparatus according to  claim 25 , further comprising: 
 aligners respectively arranged around the loading dies to adjust positions of substrates loaded on the loading dies.    
   
   
       29 . A method for loading a substrate in a load lock chamber, comprising the steps of: 
 A) opening an opening of the load lock chamber, and inserting a substrate into the load lock chamber by use of a substrate feeding robot while inserting end effecters of the feeding robot into end effecter receiving grooves of the load lock chamber;    B) lowering the end effecters of the feeding robot in the end effecter receiving grooves, thereby loading the substrate in the load lock chamber;    C) horizontally moving the feeding robot, thereby ejecting the feeding robot from the load lock chamber; and    D) closing the opening, and establishing a vacuum atmosphere in the load lock chamber.    
   
   
       30 . The method according to  claim 29 , further comprising: 
 aligning step of correcting a position of the substrate, following step B).    
   
   
       31 . The method according to  claim 30 , wherein the aligning step is automatically carried out in accordance with a sliding movement of the substrate carried out on an inclined substrate guide arranged at a peripheral wall of the load lock chamber when the substrate is laid on the inclined substrate guide at step B).  
   
   
       32 . A flat-panel display manufacturing apparatus comprising a load lock chamber, a feeding chamber, and a processing chamber, wherein the feeding chamber comprises: 
 a feeding robot comprising a feeding arm arranged at a lower portion of the feeding chamber, and a driver coupled to a lower end of the feeding arm, and seated on a bottom of the feeding chamber;    a vertical driver arranged beneath the feeding chamber, and adapted to lift the feeding robot to a level of a door;    a driver gateway formed at one side of the feeding chamber to allow the driver to pass through the driver gateway; and    the door mounted to the feeding chamber to open/close the driver gateway.    
   
   
       33 . The flat-panel display manufacturing apparatus according to  claim 32 , further comprising: 
 a seal member interposed between contact surfaces of the drive gateway and door to provide a seal effect between the gateway and the door.    
   
   
       34 . The flat-panel display manufacturing apparatus according to  claim 32 , further comprising: 
 guide members arranged on the bottom of the feeding chamber to extend rectilinearly to the driver gateway, and adapted to guide movement of the feeding robot though the driver gateway.    
   
   
       35 . The flat-panel display manufacturing apparatus according to  claim 34 , further comprising: 
 auxiliary guide members slidably mounted to the guide members, respectively, such that the auxiliary guide members extend and retract through the driver gateway to guide the movement of the feeding robot though the driver gateway.    
   
   
       36 . The flat-panel display manufacturing apparatus according to  claim 34 , further comprising: 
 auxiliary guide members hingably mounted to the guide members, respectively, such that the auxiliary guide members extend and retract through the driver gateway in accordance with hinging operations to guide the movement of the feeding robot though the driver gateway.    
   
   
       37 . A flat-panel display manufacturing apparatus comprising an electric field generating system, a processing gas supplying system, and an exhausting system, which are arranged in a vacuum chamber, to perform a required process for a substrate loaded in the vacuum chamber, wherein the vacuum chamber comprises: 
 a chamber body forming a side wall of the vacuum chamber;    a top cover coupled to a top portion of the chamber body to form a top wall of the vacuum chamber; and    a bottom cover coupled to a bottom portion of the chamber body to form a bottom wall of the vacuum chamber,    wherein the chamber body is provided, at a lower end thereof, with an engagement rim horizontally inwardly protruded from the lower end of the chamber body to be engaged with the bottom cover,    wherein the lower cover is provided, at a peripheral edge thereof, with an engagement groove having a shape conforming to the engagement rim.    
   
   
       38 . The flat-panel display manufacturing apparatus according to  claim 37 , wherein: 
 at least one of the engagement rim and engagement groove is provided with a seal member receiving groove; and    a seal member is fitted in the seal member receiving groove.    
   
   
       39 . The flat-panel display manufacturing apparatus according to  claim 37 , wherein the engagement rim and engagement groove have inclined engagement surfaces, respectively.  
   
   
       40 . The flat-panel display manufacturing apparatus according to  claim 37 , wherein the bottom cover includes a plurality of feeding device coupling grooves arranged at an upper surface of the bottom cover along the peripheral edge of the bottom cover.  
   
   
       41 . The flat-panel display manufacturing apparatus according to  claim 40 , wherein the bottom cover further includes coupling blocks, which are fittable in respective feeding device coupling holes such that an upper end of each coupling block is flush with the upper surface of the bottom cover.  
   
   
       42 . A method for repairing a flat-panel display manufacturing apparatus, comprising the steps of: 
 A) separating a top cover from a chamber body by a feeding device;    B) separating a bottom cover from the chamber body by the feeding device, and laying the bottom cover on a working die;    C) repairing the bottom cover;    D) coupling the bottom cover to the chamber body by the feeding device; and    E) coupling the top cover to the chamber body by the feeding device.    
   
   
       43 . The method according to  claim 42 , wherein step B) comprises the steps of: 
 B-1) coupling the feeding device to feeding device coupling holes formed at an upper surface of the bottom cover;    B-2) lifting the bottom cover to a level higher than the chamber body by driving the feeding device; and    B-3) moving the bottom cover to a position where the bottom cover is positioned just over the chamber body, and lowering the bottom cover into the chamber body such that the bottom cover is mounted to the chamber body.    
   
   
       44 . The method according to  claim 42 , wherein step D comprises the steps of: 
 D-1) lifting the bottom cover to a level higher than the chamber body by driving the feeding device;    D-2) moving the bottom cover to a position where the bottom cover is positioned just over the chamber body, and lowering the bottom cover into the chamber body such that the bottom cover is mounted to the chamber body; and    D-3) firmly fixing the bottom cover to the chamber body.