Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated fluid discharge apparatus

Abstract

A fluid actuating apparatus is proposed, which includes: a diaphragm for providing a pressure change in fluid; a diaphragm-side electrode, formed for the diaphragm, for actuating the diaphragm; a substrate-side electrode formed so that it faces the diaphragm-side electrode; a space formed between the diaphragm-side electrode and the substrate-side electrode; and a support post, formed on the substrate-side electrode, for supporting the diaphragm-side electrode through the space. where the diaphragm-side electrode is formed so that it passes through the support post and extends to and covers part of the bottom of the support post.

1 . A fluid actuating apparatus comprising: 
 a diaphragm for providing a pressure change in fluid;    a diaphragm-side electrode, formed for said diaphragm, for actuating said diaphragm;    a substrate-side electrode formed so that it faces said diaphragm-side electrode;    a space formed between said diaphragm-side electrode and said substrate-side electrode; and    a support post, formed on said substrate-side electrode, for supporting said diaphragm-side electrode through said space;    wherein said diaphragm-side electrode is formed so that it passes through said support post and extends to and covers part of the bottom of said support post.    
   
   
       2 . A method for manufacturing a fluid actuating apparatus, said method comprising the steps of: 
 forming a substrate-side electrode on a substrate;    forming a first insulating film on said substrate-side electrode;    forming a sacrifice layer pattern for forming a space in a region above said first insulating film, excluding a support post-forming region;    forming a second insulating film for covering said sacrifice layer pattern;    forming a diaphragm-side electrode through said second insulating film on the upper surface of said sacrifice layer pattern, the sidewall of said sacrifice layer pattern, and part of the bottom of said support post-forming region;    forming a third insulating film for covering said diaphragm-side electrode;    forming, on said third insulating film, a diaphragm for providing a pressure change in fluid; and    removing said sacrifice layer pattern to form a space in a region formed by removing said sacrifice layer pattern, and further forming, in said support post-forming region formed at the side portion of said space, a support post from said second insulating film, said diaphragm-side electrode, said third insulating film, and said diaphragm.    
   
   
       3 . An electrostatically-actuated fluid discharge apparatus comprising: 
 a diaphragm for providing a pressure change in fluid;    a diaphragm-side electrode, formed for said diaphragm, for actuating said diaphragm;    a substrate-side electrode formed so that it faces said diaphragm-side electrode;    a space formed between said diaphragm-side electrode and said substrate-side electrode; and    a support post, formed on said substrate-side electrode, for supporting said diaphragm-side electrode through said space;    wherein said diaphragm-side electrode is formed so that it passes through said support post and extends to and covers part of the bottom of said support post, and said diaphragm has formed thereon a pressure chamber having a fluid feed section and a fluid discharge section.    
   
   
       4 . A method for manufacturing an electrostatically-actuated fluid discharge apparatus, said method comprising the steps of: 
 forming a substrate-side electrode on a substrate;    forming a first insulating film on said substrate-side electrode;    forming a sacrifice layer pattern for forming a space in a region above said first insulating film, excluding a support post-forming region;    forming a second insulating film for covering said sacrifice layer pattern;    forming a diaphragm-side electrode through said second insulating film on the upper surface of said sacrifice layer pattern, the sidewall of said sacrifice layer pattern, and part of the bottom of said support post-forming region;    forming a third insulating film for covering said diaphragm-side electrode;    forming, on said third insulating film, a diaphragm for providing a pressure change in fluid;    removing said sacrifice layer pattern to form a space in a region formed by removing said sacrifice layer pattern, and further forming, in said support post-forming region formed at the side portion of said space, a support post from said second insulating film, said diaphragm-side electrode, said third insulating film, and said diaphragm; and    forming, on said diaphragm through said third insulating film, a pressure chamber having a fluid feed section and a fluid discharge section.    
   
   
       5 . A fluid actuating apparatus comprising: 
 a diaphragm for providing a pressure change in a fluid;    a diaphragm-side electrode, formed for said diaphragm, for actuating said diaphragm;    a substrate-side electrode formed so that it faces said diaphragm-side electrode;    a space formed between said diaphragm-side electrode and said substrate-side electrode; and    a support post, formed on said substrate-side electrode, for supporting said diaphragm-side electrode through said space;    wherein said diaphragm-side electrode is formed so that it extends from said support post to another.    
   
   
       6 . A method for manufacturing a fluid actuating apparatus, said method comprising the steps of: 
 forming a substrate-side electrode on a substrate;    forming a first insulating film on said substrate-side electrode;    forming a sacrifice layer pattern for forming a space in a region above said first insulating film, excluding a support post-forming region;    forming a second insulating film for covering said sacrifice layer pattern;    forming a diaphragm-side electrode through said second insulating film on said sacrifice layer pattern including a portion between said support post-forming regions;    forming a third insulating film for covering said diaphragm-side electrode;    forming, on said third insulating film, a diaphragm for providing a pressure change in fluid; and    removing said sacrifice layer pattern to form a space in a region formed by removing said sacrifice layer pattern, and further forming, in said support post-forming region formed at the side portion of said space, a support post from said second insulating film, said third insulating film, and said diaphragm.    
   
   
       7 . An electrostatically-actuated fluid discharge apparatus comprising: 
 a diaphragm for providing a pressure change in fluid;    a diaphragm-side electrode, formed for said diaphragm through an insulating film, for actuating said diaphragm;    a substrate-side electrode formed so that it faces said diaphragm-side electrode;    a space formed between said diaphragm-side electrode and said substrate-side electrode; and    a support post, formed on said substrate-side electrode, for supporting said diaphragm-side electrode through said space,    wherein said diaphragm-side electrode is formed so that it extends from said support post to another, and said diaphragm has formed thereon a pressure chamber having a fluid feed section and a fluid discharge section.    
   
   
       8 . A method for manufacturing an electrostatically-actuated fluid discharge apparatus, said method comprising the steps of: 
 forming a substrate-side electrode on a substrate;    forming a first insulating film on said substrate-side electrode;    forming a sacrifice layer pattern for forming a space in a region above said first insulating film, excluding a support post-forming region;    forming a second insulating film for covering said sacrifice layer pattern;    forming a diaphragm-side electrode through said second insulating film on said sacrifice layer pattern including a portion between said support post-forming regions;    forming a third insulating film for covering said diaphragm-side electrode;    forming, on said third insulating film, a diaphragm for providing a pressure change in fluid;    removing said sacrifice layer pattern to form a space in a region formed by removing said sacrifice layer pattern, and further forming, in said support post-forming region formed at the side portion of said space, a support post from said second insulating film, said third insulating film, and said diaphragm; and    forming, on said diaphragm through said third insulating film, a pressure chamber having a fluid feed section and a fluid discharge section.