Method and device for vibration control

Abstract

A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.

1 - 26 . (canceled)  
   
   
       27 . A vibration control system for use in a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and  
   a circuit in electrical communication with said actuator assembly; 
 wherein said circuit signals said actuator assembly to control vibration of said fabricating system.  
   
   
   
       28 . A vibration control system for use in a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and  
   a sensor for detecting at least one parameter of performance of said fabricating system and producing a signal in response thereto;    and a circuit in electrical communication with said actuator assembly and said sensor;    wherein, upon the detection of said at least one parameter of performance by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.    
   
   
       29 . A vibration control system for use with a fabricating system having a support structure, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and  
 a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and  
   a circuit in electrical communication with said actuator assembly and said sensor;    wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration in said support structure.    
   
   
       30 . A fabricating system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly;  
   a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and    a circuit in electrical communication with said actuator assembly and said sensor;    wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.    
   
   
       31 . A vibration control system for use with a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element;  
   a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and    a circuit in electrical communication with said actuator assembly and said sensor; 
 wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.  
   
   
   
       32 . A vibration control system for use in a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and  
   a circuit in electrical communication with said actuator assembly; 
 wherein said circuit signals said actuator assembly to control vibration of said fabricating system.  
   
   
   
       33 . A vibration control system for use in a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and  
   a sensor for detecting at least one parameter of performance of said fabricating system and producing a signal in response thereto;    and a circuit in electrical communication with said actuator assembly and said sensor;    wherein, upon the detection of said at least one parameter of performance by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.    
   
   
       34 . A vibration control system for use with a fabricating system having a support structure, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and  
   a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and    a circuit in electrical communication with said actuator assembly and said sensor;    wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration in said support structure.    
   
   
       35 . A fabricating system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a piezoelectric or electrorestrictive plate, shell, fiber or composite; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly comprising a thin sheet attached to a major face of the strain element; and  
   a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and    a circuit in electrical communication with said actuator assembly and said sensor; 
 wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.  
   
   
   
       36 . A vibration control system for use with a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly;  
   a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and    a circuit in electrical communication with said actuator assembly and said sensor; 
 wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.  
   
   
   
       37 . A vibration control system for use in a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly;  
 said actuator assembly comprising  
 (a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and  
   a circuit in electrical communication with said actuator assembly; 
 wherein said circuit signals said actuator assembly to control vibration of said fabricating system.  
   
   
   
       38 . A vibration control system for use in a fabricating system, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and  
   a sensor for detecting at least one parameter of performance of said fabricating system and producing a signal in response thereto;    and a circuit in electrical communication with said actuator assembly and said sensor;    wherein, upon the detection of said at least one parameter of performance by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.    
   
   
       39 . A vibration control system for use with a fabricating system having a support structure, said vibration control system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and  
   a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and    a circuit in electrical communication with said actuator assembly and said sensor;    wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration in said support structure.    
   
   
       40 . A fabricating system comprising: 
 an actuator assembly for controlling vibration;    said actuator assembly comprising 
 (a) a strain element comprising a thin piezoelectric or electrorestrictive element having one or both of the length and width dimensions of the thin element at least tens of time greater than the thickness of the thin element; and  
 (b) a conductor;  
 wherein said strain element and said conductor are mounted in a housing forming a protective body about the strain element, together forming a flexible actuator assembly; and  
   a sensor for detecting at least one parameter of displacement of said fabricating system and producing a signal in response thereto; and    a circuit in electrical communication with said actuator assembly and said sensor; 
 wherein, upon the detection of said at least one parameter of displacement by said sensor, said sensor signals said circuit, which, in response, activates said actuator assembly to control vibration.