High-concentration particle concentrate, powder, preparing method of high-concentration particle concentrate, and preparing method of powder

Abstract

A powder preparing device has a filtering device which processes CMP waste water and a vacuum dry-freezing device which dries a slurry which is concentrated to a high concentration by the filtering device. A membrane module in which at least one gel filtering film in which a gel layer is formed on a surface of a filtering membrane having a pore size of 0.25 μm is provided is placed within the filtering device. A pump sucks waste water from within the gel filtering membrane of the membrane module. The high-concentration slurry obtained by the filtering device may be supplied for various uses without further processing, or a powder may be obtained by transporting the high-concentration slurry to the vacuum dry-freezing device using a transporting pump and applying a drying process.

1 . A high-concentration particle concentrate obtained by concentrating a solution containing particles in a low concentration having a pH adjusted to 3 or greater and 8 or less to a slurry containing particles in a high concentration having a concentration of 1 weight % to 50 weight %.  
   
   
       2 . A method of preparing a high-concentration particle concentrate wherein 
 a solution containing particles in a low concentration having a pH adjusted to 3 or greater and 8 or less is concentrated to form a slurry containing particles in a high concentration having a concentration of 1 weight % to 50 weight %.    
   
   
       3 . A method of preparing a powder, wherein 
 the slurry containing particles in high concentration which is the high-concentration particle concentrate according to  claim 1  is further processed so that a concentration of a slurry containing particles is adjusted during re-dispersing according to a size of powder to be obtained after the drying process, and then the drying process is applied.    
   
   
       4 . A method of preparing a powder, wherein 
 the slurry containing particles in high concentration according to  claim 2  is further processed so that a concentration of a slurry containing particles is adjusted during re-dispersing according to a size of powder to be obtained after drying, and then the drying process is applied.    
   
   
       5 . A method of preparing powder, wherein 
 a powder is created by vacuum freeze-drying a slurry having a pH adjusted to 3 or greater and 8 or less and containing particles in a concentration of 20 weight % to 50 weight %.    
   
   
       6 . A high-concentration particle concentrate according to  claim 1 , wherein 
 the average particle sizer of the particle concentrate is 50 nm to 500 nm.    
   
   
       7 . A method of preparing high-concentration particle concentrate according to  claim 2 , wherein 
 an average particle size of the particle concentrate is 50 nm to 500 nm.    
   
   
       8 . A method of preparing powder according to  claim 3 , wherein 
 an average particle size of the particle concentrate is 50 nm to 500 nm.    
   
   
       9 . A method of preparing powder according to  claim 4 , wherein 
 an average particle size of the particle concentrate is 50 nm to 500 nm.    
   
   
       10 . A method of preparing powder according to  claim 5 , wherein 
 an average size of the particles in a slurry is 50 nm to 500 nm.    
   
   
       11 . A high-concentration particle concentrate according to  claim 1 , wherein 
 the solution containing particles in low concentration is CMP waste water.    
   
   
       12 . A method of preparing a high-concentration particle concentrate according to  claim 2 , wherein 
 the solution containing particles in low concentration is CMP waste water.    
   
   
       13 . A high-concentration particle concentrate according to  claim 1 , wherein 
 the particles include at least SiO 2 .    
   
   
       14 . A method of preparing high-concentration particle concentrate according to  claim 2 , wherein 
 the particles include at least SiO 2 .    
   
   
       15 . A method of preparing powder according to  claim 3 , wherein 
 the particles include at least SiO 2 .    
   
   
       16 . A method of preparing powder according to  claim 4 , wherein 
 the particles include at least SiO 2 .    
   
   
       17 . A method of preparing powder according to  claim 5 , wherein 
 the particles include at least SiO 2 .    
   
   
       18 . A high-concentration particle concentrate according to  claim 1 , wherein 
 the solution containing particles in low concentration is prepared by mixing acidic CMP waste water and basic CMP waste water so that the pH is 3 or greater and 8 or less.    
   
   
       19 . A method of preparing high-concentration particle concentrate according to  claim 2 , wherein 
 the solution containing particles in low concentration is prepared by mixing acidic CMP waste water and basic CMP waste water so that the pH is 3 or greater and 8 or less.    
   
   
       20 . A high-concentration particle concentrate according to  claim 1 , wherein 
 the particles include at least one of SiO 2 , ceria, alumina, titania, a metal hydroxide, an oxide, ceramic, indium, iron hydroxide, and calcium fluoride.    
   
   
       21 . A method of preparing high-concentration particle concentrate according to  claim 2 , wherein 
 the particles include at least one of SiO 2 , ceria, alumina, titania, a metal hydroxide, anoxide, ceramic, indium, iron hydroxide, and calcium fluoride.    
   
   
       22 . A method of preparing powder according to  claim 3 , wherein 
 the particles include at least one of SiO 2 , ceria, alumina, titania, a metal hydroxide, anoxide, ceramic, indium, iron hydroxide, and calcium fluoride.    
   
   
       23 . A method of preparing powder according to  claim 4 , wherein 
 the particles include at least one of SiO 2 , ceria, alumina, titania, a metal hydroxide, anoxide, ceramic, indium, iron hydroxide, and calcium fluoride.    
   
   
       24 . A method of preparing powder according to  claim 5 , wherein 
 the particles include at least one of SiO 2 , ceria, alumina, and titania.    
   
   
       25 . A method of preparing powder according to  claim 3 , wherein 
 the specific surface area of the obtained powder is 10 m 2 /g to 400 m 2 /g.    
   
   
       26 . A method of preparing powder according to  claim 4 , wherein 
 the specific surface area of the obtained powder is 10 m 2 /g to 400 m 2 /g.    
   
   
       27 . A method of preparing powder according to  claim 5 , wherein 
 the specific surface area of the obtained powder is 10 m 2 /g to 400 m 2 /g.    
   
   
       28 . A powder obtained by a method of preparing powder according to  claim 5 , wherein 
 an average size of the obtained powder is 5 μm to 100 μm.    
   
   
       29 . A glaze containing a high-concentration particle concentrate according to  claim 1 .  
   
   
       30 . A polisher containing a high-concentration particulate concentrate according to  claim 1 .  
   
   
       31 . A cosmetic product containing a high-concentration particle concentrate according to  claim 1 .  
   
   
       32 . A powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       33 . A powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       34 . A porous material made of a powder obtained by the method of preparing powder according to  claim 5 .  
   
   
       35 . A cosmetic product containing a powder obtained by the method of preparing powder according to  claim 5 .  
   
   
       36 . An adsorbent containing a powder obtained by a method of preparing powder according to  claim 5 .  
   
   
       37 . A ceramic containing a powder obtained by the method of preparing powder according to  claim 5 .  
   
   
       38 . A filtering assisting agent containing a powder obtained by the method of preparing powder according to  claim 5 .  
   
   
       39 . A hydrophilic processing agent containing a powder obtained by the method of preparing powder according to  claim 5 .  
   
   
       40 . A filler for an analysis equipment, the filler containing a powder obtained by the method of preparing powder according to  claim 5 .  
   
   
       41 . An additive of a toner for printing, the additive containing a powder obtained by the method of preparing powder according to  claim 5 .  
   
   
       42 . A porous material made of a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       43 . A cosmetic product containing a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       44 . An adsorbent containing a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       45 . A ceramic containing a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       46 . A filtering assisting agent containing a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       47 . A hydrophilic processing agent containing a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       48 . A filler for an analysis equipment, the filler containing a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       49 . An additive of a toner for printing, the additive containing a powder obtained by the method of preparing powder according to  claim 3 .  
   
   
       50 . A porous material made of a powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       51 . A cosmetic product containing a powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       52 . An adsorbent containing a powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       53 . A ceramic containing powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       54 . A filtering assisting agent containing a powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       55 . A hydrophilic processing agent containing a powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       56 . A filler for an analysis equipment, the filler containing a powder obtained by the method of preparing powder according to  claim 4 .  
   
   
       57 . An additive of a toner for printing, the additive containing a powder obtained by the method of preparing powder according to  claim 4.