Lid unit for thin plate supporting container

Abstract

A lid unit seals a container main body of a thin-plate supporting container which is conveyed while plural 300 mm-diameter semiconductor wafers are stored in the container. In a wafer retainer which supports the wafers stored in the container main body, the maximum amount of displacement is set in a range of 1.5 to 2.5 mm (ranges from 1/200 to 1/120 of the semiconductor wafer diameter), and proportionality is held between the amount of displacement and external force when the maximum amount of displacement ranges from 1.5 to 2.5 mm. In the states in which the wafer retainer is fitted in the container main body and force is not applied, the wafer retainer is arranged at a position in which the wafer retainer is not in contact with the semiconductor wafers stored in the container main body or at a position in which the wafer retainer is in slight contact with the semiconductor wafers. Therefore, the lid unit can be attached and detached without fixing the container main body, so that vibration-resistant performance and shock-resistant performance are improved by preventing spring resistance force from rapidly increasing, and automatization of the attachment and detachment of the lid unit is easy to realize.

1 . A lid unit for a thin plate supporting container with which a container main body of a thin-plate supporting container is covered, the thin-plate supporting container in which a plurality of disk-shaped thin plates are stored and conveyed, 
 the lid unit comprising a thin-plate retainer which supports the disk-shaped thin plates stored in the container main body,    wherein the maximum amount of displacement of the thin-plate retainer is set in a range of 1/200 to 1/120 of a diameter of the disk-shaped thin plate.    
   
   
       2 . A lid unit for a thin plate supporting container with which a container main body of a thin-plate supporting container is covered, the thin-plate supporting container in which a plurality of disk-shaped thin plates having diameter of 300 mm are stored and conveyed, 
 the lid unit comprising a thin-plate retainer which supports the disk-shaped thin plates stored in the container main body,    wherein the maximum amount of displacement of the thin-plate retainer is set in a range of 1.5 mm to 2.5 mm.    
   
   
       3 . The lid unit for a thin plate supporting container according to  claim 1 , wherein proportionality is held between the amount of displacement of the thin-plate retainer and external force when the maximum amount of displacement of the thin-plate retainer ranges from 1.5 mm to 2.5 mm.  
   
   
       4 . The lid unit for a thin plate supporting container according to  claim 1 , wherein the thin-plate retainer is arranged at a position in which the thin-plate retainer is not in contact with the disk-shaped thin plates stored in the container main body or at a position in which the thin-plate retainer is in slight contact with the disk-shaped thin plates in a state that the thin-plate retainer is fitted in the container main body and any force is not applied.  
   
   
       5 . The lid unit for a thin plate supporting container according to  claim 1 , further comprising a support convex strip which is molded such that both end sides are thinned and a central side is thickened, the support convex strip absorbing deformation of the lid unit to support the disk-shaped thin plates with even force.  
   
   
       6 . The lid unit for a thin plate supporting container according to  claim 2 , wherein the thin-plate retainer is arranged at a position in which the thin-plate retainer is not in contact with the disk-shaped thin plates stored in the container main body or at a position in which the thin-plate retainer is in slight contact with the disk-shaped thin plates in a state that the thin-plate retainer is fitted in the container main body and any force is not applied.  
   
   
       7 . The lid unit for a thin plate supporting container according to  claim 2 , further comprising a support convex strip which is molded such that both end sides are thinned and a central side is thickened, the support convex strip absorbing deformation of the lid unit to support the disk-shaped thin plates with even force.