Polishing apparatus and method of polishing a subject

Abstract

A polishing apparatus. The polishing apparatus has an abrasive cloth and a table to rotate the abrasive cloth. A holder holds a subject to be polished against the abrasive cloth. A discharger discharges a polishing solution from the abrasive cloth after the polishing solution passes between the abrasive cloth and the subject.

1 . A polishing apparatus, comprising: 
 an abrasive cloth;    a table to rotate the abrasive cloth;    a holder configured to hold a subject to be polished against the abrasive cloth; and    a discharger to discharge a polishing solution from the abrasive cloth after the polishing solution passes between the abrasive cloth and the subject    
   
   
       2 . A polishing apparatus according to  claim 1 , further comprising a supplying mechanism to supply the polishing solution onto the abrasive cloth.  
   
   
       3 . A polishing apparatus according to  claim 1 , wherein the discharger comprises a dam.  
   
   
       4 . A polishing apparatus according to  claim 1 , wherein the holder comprises a top ring to rotate the subject, the discharger comprises a flat wall, and an inclination of the flat wall with reference to a plane which passes through a rotational axis of both the rotary table and the top ring is −10 through −90 degrees with the clockwise rotation viewed from the top face of the rotary table assumed to be positive.  
   
   
       5 . A polishing apparatus according to  claim 1 , wherein the discharger comprises a blower.  
   
   
       6 . A polishing apparatus according to  claim 1 , wherein the discharger comprises an absorber to absorb the polishing solution.  
   
   
       7 . A polishing apparatus according to  claim 1 , wherein the discharger comprises a suction unit to suck in the polishing solution.  
   
   
       8 . A polishing apparatus according to  claim 1 , wherein the abrasive cloth is bonded on the top surface of the rotary table.  
   
   
       9 . A polishing apparatus according to  claim 2 , wherein the discharger comprises a plate to dam the polishing solution, and wherein the plate is up the polishing solution stream from the supplying mechanism.  
   
   
       10 . A polishing apparatus according to  claim 3 , wherein the dam exerts force on the polishing solution in a radially outward direction of the rotary table.  
   
   
       11 . A polishing apparatus according to  claim 3 , wherein the dam includes a flat wall to dam the polishing solution.  
   
   
       12 . A polishing apparatus according to  claim 3 , wherein the dam includes a curved wall to dam the polishing solution.  
   
   
       13 . A polishing apparatus according to  claim 9 , wherein the holder is a top ring to rotate the subject and wherein a plane which passes through a rotational axes of both the rotary table and the top ring separates the plate from the supplying mechanism.  
   
   
       14 . A method of polishing a subject, comprising: 
 rotating an abrasive cloth;    providing a polishing solution between the subject and the abrasive cloth; and    discharging the polishing solution from the abrasive cloth after the polishing solution passes between the subject and the abrasive cloth.    
   
   
       15 . A method of polishing a subject according to  claim 14 , wherein rotating an abrasive cloth includes rotating an abrasive cloth on a rotary table.  
   
   
       16 . A method of polishing a subject according to  claim 15 , wherein discharging the polishing solution includes exerting force on the polishing solution in a radially outward direction of the rotary table.  
   
   
       17 . A method of polishing a subject according to  claim 16 , wherein exerting force on the polishing solution includes exerting force on the polishing solution using a plate.  
   
   
       18 . A method of polishing a subject according to  claim 16 , wherein exerting force on the polishing solution includes blowing air toward the polishing solution in a radially outward direction of the rotary table.  
   
   
       19 . A method of polishing a subject according to  claim 14 , wherein discharging the polishing solution includes absorbing the polishing solution.  
   
   
       20 . A method of polishing a subject according to  claim 14 , wherein discharging the polishing solution includes sucking in the polishing solution.