Microfabricated elastomeric valve and pump systems

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

1 - 13 . (canceled)  
   
   
       14 . A method of controlling fluid or gas flow through an elastomeric structure comprising: 
 providing an elastomeric block, the elastomeric block having first, second, and third microfabricated recesses, and the elastomeric block having a first microfabricated channel passing therethrough, the first, second and third microfabricated recesses separated from the first channel by respective first, second and third membranes deflectable into the first channel; and    deflecting the first, second and third membranes into the first channel in a repeating sequence to peristaltically pump a flow of fluid through the first channel.    
   
   
       15 . The method of  claim 14  wherein the first, second and third membranes are deflected into the first channel by increasing pressure within the first, second and third channels.  
   
   
       16 . The method of  claim 14  further comprising: 
 providing first, second and third conductive portions in respective first, second and third membranes;    providing a fourth, fifth and sixth second conductive portion opposite the respective first, second and third conductive portions such that the first and fourth, second and fifth, and third and sixth conductive portions are disposed on opposite sides of the first channel; and    applying in a repeated sequence voltage to the first and fourth, second and fifth, and third and sixth conductive portions such that the membranes are deflected into the first channel by an attractive electrostatic force.    
   
   
       17 . A method of controlling fluid or gas flow through an elastomeric structure comprising: 
 providing an elastomeric block having a first microfabricated channel and a second microfabricated channel separated by a separating portion, a first microfabricated recess adjacent to the separating portion;    passing a fluid or gas flow through the first channel; and    deflecting the separating portion into the first microfabricated recess, thereby creating a passageway between the first microfabricated channel and the second microfabricated channel.    
   
   
       18 . The method of  claim 17  wherein the separating portion is deflected into the first microfabricated recess by decreasing pressure within the first microfabricated recess.  
   
   
       19 . The method of  claim 17 , further comprising: 
 providing a first conductive portion in the separating portion;    providing a second conductive portion such that the first and second conductive portions are disposed on opposite, sides of the first microfabricated recess; and    applying a voltage to the first and second conductive portions such that the separating portion is deflected into the first microfabricated recess by an attractive electrostatic force.    
   
   
       20 . The method of  claim 17  further comprising: 
 providing a magnetically polarizable portion in the separating portion; and    applying a magnetic field across the first microfabricated recess such that the membrane is deflected into the first microfabricated recess by an attractive magnetic force.    
   
   
       21 . A method of actuating a microfabricated elastomeric structure comprising: 
 providing an elastomeric structure having first and second microfabricated conductive portions, at least one of the first and the second microfabricated conductive portions deflectable when an electrical charge is supplied to the two microfabricated conductive portions; and    applying a voltage to the two microfabricated conductive portions, thereby generating an attractive force therebetween such that at least one of the microfabricated conductive portions is deflected.