Epitaxial oxide films via nitride conversion

Abstract

The present invention relates to oxides on suitable substrates, as converted from nitride precursors.

1 - 18 . (canceled)  
   
   
       19 . A composite comprising a metal oxide layer on a metal substrate, said oxide layer having a substantially cubic crystalline structure and a substantially single epitaxial orientation, said oxide layer substantially without a nitride component, said oxide layer obtainable from the oxidation of a metal nitride composition deposited on said substrate.  
   
   
       20 . The composite of  claim 19  wherein said metal oxide is stabilized with a solute.  
   
   
       21 . The composite of  claim 20  wherein said metal oxide is a yttria stabilized zirconia.  
   
   
       22 . An integrated device comprising a composite structure, said structure having a substrate, at least one epitaxial nitride composition deposited on said substrate, said nitride composition partially oxidized, and an electromagnetic film on said composition.  
   
   
       23 . The device of  claim 22  wherein said partially oxidized nitride composition is the reaction product of a yttrium zirconium nitride and an oxidizing agent.  
   
   
       24 . The device of  claim 22  further including an oxide layer on said partially oxidized nitride composition.  
   
   
       25 . A configured composite comprising a substrate and at least one nitride layer thereon, each said nitride layer having a substantially cubic crystalline structure and substantially a crystalline lattice match with at least one of said substrate and another nitride layer, said composite absent a separate metal oxide layer, said composite arranged about an axis perpendicular to said configuration.  
   
   
       26 . The configured composite of  claim 25  further including a spool with said composite coiled about said spool.  
   
   
       27 . The configured composite of  claim 25  wherein one said nitride layer is a zirconium nitride composition.  
   
   
       28 - 30 . (canceled)