High thermal efficiency glass microfluidic channels and method for forming the same

Abstract

A microfluidic device includes a formed sheet of glass or glass ceramic material formed to have one or more first micro channels on a first surface thereof and one or more second micro channels on a second surface opposite the first. The second channels are complementary to the first channels and the first channels are substantially closed by a first sheet of glass or glass ceramic material bonded to the first surface of the formed sheet. The second channels may be substantially closed by a second sheet of a glass or glass ceramic material bonded to the second surface. The first and second sheets may also be formed sheets. The device may be formed by vacuum-forming the formed sheet against a single surface mold, then bonding a plate to one or both sides of the formed sheet.

1 . A microfluidic device comprising a molded sheet of a glass or glass ceramic material bonded to at least one sheet of a glass or glass ceramic material so as to form micro channels.  
   
   
       2 . The microfluidic device as recited in  claim 1  wherein the molded sheet of a glass or glass ceramic material is bonded between two sheets, each of a glass or glass ceramic material, so as to form complementary micro channels.  
   
   
       3 . The microfluidic device of  claim 2  wherein the molded sheet comprises a first glass material and the two sheets each comprise a second glass material, the first glass material having a higher softening temperature than the second glass material.  
   
   
       4 . The microfluidic device of  claim 1  wherein the molded sheet comprises a first glass material and the two sheets each comprise a second glass material, the first glass material having a higher softening temperature than the second glass material.  
   
   
       5 . The microfluidic device of  claim 2  further comprising at least one through-hole through the molded sheet, said through-hole establishing fluid communication between an adjacent pair of said micro channels.  
   
   
       6 . The microfluidic device of  claim 1  further comprising at least one through-hole through the molded sheet, said through-hole establishing fluid communication between an adjacent pair of said micro channels.  
   
   
       7 . The microfluidic device of  claim 1  wherein the molded sheet, between adjacent micro channels separated by said molded sheet, has a thickness in the range of about 0.2 mm to about 0.7 mm.  
   
   
       8 . The microfluidic device of  claim 1  wherein the molded sheet, between adjacent micro channels separated by said molded sheet, has a thickness in the range of about 0.7 mm to about 3 mm.  
   
   
       9 . The microfluidic device of any one of claims  1  wherein said at least one sheet comprises a second molded sheet.  
   
   
       10 . A method of forming a microfluidic device, the method comprising: 
 providing a mold;    positioning a softened sheet of glass or ceramicizable glass over said mold;    applying a differential gas pressure to said sheet to conform said sheet to said mold, thereby forming micro channels on at least one surface of said sheet;    substantially closing said micro channels on said at least one surface of said sheet by bonding a sheet of glass or ceramicizable glass over said mold.    
   
   
       11 . The method of  claim 10  further comprising the step of ceramicizing said plate and said sheet.  
   
   
       12 . The method of  claim 10  wherein the step of applying a differential gas pressure to said sheet to conform said sheet to said mold comprises applying a vacuum to said sheet between said sheet and said mold.  
   
   
       13 . The method of  claim 10  wherein the step of positioning a softened sheet of glass or ceramicizable glass over said mold comprises rolling out a first soft glass sheet over said mold.  
   
   
       14 . The method  claim 10  wherein the step of positioning a softened sheet of glass or ceramicizable glass over said mold comprises positioning a sheet of glass or ceramicizable glass over said mold then heating said sheet of glass or ceramicizable glass.  
   
   
       15 . The method of  claim 10  wherein the step of substantially closing said micro channels on said at least one surface of said sheet by bonding a sheet of glass or ceramicizable glass over said mold comprises rolling out a soft glass sheet onto said conformed sheet, thereby bonding said soft glass sheet to said conformed sheet.