Low-temperature fabrication of glass optical components

Abstract

In one aspect, a method is provided for molding from glass complex optical components such as lenses, microlens, arrays of microlenses, and gratings or surface-relief diffusers having fine or hyperfine microstructures suitable for optical or electro-optical applications. In another aspect, mold masters or patterns, which define the profile of the optical components, made on metal alloys, particularly titanium or nickel alloys, or refractory compositions, with or without a non-reactive coating are provided. Given that molding optical components from oxide glasses has numerous drawbacks, it has been discovered in accordance with the invention that non-oxide glasses substantially eliminates these drawbacks. The non-oxide glasses, such as chalcogenide, chalcohalide, and halide glasses, may be used in the mold either in bulk, planar, or power forms. In the mold, the glass is heated to about 10-110° C., preferably about 50° C., above its transition temperature (Tg), at which temperature the glass has a viscosity that permits it to flow and conform exactly to the pattern of the mold.

1 - 30 . (canceled)  
   
   
       31 . A precision optical element made according to a method comprising the steps of: 
 a) providing a non-oxide glass with a glass transition temperature (Tg) of up to about 550° C.:    (b) providing a mold having an active surface that has an optical finish, wherein said active surface if made of a titanium alloy with a composition, in terms of weight percent, comprising about 98-80% Ti. 1-10% Al, and 1-10% V;    (c) placing said glass in said mold,    (d) heating said mold and glass to an operational temperature from about 10° C. to about 110° C. above the Tg: and    (e) pressing the mold when the viscosity of the glass reaches about 10 6 -10 12  poise;    wherein, optionally, said titanium active surface is coated with a protective coating, said coating being one selected from the group consisting of:    (A) a release agent: and    (B) a material having a crystallization temperature higher than at least an operational temperature, said material being further coated with a release agent.    
   
   
       32 .- 55 . (canceled)  
   
   
       56 . A precision optical element formed from a non-oxide glass by a molding or embossing method, wherein the method comprises: 
 providing a glass having a glass transition temperature (Tg) up to 550° C. as granular, planar, or bulk-solid items;    providing a two part mold having an active surface with an optical finish, which may be used with or without a protective coating, wherein said active surface is either optionally: (A) coated with a layer of non-reactive material, or (B) made from either a titanium alloy or a nickel alloy, or (C) both made from either a titanium alloy or a nickel alloy and coated with said non-reactive material;    charging said mold with said glass, heating said mold to an operational temperature of at least 10° C. above said Tg; and    hot-pressing said glass.    
   
   
       57 . The precision optical element according to  claim 56 , wherein said temperature is at least about 50° C. above said Tg.  
   
   
       58 . The precision optical element according to claim  47 , wherein the method further comprises inserting blocks into said mold, at least one of said blocks presents a section that faces said wafer or powder.  
   
   
       59 . The precision optical element according to claim  47 , the method further comprises placing on a surface of said blocks a layer of non-reactive material that is non-reactive with said glass at said operational temperature.  
   
   
       60 . The precision optical element according to claim  47 , wherein said non-reactive material is boron nitride.  
   
   
       61 . The precision optical element according to  claim 31 , wherein said non-oxide glass is a chalcogenide glass.  
   
   
       62 . The precision optical element according to  claim 31 , wherein said non-oxide glass is a chalcogenide glass is selected from the group consisting of arsenic sulfide, germanium sulfide and germanium-arsenic-sulfide glasses.  
   
   
       63 . The precision optical element according to  claim 62 , wherein, in atomic/element percent, germanium is in the range of 0-35%, arsenic is in the range of 0-55% and sulfur is in the range of 30-85%.  
   
   
       64 . The precision optical element according to  claim 31 , wherein said non-oxide glass is a chalcogenide glass is selected from the group consisting of arsenic selenide, germanium selenide and germanium-arsenic-selenide glasses.  
   
   
       65 . The precision optical element according to  claim 31 , wherein, in atomic/element percent, germanium is in the range of 0-35%, arsenic is in the range of 0-55% and sulfur is in the range of 30-85%.  
   
   
       66 . The precision optical element according to  claim 31 , wherein said non-oxide glass is a chalcogenide glass is selected from the group consisting of arsenic telluride, germanium telluride and germanium-arsenic-telluride glasses.  
   
   
       67 . The precision optical element according to  claim 31 , wherein, in atomic/element percent, germanium is in the range of 0-45%, arsenic is in the range of 0-60% and selenium in the range of 25% to about 100%.  
   
   
       68 . The precision optical element according to  claim 61 , wherein to modify the optical, thermal and/or mechanical properties of said optical element's chalcogenide glass, said glass further comprises one or more elements selected from the group consisting of phosphorus, gallium, selenium, tin, antimony, thallium, chlorine, bromine, iodine, a rare earth element, lithium, sodium and potassium.  
   
   
       69 . The non-oxide glass according to  claim 31 , wherein said glass is a chalco-halide glass.  
   
   
       70 . The non-oxide glass according to  claim 31 , wherein said glass is a halide glass.  
   
   
       71 . The precision optical element according to  claim 56 , wherein said non-oxide glass is a chalcogenide glass.  
   
   
       72 . The precision optical element according to  claim 56 , wherein said non-oxide glass is a chalcogenide glass is selected from the group consisting of arsenic sulfide, germanium sulfide and germanium-arsenic-sulfide glasses.  
   
   
       73 . The precision optical element according to  claim 72 , wherein, in atomic/element percent, germanium is in the range of 0-35%, arsenic is in the range of 0-55% and sulfur is in the range of 30-85%.  
   
   
       74 . The precision optical element according to  claim 56 , wherein said non-oxide glass is a chalcogenide glass is selected from the group consisting of arsenic selenide, germanium selenide and germanium-arsenic-selenide glasses.  
   
   
       75 . The precision optical element according to  claim 56 ,wherein, in atomic/element percent, germanium is in the range of 0-35%, arsenic is in the range of 0-55% and sulfur is in the range of 30-85%.  
   
   
       76 . The precision optical element according to  claim 56 , wherein said non-oxide glass is a chalcogenide glass is selected from the group consisting of arsenic telluride, germanium telluride and germanium-arsenic-telluride glasses.  
   
   
       77 . The precision optical element according to  claim 56 , wherein, in atomic/element percent, germanium is in the range of 0-45%, arsenic is in the range of 0-60% and selenium in the range of 25% to about 100%.  
   
   
       78 . The precision optical element according to  claim 71 , wherein to modify the optical, thermal and/or mechanical properties of said optical element's chalcogenide glass, said glass further comprises one or more elements selected from the group consisting of phosphorus, gallium, selenium, tin, antimony, thallium, chlorine, bromine, iodine, a rare earth element, lithium, sodium and potassium.