Micropump and micro-incubator utilizing gas generation and production method thereof

Abstract

A micropump utilizing gas generation includes a silicon substrate having a reservoir for H 2 O 2 solution formed therein, a SiO 2 /Si 3 N 4 film formed on the silicon substrate, and a PDMS combined on the SiO 2 /Si 3 N 4 film, wherein the PDMS has a reservoir for MnO 2 , a sample reservoir connected to the reservoir through a conduit, a sample injection opening, and a minute channel. Further, a cell culture unit utilizing gas generation possesses a carbon dioxide supply including a glass substrate to secure a reservoir, a hot-wire formed inside the reservoir, a PDMS having the reservoir formed by combining the PDMS on the bottom surface and an air supply line connected to the reservoir through a conduit, a thin permeable PDMS film arranged on the PDMS, and a PDMS cover being combined on the PDMS film and having a channel through which a cell culture medium flows and a culture surface for a cell engraved therein.

1 . A micropump utilizing gas generation comprising: 
 a silicon substrate having a reservoir for H 2 O 2  solution formed therein;    a SiO 2 /Si 3 N 4  film formed on the silicon substrate; and    a PDMS combined on the SiO 2 /Si 3 N 4  film,    wherein the PDMS includes a reservoir for MnO 2  confronting the reservoir for H 2 O 2  solution on the other side of the SiO 2 /Si 3 N 4  film, a sample reservoir connected to the reservoir for MnO 2  through a conduit, a sample injection opening connected to an end of the sample reservoir, and a minute channel leading to an exterior of the micropump from another end of the sample reservoir.    
     
     
         2 . A production method of a micropump utilizing gas generation, comprising the steps of: 
 forming a reservoir for MnO 2 , a sample reservoir connected to the reservoir for MnO 2  through a conduit, a sample injection opening connected to an end of the sample reservoir, and a minute channel leading to an exterior of the micropump from another end of the sample reservoir by forming a negative photoresist SU-8 layer and patterning on a silicon substrate;    forming a PDMS on the SU-8 layer;    forming a SiO 2  film and a Si 3 N 4  film sequentially on another silicon substrate;    forming a reservoir for H 2 O 2  solution by etching the bottom surface of the silicon substrate having the SiO 2  film and the Si 3 N 4  film formed thereon;    securing a bottom plate to the bottom of the reservoir for H 2 O 2  solution; and    combining the PDMS on the silicon substrate having the reservoir for H 2 O 2  solution formed therein after removing the PDMS from the silicon substrate and SU-8 pattern.    
     
     
         3 . A micropump utilizing gas generation comprising: 
 a bottom plate constituting a bottom surface;    a hot-wire formed inside a reservoir on the bottom plate; and    a PDMS combined on the bottom plate,    wherein the PDMS includes the reservoir, a sample reservoir connected to the reservoir through a conduit, a sample injection opening connected to an end of the sample reservoir, and a minute channel leading to an exterior of the micropump from another end of the sample reservoir.    
     
     
         4 . The micropump utilizing gas generation of  claim 3 , further comprising a paraffin layer mixed with MnO 2  powder formed on the hot-wire, 
 wherein the reservoir reserves H 2 O 2  solution.    
     
     
         5 . The micropump utilizing gas generation of  claim 3 , wherein the reservoir reserves NaHCO 3  solution.  
     
     
         6 . The micropump utilizing gas generation of  claim 3 , further comprising a water droplet enveloped in a Parafilm arranged on the hot-wire, 
 wherein the reservoir reserves a mixture of NaHCO 3  and HOC(COOH) (CH 2 COOH) 2 .    
     
     
         7 . A production method of a micropump utilizing gas generation, comprising the steps of: 
 forming a hot-wire inside a reservoir on a bottom plate;    combining a PDMS having the reservoir formed therein on the bottom plate; and    combining another PDMS including a sample reservoir connected to the reservoir through a conduit, injection openings respectively connected to each ends of the reservoir and the sample reservoir, and a minute channel leading to an exterior of the micropump from another end of the sample reservoir on the PDMS having the reservoir formed therein.    
     
     
         8 . A cell culture unit utilizing gas generation comprising: 
 a bottom plate constituting a bottom surface;    a hot-wire formed inside a reservoir for holding NaHCO 3  on the bottom plate;    a PDMS including the reservoir formed by combining the PDMS on the bottom surface and an air supply line connected to the reservoir through a conduit;    a thin permeable PDMS film arranged on the PDMS; and    a PDMS cover being combined on the PDMS film and having an engraved media-line confronting the air supply line on the other side of the PDMS film.