Radiation-curable anti-reflective coating system

Abstract

A radiation-curable anti-reflective coating is disclosed. The coating may be deposited on a substrate by spinning, dipping or rolling. The anti-reflective coating may have two layers in which case the anti-reflective coating has a V-shaped reflectance pattern in the visible wavelength spectrum. The anti-reflective coating may have three layers in which case the anti-reflective coating has a broadband reflectance pattern in the visible wavelength spectrum.

1 . A method comprising: 
 depositing a plurality of layers on a substrate, at least one of which comprises a radiation-curable material; and    curing at least one deposited layer by exposure to a radiation source.    
   
   
       2 . The method of  claim 1 , wherein the plurality of layers comprises at least two layers, and relative to one another, a first layer has a high refractive index and a second layer has a low refractive index.  
   
   
       3 . The method of  claim 1 , wherein the plurality of layers comprises at least three layers, and relative to one another, a first layer has a medium refractive index, a second layer has a high refractive index and a third layer has a low refractive index.  
   
   
       4 . The method of  claim 1 , wherein the radiation source comprises an electron beam.  
   
   
       5 . The method of  claim 1 , wherein the radiation source comprises ultraviolet light.  
   
   
       6 . The method of  claim 1 , wherein depositing a plurality of layers on a substrate comprises one of a spinning process, a dipping process, and a rolling process.  
   
   
       7 . The method of  claim 1 , wherein depositing a plurality of layers comprises depositing a radiation-curable layer of at least one acrylic monomer.  
   
   
       8 . The method of  claim 7 , wherein the radiation-curable layer comprises at least one (meth)acrylate monomer and a silicon compound.