Solid-state rotational rate sensor device and method

Abstract

The present invention provides a solid-state rotational rate sensor device formed by a thin-film for generating an electrical voltage output proportional to the rate of rotational motion. The precision thin-film piezoelectric elements are configured and arranged on a semi-rigid structure to detect rotation (such as pitch, roll, and yaw) while rejecting spurious noise created by vibration, thermal gradients, and electromagnetic interference.

1 - 14 . (canceled)  
   
   
       15 . A method of sensing a rotational rate of a solid-state device formed by a plurality of thin-film piezoelectric elements having a first set of piezoelectric elements, a second set of piezoelectric elements, and a third set of piezoelectric elements, comprising the steps of: 
 actuating the first set of piezoelectric elements by a first electrical signal; and    sensing rotational rate by the second and third sets of piezoelectric elements while rejecting spurious noise.    
   
   
       16 . The method of  claim 15 , further comprising the steps of generating a second electrical signal by the second set of piezoelectric elements proportional to a mechanical force along a first direction, and generating a third electrical signal by the third piezoelectric elements proportional to the mechanical force along a second direction, wherein the second direction is orthogonal to the first direction, and wherein phase of the third electrical signal shifts relative to the second electrical signal in response to rotation movement of the solid-state device around a third direction, and the third direction is orthogonal to both the first direction and the second direction.  
   
   
       17 . The method of  claim 15 , further comprising the steps of connecting the second and third electrical signals to a phase-shift detection circuit, and generating an electrical output signal in proportion to a shift of the phase.  
   
   
       18 - 20 . (canceled)