Ceramic setter plate and method for manufacturing multilayer ceramic substrate using the same

Abstract

In a ceramic setter plate 10 of a plate-shaped sintered body 12 of a non-oxide ceramic material formed by firing ceramic particles 11 of at least one selected from the group consisting of SiC, Si 3 N 4 , BN, AlN, MoSi 2 , TiN and ZrB 2 , the sintered body 12 is composed of a porous body 12 having interconnected pores 15 and one or more cavities 13 inside thereof in substantially the center in the thickness direction of thereof, at least one of the cavities 13 has therein one or a plurality of branched parts 17 , the cavities 13 have opening parts 14 at side parts of the sintered body 12 . The ceramic setter plate has good gas permeability for firing a laminate of ceramic green sheets, for which the firing efficiency is good, and for which repeated use is possible.

1 . A ceramic setter plate made of a plate-shaped sintered body of a non-oxide ceramic material formed by firing ceramic particles of at least one member selected from the group consisting of SiC, Si 3 N 4 , BN, AlN, MoSi 2 , TiN and ZrB 2 , wherein said sintered body is made of a porous body having interconnected pores and one or a plurality of cavities inside thereof in substantially the center in the thickness direction, at least one of the cavities has therein one or a plurality of branched parts, and each of the cavities has an opening part at at least one of side parts of said sintered body.  
     
     
         2 . The ceramic setter plate according to  claim 1 , wherein at least one of the cavities runs right through from one of said side parts to at least one other of said side parts.  
     
     
         3 . The ceramic setter plate according to  claim 1 , wherein said sintered body has a porosity of at least 10% but less than 40%.  
     
     
         4 . A ceramic setter plate made of a plate-shaped sintered body of a non-oxide ceramic material of at least one member selected from the group consisting of SiC, Si 3 N 4 , BN, AlN, MoSi 2 , TiN and ZrB 2 , said plate-shaped sintered body having interconnected pores and cavities at side parts thereof.  
     
     
         5 . The ceramic setter plate of  claim 4 , wherein at least one of the cavities extends from one of said side parts to at least one other of said side parts.  
     
     
         6 . A method of manufacturing a multilayer ceramic substrate, comprising: 
 preparing a laminate by placing a plurality of ceramic green sheets on top of one another; and    sandwiching the laminate between ceramic setter plates and firing the laminate,    wherein the ceramic setter plate is made of a plate-shaped sintered body of a non-oxide ceramic material formed by firing ceramic particles of at least one member selected from the group consisting of SiC, Si 3 N 4 , BN, AlN, MoSi 2 , TiN and ZrB 2 , and wherein said sintered body is made of a porous body having interconnected pores and one or a plurality of cavities inside thereof in substantially the center in the thickness direction, at least one of the cavities has therein one or a plurality of branched parts, and each of the cavities has an opening part at at least one of side parts of said sintered body.    
     
     
         7 . The method according to  claim 6 , wherein constraining ceramic green sheets are provided onto outer surfaces of the laminate, said constraining ceramic green sheets not undergoing sintering at a firing temperature of the ceramic green sheets.  
     
     
         8 . The method according to  claim 6 , wherein said firing is conducted while applying pressure.