Micro-shape transcription method, micro-shape transcription apparatus, and optical-component manufacture method

Abstract

A micro-shape transcription method has preparing a mold having a transcription face on which a concavo-convex pattern is formed, pressing the transcription face against a base material softened by heating, then forcibly separating the mold from the base material to transcribe a reverse pattern of the concavo-convex pattern to the surface of the base material, wherein when assuming a temperature for pressing the mold against the base material as T 1 (° C.), a temperature for separating the mold from the base materials T 2 (° C.), thermal expansion coefficients of the mold and the base material as α a and α b , and the maximum distance between the transcription center of the transcription face and the concavo-convex pattern as d (mm), the following relations (1) and (2): T 1 ≧T 2   (1) |α a −α b |·( T 1 −T 2 )· d ≦4×10 −2   (2) are simultaneously satisfied.

1 - 11 . (canceled)  
     
     
         12 . A micro-shape transcription apparatus comprising: 
 a first mold means provided with a transcription face having a micro-shape;    a second mold means facing the first mold means and holding a base material thereon;    a mechanism for driving at least one of the first and second molds means to press the transcription face into the base material and to separate the first mold means from the base material; and    a vacuum chuck for attracting and fixing the base material to the second mold means;    wherein the mechanism presses at a temperature up to 180° C. and separates at a temperature ranging from 120 to 150° C., said separating temperature being less than said pressing temperature.    
     
     
         13 . The micro-shape transcription apparatus according to  claim 12 , wherein the micro shape is rectangular in cross-section.  
     
     
         14 . The micro-shape transcription apparatus according to  claim 12 , wherein the micro shape has a depth of approximately 5 μm and a width of approximately 8 μm.  
     
     
         15 . The micro-shape transcription apparatus according to  claim 12 , wherein the first mold means has a protective coating.