Dynamic signal injection microscopy

Abstract

Methods and system for sensing dynamic failures in an electronic circuit. An exemplary system includes a drive source, a radiant energy source, and a signal comparator. The drive source supplies a dynamic input signal to the electronic circuit, thereby causing the electronic circuit to output a signal. The radiant energy source generates and directs radiant energy at the electronic circuit and thus induces localized changes in the output signal of the electronic circuit. The signal comparator compares the output signal to an expected output signal, thereby producing a comparison signal proportional to the match between the input and output signals. A data processing device generates an image based on the comparison signal and an image based on a reflection signal. A display device displays at least a portion of the generated images simultaneously.

1 . An apparatus for sensing dynamic failures in an electronic circuit, the apparatus comprising: 
 a) a drive source configured to supply a dynamic input signal to the electronic circuit, thereby causing the electronic circuit to output a signal;    b) a radiant energy source configured to generate and direct radiant energy at the electronic circuit and thus induce localized changes in said output signal of the electronic circuit; and    c) a signal comparator configured to compare the output signal to an expected output signal, thereby producing a comparison signal proportional to the match between the input and output signals, the comparison signal indicates existence of one or more type of dynamic failure in the electronic circuit.    
   
   
       2 . The apparatus of  claim 1 , further comprising: 
 d) a data processing device configured to generate an image based on the comparison signal; and    e) a display device configured to display the generated image.    
   
   
       3 . The apparatus of  claim 2 , further comprising: 
 f) a sensor configured to produce a reflection signal based on a reflection of the directed radiant energy,    wherein the data processing device is further configured to generate an image based on the reflection signal and the display device is further configured to display the reflection signal image.    
   
   
       4 . The apparatus of  claim 3 , wherein the data processing device is further configured to extract one or more portions of the comparison signal image and superimpose the extracted one or more portions on the reflection signal image based on location information associated with the reflection signal image and the comparison signal image.  
   
   
       5 . The apparatus of  claim 4 , wherein the extracted one or more portions indicate dynamic failures.  
   
   
       6 . The apparatus of  claim 1 , wherein the comparison signal indicates a measure of quality of the electronic circuit.  
   
   
       7 . The apparatus of  claim 1 , wherein the electronic circuit includes an amplifier circuit and the signal comparator includes: 
 a plurality of filters configured to filter the signal outputted by the amplifier circuit at a main frequency, at one or more harmonics of the main frequency and at one or more subharmonics of the main frequency; and    a component configured to produce the comparison signal based on the outputs of the plurality of filters.    
   
   
       8 . The apparatus of  claim 1 , further comprising: 
 a scanning device configured to scan the radiant energy over the electronic circuit.    
   
   
       9 . A method for sensing dynamic failures in an electronic circuit, the method comprising: 
 supplying a dynamic input signal to the electronic circuit, thereby causing the electronic circuit to output a signal;    generating and direct radiant energy at the electronic circuit and thus induce localized changes in said output signal of the electronic circuit; and    comparing the output signal to an expected output signal, thereby producing a comparison signal proportional to the match between the input and output signals, the comparison signal indicates existence of one or more type of dynamic failure in the electronic circuit.    
   
   
       10 . The method of  claim 9 , further comprising: 
 generating an image based on the comparison signal; and    displaying the generated image.    
   
   
       11 . The method of  claim 10 , further comprising: 
 producing a reflection signal based on a reflection of the directed radiant energy;    generating an image based on the reflection signal; and    displaying the generated reflection signal image.    
   
   
       12 . The method of  claim 11 , further comprising: 
 extracting one or more portions of the comparison signal image; and    superimposing the extracted one or more portions on the reflection signal image based on location information associated with the reflection signal image and the comparison signal image.    
   
   
       13 . The method of  claim 12 , wherein the extracted one or more portions indicate dynamic failures.  
   
   
       14 . The method of  claim 9 , wherein the comparison signal indicates a measure of quality of the electronic circuit.  
   
   
       15 . The method of  claim 9 , wherein comparing includes: 
 filtering the signal outputted by the amplifier circuit at a main frequency, at one or more harmonics of the main frequency and at one or more subharmonics of the main frequency; and    producing the comparison signal based on the outputs of the plurality of filters.    
   
   
       16 . The method of  claim 9 , further comprising: 
 scanning the radiant energy over the electronic circuit.