High density magnetic recording medium using FePtC thin film and manufacturing method thereof

Abstract

Disclosed is a high density magnetic recording medium which has coercivity suitable to a magnetic record, fine grains, and a uniform grain size distribution, and which includes a FePtC alloy thin film containing an optimum carbon content, and a method of manufacturing the high density magnetic recording medium. The magnetic recording medium includes the FePtC alloy thin film containing 25 volume % carbon, thus having microscopic magnetic and structural properties suitable to the high density magnetic recording medium. Additionally, the method of manufacturing the magnetic recording medium is characterized in that the method includes depositing the FePtC alloy thin film on a substrate at 400° C. using a dc magnetron sputtering device through a simultaneous deposition process, the FePtC alloy thin film is deposited on the substrate for one hour, and the substrate is heat-treated for one hour. Thereby, a storage density of an information storing substance is increased, a noise of the magnetic recording medium is reduced, and a manufacturing temperature of the FePtC alloy thin film is lowered.

1 - 2 . (canceled)  
     
     
         3 . A method of manufacturing a high density magnetic recording medium using a FePtC thin film, which comprises an information recording unit and an information storing unit to magnetically record information using the information recording unit, the method comprising the step of: 
 simultaneously depositing iron (Fe), platinum (Pt), and carbon (C) on a substrate to form a FePtC thin film, thus producing the information storing unit.    
     
     
         4 . The method as set forth in  claim 3 , wherein the FePtC thin film is deposited on the substrate using a sputtering device according to a simultaneous deposition process.  
     
     
         5 . The method as set forth in  claim 3 , wherein the FePtC thin film contains 25 volume % carbon.  
     
     
         6 . The method as set forth in  claim 3 , wherein the substrate is concurrently heat-treated at 400° C. while the FePtC thin film is deposited on the substrate.  
     
     
         7 . The method as set forth in  claim 6 , wherein the FePtC thin film is concurrently deposited on the substrate while the substrate is heat-treated for one hour.  
     
     
         8 . The method as set forth in  claim 3 , wherein the substrate comprises a magnesium oxide (MgO) substrate.  
     
     
         9 . The method as set forth in  claim 8 , wherein the substrate is concurrently heat-treated at 400° C. while the FePtC thin film is deposited on the substrate.  
     
     
         10 . The method as set forth in  claim 9 , wherein the FePtC thin film is concurrently deposited on the substrate while the substrate is heat-treated for one hour.