Varactors and methods of manufacture and use

Abstract

In an embodiment of the present invention is provided a varactor, comprising: a bottom electrode supported by a substrate; a tunable dielectric in contact with said bottom electrode and in contact with a top electrode; and an interconnect in contact with said top electrode and capable of being in contact with a voltage source. The top electrode and the tunable dielectric may be encapsulated and the tunable dielectric layer may comprise one of: barium strontium titanate, barium calcium titanate, lead zirconium titanate, lead lanthanum zirconium titanate, lead titanate, barium calcium zirconium titanate, sodium nitrate, KNbO.sub.3, LiNbO.sub.3, LiTaO.sub.3, PbNb.sub.2 O.sub.6, PbTa.sub.2 O.sub.6, KSr(NbO.sub.3), NaBa.sub.2 (NbO.sub.3).sub.5, KH.sub.2 PO.sub.4, and composites thereof. Further, the substrate may comprise one of: MgO, alumina (AL.sub.2 O.sub.3), LaAlO.sub.3, glass, sapphire, quartz, silicon, gallium arsenide and any material classified as low temperature co-fired ceramic (LTCC) and the top or bottom electrode may comprise one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.

1 . A varactor comprising: 
 a substrate;    a bottom electrode positioned on a surface of said substrate;    a tunable dielectric material positioned adjacent to and extending over said bottom electrode forming a step and in contact with a top electrode; and    an interconnect layer in contact with said bottom electrode, said tunable dielectric and said top electrode.    
   
   
       2 . The varactor of  claim 1 , wherein any or all of said bottom electrode, said tunable dielectric, said top electrode, said bottom electrode or said interlayer dielectric are encapsulated.  
   
   
       3 . The varactor of  claim 1 , further comprising an interlayer dielectric in contact with said top electrode, said tunable dielectric and said interconnect.  
   
   
       4 . The varactor of  claim 1 , wherein the tunable dielectric layer comprises one of: 
 barium strontium titanate, barium calcium titanate, lead zirconium titanate, lead lanthanum zirconium titanate, lead titanate, barium calcium zirconium titanate, sodium nitrate, KNbO.sub.3, LiNbO.sub.3, LiTaO.sub.3, PbNb.sub.2 O.sub.6, PbTa.sub.2 O.sub.6, KSr(NbO.sub.3), NaBa.sub.2 (NbO.sub.3).sub.5, KH.sub.2 PO.sub.4, and composites thereof.    
   
   
       5 . The varactor of  claim 1 , wherein the tunable dielectric layer comprises a barium strontium titanate (BSTO) composite selected from the group of: BSTO—MgO, BSTO—MgAl.sub.2 O.sub.4, BSTO—CaTiO.sub.3, BSTO—MgTiO.sub.3, BSTO—MgSrZrTiO.sub.6, and combinations thereof.  
   
   
       6 . The varactor of  claim 1 , wherein the substrate comprises one of: MgO, alumina (AL.sub.2 O.sub.3), LaAlO.sub.3, glass, sapphire, quartz, silicon, gallium arsenide and any material classified as low temperature co-fired ceramic (LTCC).  
   
   
       7 . The varactor of  claim 1 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       8 . A varactor comprising: 
 a substrate;    a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;    a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric at least partially overlaying said plurality of electrodes; and    a top electrode in contact with said tunable dielectric.    
   
   
       9 . The varactor of  claim 8 , wherein said top electrode, said tunable dielectric and said bottom electrode are encapsulated.  
   
   
       10 . The varactor of  claim 8 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       11 . A varactor comprising: 
 a substrate;    a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;    a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric at least partially overlaying said plurality of electrodes;    a top electrode in contact with said tunable dielectric; and    a plurality of interconnects on a surface of said plurality of electrodes enabling a connection to a voltage source.    
   
   
       12 . The varactor of  claim 11 , wherein said top electrode, said tunable dielectric and said bottom electrode are encapsulated.  
   
   
       13 . The varactor of  claim 11 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       14 . A varactor comprising: 
 a substrate;    a first electrode positioned on a surface of the substrate;    a second electrode positioned on the surface of the substrate forming a gap between the first and second electrodes; and    a tunable dielectric material positioned on the surface of the substrate and within the gap.    
   
   
       15 . The varactor of  claim 14 , wherein said tunable dielectric material positioned on the surface of the substrate and within the gap is encapsulated with a dielectric layer.  
   
   
       16 . The varactor of  claim 14 , further comprising a contact within said dielectric layer capable of attaching a voltage source.  
   
   
       17 . The varactor of  claim 14 , wherein the tunable dielectric layer comprises one of: 
 barium strontium titanate, barium calcium titanate, lead zirconium titanate, lead lanthanum zirconium titanate, lead titanate, barium calcium zirconium titanate, sodium nitrate, KNbO.sub.3, LiNbO.sub.3, LiTaO.sub.3, PbNb.sub.2 O.sub.6, PbTa.sub.2 O.sub.6, KSr(NbO.sub.3), NaBa.sub.2 (NbO.sub.3).sub.5, KH.sub.2 PO.sub.4, and composites thereof.    
   
   
       18 . The varactor of  claim 14 , wherein the tunable dielectric layer comprises a barium strontium titanate (BSTO) composite selected from the group of: BSTO—MgO, BSTO—MgAl.sub.2 O.sub.4, BSTO—CaTiO.sub.3, BSTO—MgTiO.sub.3, BSTO—MgSrZrTiO.sub.6, and combinations thereof.  
   
   
       19 . The varactor of  claim 14 , wherein the substrate comprises one of: MgO, Alumina (AL.sub.2 O.sub.3), LaAlO.sub.3, glass, sapphire, quartz, silicon, gallium arsenide and any material classified as low temperature co-fired ceramic (LTCC).  
   
   
       20 . The varactor of  claim 14 , wherein the first or second electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       21 . A varactor, comprising: 
 a bottom electrode supported by a substrate;    a tunable dielectric in contact with said bottom electrode and in contact with a top electrode; and    an interconnect in contact with said top electrode and capable of being in contact with a voltage source.    
   
   
       22 . The varactor of  claim 21 , wherein said top electrode and said tunable dielectric are encapsulated.  
   
   
       23 . The varactor of  claim 21 , wherein the tunable dielectric layer comprises one of: 
 barium strontium titanate, barium calcium titanate, lead zirconium titanate, lead lanthanum zirconium titanate, lead titanate, barium calcium zirconium titanate, sodium nitrate, KNbO.sub.3, LiNbO.sub.3, LiTaO.sub.3, PbNb.sub.2 O.sub.6, PbTa.sub.2 O.sub.6, KSr(NbO.sub.3), NaBa.sub.2 (NbO.sub.3).sub.5, KH.sub.2 PO.sub.4, and composites thereof.    
   
   
       24 . The varactor of  claim 21 , wherein the tunable dielectric layer comprises a barium strontium titanate (BSTO) composite selected from the group of: BSTO—MgO, BSTO—MgAl.sub.2 O.sub.4, BSTO—CaTiO.sub.3, BSTO—MgTiO.sub.3, BSTO—MgSrZrTiO.sub.6, and combinations thereof.  
   
   
       25 . The varactor of  claim 21 , wherein the substrate comprises one of: MgO, alumina (AL.sub.2 O.sub.3), LaAlO.sub.3, glass, sapphire, quartz, silicon, gallium arsenide and any material classified as low temperature co-fired ceramic (LTCC).  
   
   
       26 . The varactor of  claim 21 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       27 . A varactor, comprising: 
 a bottom electrode supported by a substrate;    a first tunable dielectric in contact with said bottom electrode and in contact with a first top electrode;    a second tunable dielectric in contact with said bottom electrode and in contact with a second top electrode; and    a first interconnect in contact with said first top electrodes and a second interconnect in contact with said second top electrode, said first and second interconnects capable of being in contact with a voltage source.    
   
   
       28 . The varactor of  claim 27 , wherein said first and second top electrodes and said first and second tunable dielectrics are encapsulated.  
   
   
       29 . The varactor of  claim 27 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       30 . A varactor comprising: 
 a substrate;    a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therein;    a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of electrodes;    a top electrode in contact with said tunable dielectric; and    an interconnect layer in contact with at least a portion one of said plurality of bottom electrodes and portion of said top electrode, and a portion of said tunable dielectric.    
   
   
       31 . The varactor of  claim 30 , further comprising an interlayer dielectric capble of being in contact with said dielectric layer.  
   
   
       32 . The varactor of  claim 30 , wherein at least a portion of said top electrode, said tunable dielectric, said interlayer dielectric and said interconnect are capable of being encapsulated.  
   
   
       33 . The varactor of  claim 30 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       34 . A varactor comprising: 
 a substrate;    a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap therebetween;    a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of electrodes;    a plurality of top electrodes in contact with said tunable dielectric; and    an interconnect layer in contact with at least a portion one of said plurality of bottom electrodes and portion of said plurality of top electrode, and a portion of said tunable dielectric.    
   
   
       35 . The varactor of  claim 34 , wherein said plurality of top electrodes is between a plurality of interlayer dielectrics.  
   
   
       36 . The varactor of  claim 34 , wherein at least a portion of said plurality of top electrodes, said tunable dielectric, said plurality of interlayer dielectrics and said interconnect are capable of being encapsulated.  
   
   
       37 . The varactor of  claim 34 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       38 . A varactor comprising: 
 a substrate;    a plurality of bottom electrodes positioned on a surface of the substrate separated to form a gap between said plurality of bottom electrodes;    a tunable dielectric material positioned on the surface of the substrate and within said gap, said tunable dielectric partially overlaying said plurality of electrodes;    a plurality of top electrodes in contact with said tunable dielectric; and    an interconnect layer in contact with at least a portion one of said plurality of bottom electrodes and portion of said plurality of top electrode, and a portion of said tunable dielectric.    
   
   
       39 . The varactor of  claim 38 , wherein said plurality of top electrodes are separated by an interlayer dielectric.  
   
   
       40 . The varactor of  claim 38 , wherein at least a portion of said plurality of top electrodes, said tunable dielectric, said plurality of interlayer dielectrics and said interconnect are capable of being encapsulated.  
   
   
       41 . The varactor of  claim 38 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       42 . A varactor, comprising: 
 at least one bottom electrode supported by a substrate;    at least one top electrode with a tunable dielectric separating said at least one bottom and at least one top electrode; and    an interconnect layer in contact with at least a portion one of at least one bottom electrode and portion of said at least one top electrode, and a portion of said tunable dielectric.    
   
   
       43 . The varactor of  claim 42 , further comprising an interlayer dielectric in contact with any or all of said at least one bottom electrode, said at least one top electrode and said tunable dielectric.  
   
   
       44 . The varactor of  claim 42 , wherein any or all of said at least one bottom electrode, said at least one top electrode and said tunable dielectric are encapsulated.  
   
   
       45 . The varactor of  claim 42 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       46 . A varactor comprising: 
 a substrate;    a bottom electrode positioned on a surface of said substrate;    a first tunable dielectric portion in contact with a first side of said bottom electrode and a portion of said substrate;    a second tunable dielectric portion in contact with a second side of said bottom electrode and a portion of said substrate;    a first interconnect in contact with a first side of said tunable dielectric and in contact with a first top electrode and a portion of said substrate; and    a second interconnect in contact with a second side of said tunable dielectric and in contact with a second top electrode and a portion of said substrate.    
   
   
       47 . The varactor of  claim 46 , wherein said first and second top electrodes form a gap therebetween.  
   
   
       48 . The varactor of  claim 46 , wherein said first and said second top electrodes connect to a voltage source.  
   
   
       49 . The varactor of  claim 46 , wherein at least a portion of said varactor is encapsulated.  
   
   
       50 . The varactor of  claim 46 , wherein said first or second top or bottom electrodes comprise one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       51 . A method of manufacturing a varactor, comprising: 
 providing a substrate;    positioning a bottom electrode on a surface of the substrate;    placing a tunable dielectric material adjacent to and extending over said bottom electrode forming a step and in contact with a top electrode;    placing an interconnect layer in contact with said bottom electrode, said tunable dielectric and said top electrode.    
   
   
       52 . The method of  claim 51 , further comprising encapsulating any or all of said bottom electrode, said tunable dielectric, said top electrode, said bottom electrode or said interlayer dielectric.  
   
   
       53 . The method of  claim 51 , further comprising placing an interlayer dielectric in contact with said top electrode, said tunable dielectric and said interlayer dielectric.  
   
   
       54 . The method of  claim 53 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       55 . A method of manufacturing a varactor, comprising: 
 providing a substrate;    positioning a plurality of bottom electrodes on a surface of the substrate separated to form a gap therein;    positioning a tunable dielectric material on the surface of the substrate and within said gap, said tunable dielectric at least partially overlaying said plurality of electrodes; and    placing a top electrode in contact with said tunable dielectric.    
   
   
       56 . The method of  claim 55 , further comprising encapsulating said top electrode, said tunable dielectric and said bottom electrode.  
   
   
       57 . The method of  claim 55 , wherein said top or bottom electrode comprises one of: gold, aluminum, copper, nickel, palladium, platinum, platinum-rhodium, and ruthenium oxide, indium tin oxide.  
   
   
       58 . The varactor of  claim 1 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       59 . The varactor of  claim 1 , wherein at least one electrode contains multi metallic layers.  
   
   
       60 . The varactor of  claim 1 , wherein all electrodes contains multi metallic layers.  
   
   
       61 . The varactor of  claim 8 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       62 . The varactor of  claim 8 , wherein at least one electrode contains multi metallic layers.  
   
   
       63 . The varactor of  claim 8 , wherein all electrodes contains multi metallic layers.  
   
   
       64 . The varactor of  claim 11 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       65 . The varactor of  claim 11 , wherein at least one electrode contains multi metallic layers.  
   
   
       66 . The varactor of  claim 11 , wherein all electrodes contains multi metallic layers.  
   
   
       67 . The varactor of  claim 14 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       68 . The varactor of  claim 14 , wherein at least one electrode contains multi metallic layers.  
   
   
       69 . The varactor of  claim 14 , wherein all electrodes contains multi metallic layers.  
   
   
       70 . The varactor of  claim 21 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       71 . The varactor of  claim 21 , wherein at least one electrode contains multi metallic layers.  
   
   
       72 . The varactor of  claim 21 , wherein all electrodes contains multi metallic layers.  
   
   
       73 . The varactor of  claim 27 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       74 . The varactor of  claim 27 , wherein at least one electrode contains multi metallic layers.  
   
   
       75 . The varactor of  claim 27 , wherein all electrodes contains multi metallic layers.  
   
   
       76 . The varactor of  claim 30 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       77 . The varactor of  claim 30 , wherein at least one electrode contains multi metallic layers.  
   
   
       78 . The varactor of  claim 30 , wherein all electrodes contains multi metallic layers.  
   
   
       79 . The varactor of  claim 34 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       80 . The varactor of  claim 34 , wherein at least one electrode contains multi metallic layers.  
   
   
       81 . The varactor of  claim 34 , wherein all electrodes contains multi metallic layers.  
   
   
       82 . The varactor of  claim 38 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       83 . The varactor of  claim 38 , wherein at least one electrode contains multi metallic layers.  
   
   
       84 . The varactor of  claim 38 , wherein all electrodes contains multi metallic layers.  
   
   
       85 . The varactor of  claim 42 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       86 . The varactor of  claim 42 , wherein at least one electrode contains multi metallic layers.  
   
   
       87 . The varactor of  claim 42 , wherein all electrodes contains multi metallic layers.  
   
   
       88 . The varactor of  claim 46 , wherein an adhesion layer is between said bottom electrode and a substrate; or between a bottom electrode and the tunable dielectric; or between the tunable dielectric and the interlayer dielectric; or between the tunable dielectric and a top electrode or interconnect; or between a top electrode and interconnect.  
   
   
       89 . The varactor of  claim 46 , wherein at least one electrode contains multi metallic layers.  
   
   
       90 . The varactor of  claim 46 , wherein all electrodes contains multi metallic layers.