Constant-temperature fluid supply system

Abstract

A constant-temperature fluid supply system is provided with a first constant-temperature fluid supply apparatus and a second constant-temperature fluid supply apparatus. The first constant-temperature fluid supply apparatus has an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied. The second constant-temperature fluid supply apparatus has an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.

1 . A constant-temperature fluid supply system comprising: 
 a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied; and    a second constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.    
   
   
       2 . The constant-temperature fluid supply system according to  claim 1 , wherein the first constant-temperature fluid supply apparatus comprises a cooling mechanism including an evaporator and a condenser, the cooling fluid and the first constant-temperature fluid exchange heat, the input side of the first constant-temperature fluid is a heat-waste side where a passage of the cooling fluid is formed, and the output side of the first constant-temperature fluid is a cooling side where a passage of the first constant-temperature fluid is formed.  
   
   
       3 . The constant-temperature fluid supply system according to  claim 1 , wherein the second constant-temperature fluid supply apparatus includes a Peltier element having input and output sides, the input side of the Peltier element is a heat-waste side where a passage of the first constant-temperature fluid is formed, and the output side of the Peltier element is a heat-absorbent side where a passage of the second constant-temperature fluid is formed.  
   
   
       4 . The constant-temperature fluid supply system according to  claim 3 , wherein the second constant-temperature fluid supply apparatus further includes at least one Peltier element in addition to said Peltier element, and the second constant-temperature fluid supply apparatus supplies second constant-temperature fluids of different temperatures.  
   
   
       5 . The constant-temperature fluid supply system according to  claim 1 , wherein the first constant-temperature fluid is controlled such that the temperature thereof is ±0.1° C. of a setting temperature, and the second constant-temperature fluid is controlled such that the temperature thereof is ±0.01° C. of a setting temperature.  
   
   
       6 . The constant-temperature fluid supply system according to  claim 1 , wherein the second constant-temperature fluid is supplied to an object whose temperature is to be controlled, and a passage between the second constant-temperature fluid supply apparatus and the object is thermally insulated by a heat insulator.  
   
   
       7 . A constant-temperature fluid supply system configured to keep a first portion and a second portion of an object at predetermined temperatures, said constant-temperature fluid supply system comprising: 
 a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied, part of the first constant-temperature fluid being supplied to the first portion of the object; and    a second constant-temperature fluid supply apparatus having an input side to which remaining part of the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.    
   
   
       8 . The constant-temperature fluid supply system according to  claim 7 , wherein the first constant-temperature fluid supply apparatus comprises a cooling mechanism including an evaporator and a condenser, the cooling fluid and the first constant-temperature fluid exchange heat, the input side of the first constant-temperature fluid is a heat-waste side where a passage of the cooling fluid is formed, and the output side of the first constant-temperature fluid is a cooling side where a passage of the first constant-temperature fluid is formed.  
   
   
       9 . The constant-temperature fluid supply system according to  claim 7 , wherein the second constant-temperature fluid supply apparatus includes a Peltier element having input and output sides, the input side of the Peltier element is a heat-waste side where a passage of the first constant-temperature fluid is formed, and the output side of the Peltier element is a heat-absorbent side where a passage of the second constant-temperature fluid is formed.  
   
   
       10 . The constant-temperature fluid supply system according to  claim 9 , wherein the second constant-temperature fluid supply apparatus further includes at least one Peltier element in addition to said Peltier element, and the second constant-temperature fluid supply apparatus supplies second constant-temperature fluids of different temperatures.  
   
   
       11 . The constant-temperature fluid supply system according to  claim 7 , wherein the first constant-temperature fluid is controlled such that the temperature thereof is ±0.1° C. of a setting temperature, and the second constant-temperature fluid is controlled such that the temperature thereof is ±0.01° C. of a setting temperature.  
   
   
       12 . The constant-temperature fluid supply system according to  claim 7 , wherein a passage between the second constant-temperature fluid supply apparatus and the object is thermally insulated by a heat insulator.  
   
   
       13 . A constant-temperature fluid supply system configured to keep a first portion and a second portion of an object at predetermined temperatures, said constant-temperature fluid supply system comprising: 
 a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied; and    a second constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.    a third constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a third constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied to the second portion of the object.    
   
   
       14 . The constant-temperature fluid supply system according to  claim 13 , wherein the second constant-temperature fluid supplied from the second fluid constant-temperature fluid supply apparatus and the third constant-temperature fluid supplied from the third constant-temperature fluid supply apparatus are set at different temperatures.  
   
   
       15 . The constant-temperature fluid supply system according to  claim 13 , wherein the first constant-temperature fluid supply apparatus comprises a cooling mechanism including an evaporator and a condenser, the cooling fluid and the first constant-temperature fluid exchange heat, the input side of the first constant-temperature fluid is a heat-waste side where a passage of the cooling fluid is formed, and the output side of the first constant-temperature fluid is a cooling side where a passage of the first constant-temperature fluid is formed.  
   
   
       16 . The constant-temperature fluid supply system according to  claim 13 , wherein each of the second and third constant-temperature fluid supply apparatuses includes a Peltier element having input and output sides, the input side of the Peltier element is a heat-waste side where a passage of the first constant-temperature fluid is formed, and the output side of the Peltier element is a heat-absorbent side where a passage of the second constant-temperature fluid is formed.  
   
   
       17 . The constant-temperature fluid supply system according to  claim 13 , wherein the first constant-temperature fluid is controlled such that the temperature thereof is ±0.1° C. of a setting temperature, and the second and third constant-temperature fluids are controlled such that the temperatures thereof are ±0.01° C. of setting temperatures.  
   
   
       18 . The constant-temperature fluid supply system according to  claim 13 , wherein a passage between the second constant-temperature fluid supply apparatus and the object and a passage between the third constant-temperature fluid supply apparatus and the object are thermally insulated by a heat insulator.