Monitoring method for furnace apparatus

Abstract

The present invention relates to a monitoring method for a furnace apparatus. The monitoring method includes powering on the furnace apparatus to a specific power value; recording the rate of increase of the temperature of the furnace apparatus; and comparing the rate of increase of the temperature with a predetermined threshold value, wherein the furnace apparatus is to be replaced when the rate of increase of the temperature of the furnace apparatus is less than the predetermined threshold value.

1 . A monitoring method for a furnace apparatus, the monitoring method comprising: 
 powering on the furnace apparatus to a specific power value;    recording the rate of increase of the temperature of the furnace apparatus; and    comparing the rate of increase of the temperature with a predetermined threshold value,    wherein the furnace apparatus is to be replaced when the rate of increase of the temperature of the furnace apparatus is less than the predetermined threshold value.    
   
   
       2 . The monitoring method for a furnace apparatus of  claim 1 , wherein the specific power value is substantially 100% the maximum power.  
   
   
       3 . The monitoring method for a furnace apparatus of  claim 1 , wherein the furnace apparatus includes a heating coil which is metal resistance.  
   
   
       4 . The monitoring method for a furnace apparatus of  claim 1 , wherein the furnace apparatus includes at least a quartzware and a plurality of heating coils.  
   
   
       5 . The monitoring method for a furnace apparatus of  claim 4 , wherein the heating coils of the furnace apparatus surround the outer surface of the quartzware.  
   
   
       6 . The monitoring method for a furnace apparatus of  claim 4 , wherein the heating coils of the furnace apparatus form a plurality of heating areas.  
   
   
       7 . The monitoring method for a furnace apparatus of  claim 1 , wherein the predetermined threshold value is 15° C./MIN.  
   
   
       8 . The monitoring method for a furnace apparatus of  claim 1 , wherein the furnace apparatus is selected from the group consisting of a vertical furnace apparatus and a horizontal furnace apparatus.  
   
   
       9 . The monitoring method for a furnace apparatus of  claim 1 , further comprising: 
 plotting a curve showing a relationship between time and the rate of increase of temperature of the furnace apparatus; and    determining the predetermined threshold value based on the curve.    
   
   
       10 . The monitoring method for a furnace apparatus of  claim 9 , wherein the predetermined threshold value is determined for the specific power value.  
   
   
       11 . A monitoring method for a furnace apparatus, the monitoring method comprising: 
 determining a threshold value by powering the furnace apparatus to a preset power value and obtaining a relationship between time and a rate of increase of temperature of the furnace apparatus;    powering the furnace apparatus to the preset power value;    recording the rate of increase of temperature of the furnace apparatus; and    comparing the recorded rate of increase of temperature with the threshold value,    wherein the furnace apparatus is to be replaced when the recorded rate of increase of temperature is less than the threshold value.    
   
   
       12 . The monitoring method for a furnace apparatus of  claim 11 , wherein the preset power value is substantially 100% the maximum power.  
   
   
       13 . The monitoring method for a furnace apparatus of  claim 11 , wherein the furnace apparatus includes a heating coil which is metal resistance.  
   
   
       14 . The monitoring method for a furnace apparatus of  claim 11 , wherein the furnace apparatus includes at least a quartzware and a plurality of heating coils.  
   
   
       15 . The monitoring method for a furnace apparatus of  claim 14 , wherein the heating coils of the furnace apparatus surround the outer surface of the quartzware.  
   
   
       16 . The monitoring method for a furnace apparatus of  claim 14 , wherein the heating coils of the furnace apparatus form a plurality of heating areas.  
   
   
       17 . The monitoring method for a furnace apparatus of  claim 11 , wherein the predetermined threshold value is 15° C./MIN.  
   
   
       18 . The monitoring method for a furnace apparatus of  claim 11 , wherein the furnace apparatus is selected from the group consisting of a vertical furnace apparatus and a horizontal furnace apparatus.  
   
   
       19 . The monitoring method for a furnace apparatus of  claim 11 , wherein obtaining a relationship between time and a rate of increase of temperature of the furnace apparatus comprises plotting a curve showing the relationship between time and the rate of increase of temperature of the furnace apparatus, and wherein the predetermined threshold value is determined based on the curve.  
   
   
       20 . The monitoring method for a furnace apparatus of  claim 19 , wherein the predetermined threshold value is determined for the preset power value.