US2006093967A1PendingUtilityA1

Methods of making an integrated waveguide photodetector

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Individually held — no corporate assignee on recordPriority: Mar 17, 2003Filed: Dec 15, 2005Published: May 4, 2006
Est. expiryMar 17, 2023(expired)· nominal 20-yr term from priority
Inventors:Bruce A. Block
G02B 6/42G02B 6/4214G02B 6/12004
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Claims

Abstract

An integrated waveguide and photodetector which are evanescently coupled, and methods of making such integrated waveguide and photodetector.

Claims

exact text as granted — not AI-modified
1 . An apparatus comprising: 
 a photodetector layer;    a cladding layer formed on at least one side of the photodetector layer, the cladding layer having a sidewall higher than the photodetector layer;    a waveguide formed over a portion of the cladding layer with the higher sidewall and a portion of the photodetector.    
   
   
       2 . The apparatus of  claim 1 , further comprising a beveled mirror on a portion of the waveguide over a portion of the photodetector.  
   
   
       3 . The apparatus of  claim 1 , further comprising a substrate beneath the photodetector layer.  
   
   
       4 . The apparatus of  claim 1 , wherein the photodetector layer is made of Germanium.  
   
   
       5 . The apparatus of  claim 1 , wherein the waveguide is made of silicon nitride.

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