Method for manufacturing a substrate for use in a stamper manufacturing process, as well as a substrate obtained by using such a method

Abstract

A method for manufacturing a substrate for use in a stamper manufacturing process and a substrate which is used in stamper manufacturing process to be used in producing optical discs, includes exposing, developing and heating of a photosensitive film that has been coated onto a substrate.

1 .- 23 . (canceled)  
   
   
       24 . A metal substrate, wherein said substrate successively comprises an undercoating of a crosslinkable chemical composition with a thickness of 10-100 μm and a top coating of a photosensitive material with a predetermined thickness.  
   
   
       25 . A metal substrate according to  claim 24 , wherein the predetermined thickness of the top coating is 150-250 nm  
   
   
       26 . A metal substrate according to  claim 24 , wherein the cross linkable chemical composition of the undercoating is of the same material as the photosensitive material of the top coating.  
   
   
       27 . A metal substrate according to  claim 25 , wherein the cross linkable chemical composition of the undercoating is of the same material as the photosensitive material of the top coating.  
   
   
       28 . A metal substrate according to  claim 24 , wherein the metal is nickel.  
   
   
       29 . A substrate according to  claim 24 , wherein a novolak-based photo resist is used as the cross linkable chemical composition.  
   
   
       30 . A metal substrate according to  claim 24 , wherein the metal substrate is for use in a stamper manufacturing process, and the thickness of the cross linkable chemical composition of the undercoating is selected so that a maximum energy intensity during exposure in the stamper manufacturing process occurs at a desired height of posts which remain after exposure and developing of the top coating in the stamper manufacturing process, and the desired height is less than the predetermined thickness of the top coating.  
   
   
       31 . A method of manufacturing a stamper for producing optical discs, comprising: 
 providing a metal substrate according to  claim 24;     exposing the photosensitive layer;    developing the photosensitive layer; and    heating the photosensitive layer.