US2006104712A1PendingUtilityA1
Transportation system
Est. expiryAug 24, 2024(expired)· nominal 20-yr term from priority
Inventors:Michael L. BufanoGerald M. FriedmanChristopher HofmeisterUlysses GilchristWilliam J. Fosnight
H10P 72/3408H10P 72/3222H10P 72/3208H10P 72/50
49
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Abstract
An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.
Claims
exact text as granted — not AI-modified1 . A substrate transport system comprising: a guideway; and at least one transport vehicle adapted for holding at least one substrate and capable of being supported from and moving along the guideway; wherein the guideway comprises at least one travel lane for the at least one vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.
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