System and method for monitoring and/or controlling a flow of a media

Abstract

Some embodiments of the invention relate to a system and method for enhanced monitoring and/or controlling a flow of a media. For example, the flow of the media may be controlled and/or monitored over an enhanced range of flow rates; control over the flow of the media may be highly linear; the flow of an aggressive media may be controlled and/or monitored; or, other advantages may be provided.

1 . A sensor that generates an output signal based on one or more aspects of a flow of media, the sensor being immune to aggressive media, the sensor comprising: 
 at least one sensor component that has been individually treated to provide at least one surface on the at least one sensor with a protective coating that protects the at least one sensor against aggressive media.    
   
   
       2 . The sensor of  claim 1 , wherein the protective coating comprises one or more of a diamond-like coating, a passivation layer, a polymer coating, a sapphire coating, or a diamond coating.  
   
   
       3 . The sensor of  claim 1 , wherein the protective coating is applied to the sensor in a plasma enhanced chemical vapor deposition system.  
   
   
       4 . The sensor of  claim 1 , wherein the protective coating is amorphous and pinhole free.  
   
   
       5 . The sensor of  claim 1 , wherein the protective coating is less than 10 Angstrom thick.  
   
   
       6 . The sensor of  claim 5 , wherein the protective coating is thicker than 5 Angstrom.  
   
   
       7 . The-sensor of  claim 1 , wherein the one or more aspects of the flow of media that the output signal is based on comprises a pressure of the media.  
   
   
       8 . A valve that provides an adjustable valve opening for a flow of media to pass through, the valve being immune to aggressive media, the valve comprising: 
 at least one valve component that has been individually treated to provide at least one surface on the at least one valve with a protective coating that protects the at least one valve against aggressive media.    
   
   
       9 . The valve of  claim 8 , wherein the protective coating comprises one or more of a diamond-like coating, a passivation layer, a polymer coating, a diamond coating, or a sapphire coating.  
   
   
       10 . The valve of  claim 8 , wherein the protective coating is applied to the valve in a plasma enhanced chemical vapor deposition system.  
   
   
       11 . The valve of  claim 8 , wherein the protective coating is amorphous and pinhole free.  
   
   
       12 . The valve of  claim 8 , wherein the protective coating is less than 10 Angstrom thick.  
   
   
       13 . The valve of  claim 12 , wherein the protective coating is thicker than 5 Angstrom.  
   
   
       14 . A system for controlling a flow of aggressive media, the system comprising: 
 a flow unit that forms a media channel, the media channel enabling a media to flow through the flow unit from a media entrance to a media exit;    a sensor disposed within the flow unit that generates an output signal based on one or more aspects of a flow of media within the media channel;    at least one orifice member that includes a valve which forms a valve opening, the size of the valve opening being variable based on a control signal received by the valve, the orifice member being removably installed in the flow unit such that the media flowing through the media channel from the media entrance to the media exit passes through the valve opening; and    a processor that receives the output signal generated by the sensor and provides at least one control signal to the at least one orifice member to control the size of the valve opening provided by the at least one orifice member based on the output signal received from the sensor.    
   
   
       15 . The system of  claim 14 , wherein the orifice member is removably installed in the flow unit via a snap-fit.  
   
   
       16 . The system of  claim 14 , wherein the at least one orifice member is selected for installation in the flow unit based on one or more aspects of the at least one orifice member.  
   
   
       17 . The system of  claim 16 , wherein the one or more aspects of the orifice member comprises a range of sizes of the valve opening of that at least one orifice member.  
   
   
       18 . The system of  claim 14 , wherein the at least one orifice member comprises a plurality of orifice members, each of the plurality of orifice members being removably installed in the flow unit.  
   
   
       19 . The system of  claim 14 , wherein the sensor is substantially immune to aggressive media.  
   
   
       20 . The system of  claim 19 , wherein the sensor comprises at least one sensor component that is individually provided with a protective coating.  
   
   
       21 . The system of  claim 14 , wherein the valve is substantially immune to aggressive media.  
   
   
       22 . The system of  claim 21 , wherein the valve comprises at least one valve component that is individually provided with a protective coating.  
   
   
       23 . The system of  claim 14 , wherein the one or more aspects of the flow of media within the media channel comprise a differential pressure.