Bonding agent, aluminum nitride composite body, and manufacturing method of the same

Abstract

A bonding agent comprises a flux containing either calcium aluminate or calcium oxide and aluminum oxide and containing less than 5 wt % rare-earth elements; and aluminum nitride powder.

1 . A bonding agent, comprising: 
 a flux containing either calcium aluminate or calcium oxide and aluminum oxide and containing less than 5 wt % rare-earth elements; and    aluminum nitride powder.    
   
   
       2 . The bonding agent according to  claim 1 , wherein 
 the calcium aluminate contains at least one of Ca 12 Al 14 O 33  and Ca 3 Al 2 O 6 .    
   
   
       3 . The bonding agent according to  claim 1 , wherein 
 the flux contains 30 to 80 wt % calcium and 20 to 70 wt % aluminum.    
   
   
       4 . The bonding agent according to  claim 1 , wherein 
 the flux contains 0.01 to 5 wt % silica.    
   
   
       5 . The bonding agent according to  claim 1 , wherein 
 the content of the flux is 10 to 90 wt % and the content of the aluminum nitride powder is 10 to 90 wt %.    
   
   
       6 . The bonding agent according to  claim 1 , wherein 
 maximum particle diameters of the flux and the aluminum nitride powder are 45 μm or less.    
   
   
       7 . An aluminum nitride composite body, comprising: 
 a plurality of aluminum nitride sintered bodies; and    a bonding layer formed between each adjacent pair of the plurality of aluminum nitride sintered bodies, the bonding layer containing nitrogen, oxygen, aluminum and calcium and containing less than 15 wt % rare-earth elements, wherein    the plurality of aluminum nitride sintered bodies are bonded through the bonding layer.    
   
   
       8 . The aluminum nitride composite body according to  claim 7 , wherein 
 the bonding layer contains 15 to 30 wt % nitrogen, 10 to 35 wt % oxygen, 20 to 55 wt % aluminum, and 5 to 20 wt % calcium.    
   
   
       9 . The aluminum nitride composite body according to  claim 7 , wherein 
 the aluminum nitride composite body is used for a heater including a heating element.    
   
   
       10 . The aluminum nitride composite body according to  claim 7 , wherein 
 the aluminum nitride composite body is used for an electrostatic chuck including an electrode.    
   
   
       11 . A method of manufacturing an aluminum nitride composite body, comprising: 
 heating a plurality of aluminum nitride sintered bodies with a bonding agent interposed therebetween at a bonding temperature of 1500° C. or less to melt the bonding agent; and    bonding the plurality of aluminum nitride sintered bodies to each other, wherein    the bonding agent contains a flux and aluminum nitride powder, and the flux contains either calcium aluminate or calcium oxide and aluminum oxide and contains less than 5 wt % rare-earth elements.    
   
   
       12 . The method of manufacturing an aluminum nitride composite body according to  claim 11 , wherein 
 the plurality of aluminum nitride sintered bodies with the bonding agent interposed therebeween are heated to the bonding temperature at a heating rate of 0.5 to 10.0C./min.    
   
   
       13 . The method of manufacturing an aluminum nitride composite body according to  claim 11 , wherein 
 an average surface roughness of a bonding surface of each of the aluminum nitride sintered bodies is 0.1 to 2.0 μm.