Process for treating perfluorides

Abstract

According to a process for treating perfluorides in which a perfluoride treatment undertaker carries out decomposition treatment of perfluorides discharged from a manufacturing plant by using a perfluoride treating apparatus connected to said manufacturing plant, and the cost of treatment of perfluorides calculated according to the amount of perflorides treated by said perfluoride treating apparatus is communicated to the owner of said manufacturing plant, it is possible to reduce the cost required for the decomposition treatment of perfluorides which cost is to be defrayed by the product manufacturer.

1 - 17 . (canceled)  
   
   
       18 . A process for estimating the amount of perfluorides collected and treated by a perfrluoride treatment undertaker using a perfluoride treating apparatus connected by pipes to a plurality of manufacturing plants which comprises 
 supplying perfluoride gases into each manufacturing plant from the perfluoride treatment undertaker, and measuring the amount of supplying perfluoride gases.    
   
   
       19 . A process according to claim  1 , wherein the measurement of the amount supplied is conducted by using a flow meter.  
   
   
       20 . A process according to claim  1 , wherein the manufacturing plant is a semiconductor manufacturing plant or a liquid crystal manufacturing plant.  
   
   
       21 . A process for estimating the amount of perfluorides collected and treated by a perfluoride treatment undertaker using a perfluoride treating apparatus connected by pipes to a plurality of semiconductor manufacturing plants which comprises 
 supplying wafer from a wafer supplying device in each semiconductor manufacturing plant, and measuring the number of wafers supplied.