Additives to prevent degradation of alkyl-hydrogen siloxanes

Abstract

An organohydrosiloxane composition comprising: a) one or more organohydrosiloxane compounds, each having at least one [—HSiR-O—] unit, wherein R═C 1 -C 18 linear, branched, or cyclic alkyl, C 1 -C 18 linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl, and b) an antioxidant compound shown in Formula (1) wherein the antioxidant compound is a phenolic compound and is present in a concentration from about 1 ppm to about 5,000 ppm and wherein R 1 through R 5 can each independently be H, OH, C 1 -C 18 linear, branched, or cyclic alkyl, C 1 -C 18 linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl. The compositions of present invention exhibit stability and significantly extend the shelf life of organohydrosiloxane products and allow greater flexibility in handling these products in chemical processes or semiconductor manufacturing. The resulting stabilization of siloxanes prevents the possibility of complete polymerization (i.e., solidification) of product in chemical delivery lines or valves, which lowers equipment maintenance and costs and reduces time the machinery is out of production.

1 - 37 . (canceled)  
   
   
       38 . A process for forming an oxide layer on a substrate comprising the steps of: 
 a. introducing an organohydrosiloxane composition into a gas stream, thereby forming a process vapor;    b. contacting a surface of said substrate with said process vapor; and    c. decomposing said process vapor, thereby forming said oxide layer on said substrate,    wherein the organohydrosiloxane composition comprises: 
 one or more organohydrosiloxane compounds, each having at least one [—HSiR-O—] unit, wherein R═C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and  
 an antioxidant compound of Formula (1),  
                     
 wherein the antioxidant compound is a phenolic compound and is present in an amount between about 1 ppm to about 5000 ppm, and wherein R 1  through R 5  are each independently H, OH, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl.  
   
   
   
       39 . The process of  claim 38 , wherein said substrate is a semiconductor substrate.  
   
   
       40 . The process of  claim 38 , wherein said oxide layer is a doped silicon oxide layer comprising a dopant selected from the group consisting of: hydrogen, carbon, nitrogen, and any combinations thereof.  
   
   
       41 . The process of  claim 38 , wherein said oxide layer is a doped silicon oxide layer comprising a dopant selected from the group consisting of: arsenic, boron, phosphorous, and any combinations thereof.  
   
   
       42 . The process of  claim 38 , wherein said gas stream comprises gas selected from the group consisting of: nitrogen, helium, argon, oxygen, ozone, ammonia, nitrous oxide, carbon dioxide, carbon monoxide, SiH 4 , silane, silicon tetrafluoride, hydrazine, and any combinations thereof.  
   
   
       43 . The process of  claim 38 , wherein said process vapor further comprises a chemical precursor selected from the group consisting of: amines, aminoalcohols, silanes, siloxanes, alkanes, alkenes, alkynes, alcohols, esters, ketones, aldehydes, carboxylic acids, and any combinations thereof.  
   
   
       44 . The process of  claim 38 , wherein said process vapor further comprises a chemical precursor selected from the group consisting of: arsines, alkylarsenates, phosphines, alkylphosphates, alkylphosphites, boranes, alkylborates, and any combinations thereof.  
   
   
       45 . The process of  claim 38 , wherein said decomposing step comprises a decomposing means selected from the group consisting of: plasma, heating, chemical reaction, and any combinations thereof.  
   
   
       46 . The process of  claim 45 , wherein said heating means comprises a temperature between about 100° C. and about 800° C.  
   
   
       47 . The process of  claim 38 , wherein said one or more organohydrosiloxane compounds are one or more linear compounds, one or more cyclic compounds, and any combinations thereof.  
   
   
       48 . The process of  claim 47 , wherein said one or more linear compounds have a formula according to Formula (3),  
     
       
         
         
             
             
         
       
       wherein R 10  is C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; R 11  through R 16  are each independently H, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; x is about 1 to about 20; and x can equal 0 when at least one of R 11  through R 16  is H.  
     
   
   
       49 . The process of  claim 48 , wherein R 10  is methyl, ethyl, propyl, butyl, or cyclohexyl; R 11  through R 16  is methyl, ethyl, propyl, butyl, cyclohexyl or H; and x is about 1 to about 10.  
   
   
       50 . The process of  claim 48 , wherein said linear organohydrosiloxanes of Formula (3) are selected from the group consisting of:1,1,1,3,3-pentamethyldisiloxane, 1,1,1,3,3-pentaethyldisiloxane, 1,1,1,3,3-pentaphenyldisiloxane, 1,1,1,3,3-penta(4-methylphenyl)disiloxane, 1,1,5,5-tetramethyl-3-ethyltrisiloxane, 1,1,5,5-tetraethyl-3-methyltrisiloxane, 1,1,3,5,5-pentamethyltrisiloxane, 1,1,3,5,5-pentaethyltrisiloxane, 1,1,3,5,5-pentaphenyltrisiloxane, 1,1,3,5,5-penta(4-methylphenyl)trisiloxane, 1,1,1,5,5,5-heptamethyl-3-ethyltrisiloxane, 1,1,1,5,5,5-heptaethyl-3-methyltrisiloxane, 1,1,1,3,5,5,5-heptamethyltrisiloxane, 1,1,1,3,5,5,5-heptaethyltrisiloxane, 1,1,1,3,5,5,5-heptaphenyltrisiloxane, 1,1,1,3,5,5,5-hepta(4-methylphenyl)trisiloxane, 1,1,3,5,7,7-hexamethyltetrasiloxane, 1,1,3,5,7,7-hexaethyltetrasiloxane, 1,1,3,5,7,7-hexaphenyltetrasiloxane, 1,1,3,5,7,7-hexa(4-methylphenyl)tetrasiloxane, 1,1,1,3,5,7,7,7-octamethyltetrasiloxane, 1,1,1,3,5,7,7,7-octaethyltetrasiloxane, 1,1,1,3,5,7,7,7-octaphenyltetrasiloxane, 1,1,1,3,5,7,7,7-octa(4-methylphenyl)tetrasiloxane, 1,1,3,5,7,9,9-heptamethylpentasiloxane, 1,1,3,5,7,9,9-heptamethylpentasiloxane, 1,1,3,5,7,9,9-heptaethylpentasiloxane, 1,1,3,5,7,9,9-heptaphenylpentasiloxane, 1,1,3,5,7,9,9-hepta(4-methylphenyl)pentasiloxane, 1,1,1,3,5,7,9,9,9-nonamethylpentasiloxane, 1,1,1,3,5,7,9,9,9-nonaethylpentasiloxane, 1,1,1,3,5,7,9,9,9-nonaphenylpentasiloxane, 1,1,1,3,5,7,9,9,9-nona(4-methylphenyl)pentasiloxane, 1,1,3,5,7,9,11,11-octaamethylhexasiloxane, 1,1,3,5,7,9,11,11-octaethylhexasiloxane, 1,1,3,5,7,9,11,11-octaphenylhexasiloxane, 1,1,3,5,7,9,11,11-octa(4-methylphenyl)hexasitoxane, 1,1,1,3,5,7,9,11,11,11 decamethylhexasiloxane, 1,1,1,3,5,7,9,11,11,11-decaethylhexasiloxane, 1,1,1,3,5,7,9,11,11,11-decaphenylhexasiloxane, 1,1,1,3,5,7,9,11,11,11-deca(4-methylphenyl)hexasiloxane, and any combinations thereof.  
   
   
       51 . The process of  claim 47 , wherein said one or more linear compounds have a formula according to Formula (4),  
     
       
         
         
             
             
         
       
       wherein R 10  is C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; R 11  through R 16  are each independently H, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and y is about 0 to about 20.  
     
   
   
       52 . The process of  claim 51 , wherein R 10  is methyl, ethyl, propyl, butyl, or cyclohexyl; R 11  through R 16  is methyl, ethyl, propyl, butyl, cyclohexyl or H; and y is about 0 to about 8.  
   
   
       53 . The process of  claim 51 , wherein said linear organohydrosiloxanes of Formula (4) are selected from the group consisting of: 1,1-diethyl-3,3-dimethyldisiloxane, 1,1,3,3-tetramethyldisiloxane, 1,1,3,3-tetraethyltrisiloxane, 1,1,3,3-tetraphenyldisiloxane, 1,1,3,3-tetra(4-methylphenyl)disiloxane, 1,1,5,5-tetramethyl-3,3-diethyltrisiloxane, 1,1,5,5-tetraethyl-3,3-dimethyltrisiloxane, 1,1,3,3,5,5-hexamethyltrisiloxane, 1,1,3,3,5,5-hexaethyltrisiloxane, 1,1,3,3,5,5-hexaphenyltrisiloxane, 1,1,3,3,5,5-hexa(4-methylphenyl)trisiloxane, 1,1,3,3,5,5,7,7-octamethyltetrasiloxane, 1,1,3,5,7,7-octaethyltetrasiloxane, 1,1,3,3,5,5,7,7-octaphenyltetrasiloxane, 1,1,3,3,5,5,7,7-octa(4-methylphenyl)tetrasiloxane, 1,1,3,3,5,5,7,7,9,9-decamethylpentasiloxane, 1,1,3,3,5,5,7,7,9,9-decaethylpentasiloxane, 1,1,3,3,5,5,7,7,9,9-decaphenylpentasiloxane, 1,1,3,3,5,5,7,7,9,9-deca(4-methylphenyl)pentasiloxane, 1,1,3,3,5,5,7,7,9,9,11,11-dodecaamethylhexasiloxane, 1,1,3,3,5,5,7,7,9,9,11,11-dodecaethylhexasiloxane, 1,1,3,3,5,5,7,7,9,9,11,11-dodecaphenylhexasiloxane, and 1,1,3,3,5,5,7,7,9,9,11,11-dodeca(4-methylphenyl)hexasiloxane, and any combinations thereof.  
   
   
       54 . The process of  claim 47 , wherein said one or more cyclic compounds have a formula according to Formula (5),  
     
       
         
         
             
             
         
       
       wherein R 17  is independently C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and z is about 2 to about 21.  
     
   
   
       55 . The process of  claim 54 , wherein R 17  is methyl, ethyl, propyl, butyl, or cyclohexyl; and z is about 2 to about 11.  
   
   
       56 . The process of  claim 54 , wherein said cyclic organohydrosiloxanes of Formula (5) are selected from the group consisting of: 1,3,5 trimethylcyclotrisiloxane, 1,3,5-triethylcyclotrisiloxane, 1,3,5-triphenylcyclotrisiloxane, 1,3,5-tri(4-methylphenyl)cyclotrisiloxane, 1,3,5,7-tetramethylcyclotetrasiloxane, 1,3,5,7-tetraethylcyclotetrasiloxane, 1,3,5,7-tetraphenylcyclotetrasiloxane, 1,3,5,7-tetra(4-methylphenyl)cyclotetrasiloxane, 1,5-dimethyl-3,7-diethylcyclotetrasiloxane, 1,3-dimethyl-5,7-diethylcyclotetrasiloxane, 1,3,5,7,9-pentamethylcyclopentasiloxane, 1,3,5,7,9-pentaethylcyclopentasiloxane, 1,3,5,7,9-pentaphenylcyclopentasiloxane, 1,3,5,7,9-penta(4-methylphenyl)cyclopentasiloxane, 1,3,5,7,9,11-hexamethylcyclohexasiloxane, 1,3,5,7,9,11-hexaethylcyclohexasiloxane, 1,3,5,7,9,11-hexaphenylcyclohexasiloxane, 1,3,5,7,9,11-hexa(4-methylphenyl)cyclohexasiloxane, 1,5,9-trimethyl-3,7,11-triethylcyclohexasiloxane, 1,3,5-trimethyl-7,9,11-triethylcyclohexasiloxane, and any combinations thereof.  
   
   
       57 . The process of  claim 38 , wherein R 1  through R 5  are H, OH, methyl, ethyl, methoxy, ethoxy, and tert-butyl.  
   
   
       58 . The process of  claim 38 , wherein said antioxidant compound of Formula (1) is selected from the group consisting of: phenol, hydroquinone, 4-methylphenol, 3-methylphenol, 2-methylphenol, 4-ethylphenol, 4-propylphenol, 4-iso-propylphenol, 4-butylphenol, 4-sec-butylphenol, 4-iso-butylphenol, 4-tert-butylphenol, 4-methoxyphenol, 3-methoxyphenol, 2-methoxyphenol, 4-ethoxyphenol, 4-propoxyphenol, 4-butoxyphenol, 2,4-di-tert-butylphenol, 2-(1-methylbutyl)phenol, 2-(benzyloxy)phenol, 2-tert-butyl-6-methylphenol, 3,4,5-trimethoxyphenol, 3-ethoxy-4-methylphenol, 4-benzyloxyphenol, 4-benzyl-2,6-di-tert-butylphenol, 2-(2-butenyl)phenol, 2-(4-methylbenzyl)phenol, 2,6-di-tert-butyl-4-methylphenol (BHT), 1,2-dihydroxybenzene, 2,4,6-tris-benzyloxyphenol, 2,4-dicyclohexyl-5-methylphenol, 6-tert-butyl-1,2-dihydroxybenzene, and any combinations thereof.  
   
   
       59 . The process of  claim 38 , wherein said antioxidant compound is present in an amount between about 1 ppm to about 1000 ppm.  
   
   
       60 . A process for forming an oxide layer on a substrate comprising the steps of: 
 a. introducing an organohydrosiloxane composition into a gas stream, thereby forming a process vapor;    b. contacting a surface of said substrate with said process vapor; and    c. decomposing said process vapor, thereby forming said oxide layer on said substrate,    wherein the organohydrosiloxane composition comprises: 
 one or more organohydrosiloxane compounds, each having at least one [—HSiR-O—] unit, wherein R═C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl;  
 an antioxidant compound of Formula (1),  
                     
 wherein the antioxidant compound is a phenolic compound and is present in an amount between about 1 ppm to about 5000 ppm, and wherein R 1  through R 5  are each independently H, OH, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl; and  
 an alkoxysilane of Formula (2),  
                     wherein said alkoxysilane is present in an amount between about 1 ppm to about 5000 ppm; and wherein R 6  is a C 1 -C 18  linear, branched, or cyclic alkyl or substituted or unsubstituted aryl; and R 7 , R 8 , and R 9  are independently H, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl.    
   
   
   
       61 . The process of  claim 60 , wherein said substrate is a semiconductor substrate.  
   
   
       62 . The process of  claim 60 , wherein said oxide layer is a doped silicon oxide layer comprising a dopant selected from the group consisting of: hydrogen, carbon, nitrogen, and any combinations thereof.  
   
   
       63 . The process of  claim 60 , wherein said oxide layer is a doped silicon oxide layer comprising a dopant selected from the group consisting of: arsenic, boron, phosphorous, and any combinations thereof.  
   
   
       64 . The process of  claim 60 , wherein said gas stream comprises gas selected from the group consisting of: nitrogen, helium, argon, oxygen, ozone, ammonia, nitrous oxide, carbon dioxide, carbon monoxide, SiH 4 , silane, silicon tetrafluoride, hydrazine, and any combinations thereof.  
   
   
       65 . The process of  claim 60 , wherein said process vapor further comprises a chemical precursor selected from the group consisting of: amines, aminoalcohols, silanes, siloxanes, alkanes, alkenes, alkynes, alcohols, esters, ketones, aldehydes, carboxylic acids, and any combinations thereof.  
   
   
       66 . The process of  claim 60 , wherein said process vapor further comprises a chemical precursor selected from the group consisting of: arsines, alkylarsenates, phosphines, alkylphosphates, alkylphosphites, boranes, alkylborates, and any combinations thereof.  
   
   
       67 . The process of  claim 60 , wherein said decomposing step comprises a decomposing means selected from the group consisting of: plasma, heating, chemical reaction, and any combinations thereof.  
   
   
       68 . The process of  claim 67 , wherein said heating means comprises a temperature between about 1001° C. and about 800° C.  
   
   
       69 . The process of  claim 60 , wherein R 1  through R 5  are H, OH, methyl, ethyl, methoxy, ethoxy, and tert-butyl.  
   
   
       70 . The process of  claim 60 , wherein said antioxidant compound of Formula (1) is selected from the group consisting of: phenol, hydroquinone, 4-methylphenol, 3-methylphenol, 2-methylphenol, 4-ethylphenol, 4-propylphenol, 4-iso-propylphenol, 4-butylphenol, 4-sec-butylphenol, 4-iso-butylphenol, 4-tert-butylphenol, 4-methoxyphenol, 3-methoxyphenol, 2-methoxyphenol, 4-ethoxyphenol, 4-propoxyphenol, 4-butoxyphenol, 2,4-di-tert-butylphenol, 2-(1-methylbutyl)phenol, 2-(benzyloxy)phenol, 2-tert-butyl-6-methylphenol, 3,4,5-trimethoxyphenol, 3-ethoxy-4-methylphenol, 4-benzyloxyphenol, 4-benzyl-2,6-di-tert-butylphenol, 2-(2-butenyl)phenol, 2-(4-methylbenzyl)phenol, 2,6-di-tert-butyl-4-methylphenol (BHT), 1,2-dihydroxybenzene, 2,4,6-tris-benzyloxyphenol, 2,4-dicyclohexyl-5-methylphenol, 6-tert-butyl-1,2-dihydroxybenzene, and any combinations thereof.  
   
   
       71 . The process of  claim 60 , wherein said antioxidant compound is present in an amount between about 1 ppm to about 1000 ppm.  
   
   
       72 . The process of  claim 60 , wherein R 6  is methyl, ethyl, or propyl; and R 7 , R 8  and R 9  are methyl, ethyl, propyl, methoxy, ethoxy or propoxy.  
   
   
       73 . The process of  claim 60 , wherein said alkoxysilane of Formula (2) is selected from the group consisting of: trimethylmethoxysilane, triethylmethoxysilane, tripropylmethoxysilane, triphenylmethoxysilane, tri(4-methylphenyl)methoxysilane, dimethyldimethoxysilane, diethyldimethoxysilane, dipropyldimethoxysilane, diphenyldimethoxysilane, di(4-methylphenyl)dimethoxysilane, methyltrimethoxysilane, ethyltrimethoxysilane, propyltrimethoxysilane, phenyltrimethoxysilane, 4-methylphenyltrimethoxysilane, trimethylethoxysilane, triethylethoxysilane, tripropylethoxysilane, triphenylethoxysilane, tri(4-methylphenyl)ethoxysilane, dimethyldiethoxysilane, diethyldiethoxysilane, dipropyldiethoxysilane, diphenyldiethoxysilane, di(4-methylphenyl)diethoxysilane, methyltriethoxysilane, ethyltriethoxysilane, propyltriethoxysilane, phenyltriethoxysilane. 4-methylphenyltriethoxysilane, trimethylpropoxysilane, triethylpropoxysilane, tripropylpropoxysilane, triphenylpropoxysilane, tri(4-methylphenyl)propoxysilane, dimethyldipropoxysilane, diethyldipropoxysilane, dipropyldipropoxysilane, diphenyldipropoxysilane, di(4-methylphenyl)dipropoxysilane, methyltripropoxysilane, ethyltripropoxysilane, propyltripropoxysilane, phenyltripropoxysilane, 4-methylphenyltripropoxysilane, trimethylbutoxysilane, triethylbutoxysilane, tripropylbutoxysilane, triphenylbutoxysilane, tri(4-methylphenyl)butoxysilane, dimethyldibutoxysilane, diethyldibutoxysilane, dipropyldibutoxysilane, diphenyldibutoxysilane, di(4-methylphenyl)dibutoxysilane, methyltributoxysilane, ethyltributoxysilane, propyltributoxysilane, phenyltributoxysilane, 4-methylphenyltributoxysilane, trimethylphenoxysilane, triethylphenoxysilane, tripropylphenoxysilane, triphenylphenoxysilane, tri(4-methylphenyl)phenoxysilane, dimethyldiphenoxysilane, diethyldiphenoxysilane, dipropyldiphenoxysilane, diphenyldiphenoxysilane, di(4-methylphenyl)diphenoxysilane, methyltriphenoxysilane, ethyltriphenoxysilane, propyltriphenoxysilane, phenyltriphenoxysilane, 4-methylphenyltriphenoxysilane, trimethyl(4-methylphenoxy)silane, triethyl(4-methylphenoxy)silane, tripropyl(4-methylphenoxy)silane, triphenyl(4-methylphenoxy)silane, tri(4-methylphenyl)(4-methylphenoxy)silane, dimethyldi(4-methylphenoxy)silane, diethyldi(4-methylphenoxy)silane, dipropyldi(4-methylphenoxy)silane, diphenyldi(4-methylphenoxy)silane, di(4-methylphenyl)di(4-methylphenoxy)silane, methyltri(4-methylphenoxy)silane, ethyltri(4-methylphenoxy)silane, propyltri(4-methylphenoxy)silane, phenyltri(4-methylphenoxy)silane, 4-methylphenyltri(4-methylphenoxy)silane, and any combinations thereof.  
   
   
       74 . The process of  claim 60 , wherein said alkoxysilane is present in an amount between about 10 ppm to about 2500 ppm.  
   
   
       75 . The process of  claim 60 , wherein said alkoxysilane is present in an amount between about 100 ppm to about 1000 ppm.  
   
   
       76 . The process of  claim 60 , wherein said one or more organohydrosiloxane compounds are one or more linear compounds, one or more cyclic compounds, and any combinations thereof.  
   
   
       77 . The process of  claim 76 , wherein said one or more linear compounds have a formula according to Formula (3),  
     
       
         
         
             
             
         
       
       wherein R 10  is C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; R 11  through R 16  are each independently H, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted taryl; x is 1 to about 20; and x can equal 0 when at least one of R 11  through R 16  is H.  
     
   
   
       78 . The process of  claim 77 , wherein R 10  is methyl, ethyl, propyl, butyl, or cyclohexyl; R 11  through R 16  is methyl, ethyl, propyl, butyl, cyclohexyl or H; and x is about 1 to about 10.  
   
   
       79 . The process of  claim 77 , wherein said linear organohydrosiloxanes of Formula (3) are selected from the group consisting of:1,1,1,3,3-pentamethyldisiloxane, 1,1,1,3,3-pentaethyldisiloxane, 1,1,1,3,3-pentaphenyldisiloxane, 1,1,1,3,3-penta(4-methylphenyl)disiloxane, 1,1,5,5-tetramethyl-3-ethyltrisiloxane, 1,1,5,5-tetraethyl-3-methyltrisiloxane, 1,1,3,5,5-pentamethyltrisiloxane, 1,1,3,5,5-pentaethyltrisiloxane, 1,1,3,5,5-pentaphenyltrisiloxane, 1,1,3,5,5-penta(4-methylphenyl)trisiloxane, 1,1,1,5,5,5-heptamethyl-3-ethyltrisiloxane, 1,1,1,5,5,5-heptaethyl-3-methyltrisiloxane, 1,1,1,3,5,5,5-heptamethyltrisiloxane, 1,1,1,3,5,5,5-heptaethyltrisiloxane, 1,1,1,3,5,5,5-heptaphenyltrisiloxane, 1,1,1,3,5,5,5-hepta(4-methylphenyl)trisiloxane, 1,1,3,5,7,7-hexamethyltetrasiloxane, 1,1,3,5,7,7-hexaethyltetrasiloxane, 1,1,3,5,7,7-hexaphenyltetrasiloxane, 1,1,3,5,7,7-hexa(4-methylphenyl)tetrasiloxane, 1,1,1,3,5,7,7,7-octamethyltetrasiloxane, 1,1,1,3,5,7,7,7-octaethyltetrasiloxane, 1,1,1,3,5,7,7,7-octaphenyltetrasiloxane, 1,1,1,3,5,7,7,7-octa(4-methylphenyl)tetrasifoxane, 1,1,3,5,7,9,9-heptamethylpentasiloxane, 1,1,3,5,7,9,9-heptamethylpentasiloxane, 1,1,3,5,7,9,9-heptaethylpentasiloxane, 1,1,3,5,7,9,9-heptaphenylpentasiloxane, 1,1,3,5,7,9,9-hepta(4-methylphenyl)pentasiloxane, 1,1,1,3,5,7,9,9,9-nonamethylpentasiloxane, 1,1,1,3,5,7,9,9,9-nonaethylpentasiloxane, 1,1,1,3,5,7,9,9,9-nonaphenylpentasiloxane, 1,1,1,3,5,7,9,9,9-nona(4-methylphenyl)pentasiloxane, 1,1,3,5,7,9,11,11-octaamethylhexasiloxane, 1,1,3,5,7,9,11,11-octaethylhexasiloxane, 1,1,3,5,7,9,11,11-octaphenylhexasiloxane, 1,1,3,5,7,9,11,11-octa(4-methylphenyl)hexasiloxane, 1, 1, 1, 3, 5, 7,9,11,11,11-decamethylhexasiloxane, 1,1,1,3,5,7,9,11,11,11-decaethylhexasiloxane, 1,1,1,3,5,7,9,11,11,11-decaphenylhexasiloxane, 1,1,1,3,5,7,9,11,11,11-deca(4-methylphenyl)hexasiloxane, and any combinations thereof.  
   
   
       80 . The process of  claim 76 , wherein said one or more linear compounds have a formula according to Formula (4),  
     
       
         
         
             
             
         
       
       wherein R 10  is C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; R 11  through R 16  are each independently H, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and y is about 0 to about 20.  
     
   
   
       81 . The process of  claim 80 , wherein R 10  is methyl, ethyl, propyl, butyl, or cyclohexyl; R 11  through R 16  is methyl, ethyl, propyl, butyl, cyclohexyl or H; and y is about 0 to about 8.  
   
   
       82 . The process of  claim 80 , wherein said linear organohydrosiloxanes of Formula (4) are selected from the group consisting of: 1,1-diethyl-3,3-dimethyldisiloxane, 1,1,3,3-tetramethyldisiloxane, 1,1,3,3-tetraethyltrisiloxane, 1,1,3,3-tetraphenyldisiloxane, 1,1,3,3-tetra(4-methylphenyl)disiloxane, 1,1,5,5-tetramethyl-3,3-diethyltrisiloxane, 1,1,5,5-tetraethyl-3,3-dimethyltrisiloxane, 1,1,3,3,5,5-hexamethyltrisiloxane, 1,1,3,3,5,5-hexaethyltrisiloxane, 1,1,3,3,5,5-hexaphenyltrisiloxane, 1,1,3,3,5,5-hexa(4-methylphenyl)trisiloxane, 1,1,3,3,5,5,7,7-octamethyltetrasiloxane, 1,1,3,5,7,7-octaethyltetrasiloxane, 1,1,3,3,5,5,7,7-octaphenyltetrasiloxane, 1,1,3,3,5,5,7,7-octa(4-methylphenyl)tetrasiloxane, 1,1,3,3,5,5,7,7,9,9-decamethylpentasiloxane, 1,1,3,3,5,5,7,7,9,9-decaethylpentasiloxane, 1,1,3,3,5,5,7,7,9,9-decaphenylpentasiloxane, 1,1,3,3,5,5,7,7,9,9-deca(4 methylphenyl)pentasiloxane, 1,1,3,3,5,5,7,7,9,9,11,11-dodecaamethylhexasiloxane, 1,1,3,3,5,5,7,7,9,9,11,11-dodecaethylhexasiloxane, 1,1,3,3,5,5,7,7,9,9,11,11-dodecaphenylhexasiloxane, and 1,1,3,3,5,5,7,7,9,9,11,11-dodeca(4-methylphenyl)hexasiloxane, and any combinations thereof.  
   
   
       83 . The process of  claim 76 , wherein said one or more cyclic compounds have a formula according to Formula (5),  
     
       
         
         
             
             
         
       
       wherein R 17  is independently C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and z is about 2 to about 21.  
     
   
   
       84 . The process of  claim 83 , wherein R 17  is methyl, ethyl, propyl, butyl, or cyclohexyl; and z is about 2 to about 11.  
   
   
       85 . The process of  claim 83 , wherein said cyclic organohydrosiloxanes of Formula (5) are selected from the group consisting of: 1,3,5-trimethylcyclotrisiloxane, 1,3,5-triethylcyclotrisiloxane, 1,3,5-triphenylcyclotrisiloxane, 1,3,5-tri(4-methylphenyl)cyclotrisiloxane, 1,3,5,7-tetramethylcyclotetrasiloxane, 1,3,5,7-tetraethylcyclotetrasiloxane, 1,3,5,7-tetraphenylcyclotetrasiloxane, 1,3,5,7-tetra(4 methylphenyl)cyclotetrasiloxane, 1,5-dimethyl-3,7-diethylcyclotetrasiloxane, 1,3-dimethyl-5,7-diethylcyclotetrasiloxane, 1,3,5,7,9-pentamethylcyclopentasiloxane, 1,3,5,7,9-pentaethylcyclopentasiloxane, 1,3,5,7,9-pentaphenylcyclopentasiloxane, 1,3,5,7,9-penta(4-methylphenyl)cyclopentasiloxane, 1,3,5,7,9,11-hexamethylcyclohexasiloxane, 1,3,5,7,9,11-hexaethylcyclohexasiloxane, 1,3,5,7,9,11-hexaphenylcyclohexasiloxane, 1,3,5,7,9,11-hexa(4-methylphenyl)cyclohexasiloxane, 1,5,9-trimethyl-3,7,11-triethylcyclohexasiloxane, 1,3,5-trimethyl-7,9,11-triethylcyclohexasiloxane, and any combinations thereof.  
   
   
       86 . The process of  claim 60 , wherein said organohydrosiloxane composition comprises: 
 a. one or more organohydrosiloxane compounds of Formula (3),                        wherein R 10  is C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl, and R 11  through R 16  are each independently H, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and x is about 1 to about 10;      b. an antioxidant compound of said Formula (1), wherein R 1  through R 5  are H, OH, methyl, ethyl, methoxy, ethoxy, and tert-butyl; and    c. an alkoxysilane of said Formula (2), wherein R 6  is methyl, ethyl, or propyl; and R 7 , R 8  and R 9  are methyl, ethyl, propyl, methoxy, ethoxy or propoxy.    
   
   
       87 . The composition of  claim 60 , wherein said organohydrosiloxane composition comprises: 
 one or more organohydrosiloxane compounds of Formula (4),                          wherein R 10  is C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl, and R 11  through R 16  are each independently H, C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and y is about 0 to about 20;    an antioxidant compound of said Formula (1), wherein R 1  through R 5  are H, OH, methyl, ethyl, methoxy, ethoxy, and tert-butyl; and    an alkoxysilane of said Formula (2), wherein R 6  is methyl, ethyl, or propyl; and R 7 , R 8  and R 9  are methyl, ethyl, propyl, methoxy, ethoxy or propoxy.    
   
   
       88 . The composition of  claim 60 , wherein said organohydrosiloxane composition comprises: 
 one or more organohydrosiloxane compounds of Formula (5),                          wherein R 17  is independently C 1 -C 18  linear, branched, or cyclic alkyl, C 1 -C 18  linear, branched, or cyclic alkoxy, or substituted or unsubstituted aryl; and z is about 2 to about 11;    an antioxidant compound of said Formula (1), wherein R 1  through R 5  are H, OH, methyl, ethyl, methoxy, ethoxy, and tert-butyl; and    an alkoxysilane of said Formula (2), wherein R 6  is methyl, ethyl, or propyl; and R 7 , R 8  and R 9  are methyl, ethyl, propyl, methoxy, ethoxy or propoxy.