Optical element holder, exposure apparatus, and device fabricating method

Abstract

An optical element holder for holding an optical element includes a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element.

1 . An optical element holder for holding an optical element comprising a holding element to hold the optical element or a holding part provided to the optical element unitedly, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element.  
   
   
       9 . The optical element holder according to  claim 1 , further comprising a first temperature controller for controlling a temperature of the optical element by radiation.  
   
   
       13 . An exposure apparatus comprising: 
 an optical element,    an optical element holder for holding the optical element which includes a holding element to hold the optical element or a holding part integrated with the optical element, wherein there is substantially no heat exchange between the optical element and the holding element or the holding part and the holding element; and    an optical system for guiding light from a light source to an object, said optical system includes the optical element.