Unified frame for semiconductor material handling system

Abstract

The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.

1 - 12 . (canceled)  
     
     
         13 . In a workpiece handling tool for accessing workpieces stored in a container, the workpiece handling tool including a container support structure, a port door and a workpiece handling robot, a frame comprising: 
 a first elongated structural member and a second elongated structural member, said first and second elongated structural members each having a first end, a second end, a front face, and a rear face;    a lower support secured to said second end of said first and second elongated structural members, said lower support including a front component partially covering said front face of said first and second elongated structural members and a rear component partially covering said rear face of said first and second elongated structural members; and    a port door storage area for temporarily storing the port door, said port door storage area located between said front component and said rear component of said lower support.    
     
     
         14 . The frame as recited in  claim 13 , further including an upper support secured to said first end of said first and second elongated structural members.  
     
     
         15 . The frame as recited in  claim 14 , wherein said upper support comprises sheet metal.  
     
     
         16 . The frame as recited in  claim 13 , wherein said lower support comprises a single piece of material.  
     
     
         17 . The frame as recited in  claim 13 , wherein said lower support comprises multiple pieces of material.  
     
     
         18 . The frame as recited in  claim 16 , wherein said lower support comprises sheet metal.  
     
     
         19 . The frame as recited in  claim 14 , wherein said upper support and said lower support, when secured to said first and second elongated structural members, maintain said first and second elongated structural members substantially parallel to each other.  
     
     
         20 . The frame as recited in  claim 13 , wherein the frame provides an input/output port for a workpiece to pass through, said input/output port located at an elevation between said first and second end of said first and second elongated structural members.  
     
     
         21 . The frame as recited in  claim 13 , wherein said front component of said lower support provides a barrier between a port door stored in said port door storage area and an ambient atmosphere external to the workpiece handling tool.  
     
     
         22 . The frame as recited in  claim 13 , wherein said rear component of said lower support provides a barrier between a port door stored in said port door storage area and the workpiece handling robot.  
     
     
         23 . The frame as recited in  claim 13 , further including a port door drive mechanism for moving the port door between said input/output port and said port door storage area.  
     
     
         24 . The frame as recited in  claim 23 , further including a housing substantially enclosing said port door drive mechanism.  
     
     
         25 . The frame as recited in  claim 24 , wherein said housing is mounted to said first elongated structural member and said housing is located between said first and second end of said first elongated structural member.  
     
     
         26 . The frame as recited in  claim 24 , wherein said housing is mounted to said second elongated structural member and said housing is located between said first and second end of said second elongated structural member.  
     
     
         27 . A frame of a workpiece handling tool for accessing workpieces stored in a container, the workpiece handling tool including a port door and a workpiece handling robot, comprising: 
 a first elongated structural member and a second elongated structural member, said first and second elongated structural members each having a first end, a second end, a front face, and a rear face;    a support secured to said second end of said first and second elongated structural members;    a port door storage area for temporarily storing the port door, said port door storage area located between said front face and said rear face of said first and second elongated structural members; and    an input/output port sized to allow a workpiece to pass through the frame between said first and second elongated structural members at an elevation between said first and second ends of said first and second elongated structural members.    
     
     
         28 . The frame as recited in  claim 27 , wherein support comprises a single piece of material.  
     
     
         29 . The frame as recited in  claim 27 , wherein said support comprises multiple pieces of material.  
     
     
         30 . The frame as recited in  claim 28 , wherein said support comprises sheet metal.  
     
     
         31 . The frame as recited in  claim 27 , wherein said support includes a front component partially covering said front face of said first and second elongated structural members and a rear component partially covering said rear face of said first and second elongated structural members.  
     
     
         32 . The frame as recited in  claim 31 , wherein said port door, while stored in said port door storage area, is positioned between said front and rear components of said support and said first and second elongated structural members.  
     
     
         33 . The frame as recited in  claim 27 , further including an upper support secured to said first end of said first and second elongated structural members.  
     
     
         34 . The frame as recited in  claim 27 , further including a port door drive mechanism for moving the port door between said input/output port and said port door storage area.  
     
     
         35 . The frame as recited in  claim 34 , further including a housing substantially enclosing said port door drive mechanism.  
     
     
         36 . The frame as recited in  claim 35 , wherein said housing is mounted to said first elongated structural member and said housing is located between said first and second end of said first elongated structural member.  
     
     
         37 . The frame as recited in  claim 35 , wherein said housing is mounted to said second elongated structural member and said housing is located between said first and second end of said second elongated structural member.  
     
     
         38 . A frame of a workpiece handling tool for accessing workpieces stored in a container, the workpiece handling tool including a port door and a workpiece handling robot, comprising: 
 a first elongated structural member and a second elongated structural member, said first and second elongated structural members each having a first end, a second end, a front face, and a rear face;    an upper support secured to said first end of said first and second elongated structural members;    a lower support secured to said second end of said first and second elongated structural members, said lower support having a front component partially covering said front face of said first and second elongated structural members and a rear component partially covering said rear face of said first and second elongated structural members;    a port door storage area for temporarily storing the port door, said port door storage area located between said front and rear components of said lower support; and    an input/output port sized to allow a workpiece to pass through the frame between said first and second elongated structural members at an elevation between said upper support and said front component of said lower support.    
     
     
         39 . The frame as recited in  claim 38 , wherein lower support comprises a single piece of material.  
     
     
         40 . The frame as recited in  claim 38 , wherein said lower support comprises multiple pieces of material.  
     
     
         41 . The frame as recited in  claim 39 , wherein said lower support comprises sheet metal.  
     
     
         42 . The frame as recited in  claim 41 , wherein said port door, while stored in said port door storage area, is positioned between said front and rear components of said lower support and said first and second elongated structural members.  
     
     
         43 . The frame as recited in  claim 38 , further including a port door drive mechanism for moving the port door between said input/output port and said port door storage area.  
     
     
         44 . The frame as recited in  claim 43 , further including a housing substantially enclosing said port door drive mechanism.  
     
     
         45 . The frame as recited in  claim 44 , wherein said housing is mounted to said first elongated structural member and said housing is located between said first and second end of said first elongated structural member.  
     
     
         46 . The frame as recited in  claim 44 , wherein said housing is mounted to said second elongated structural member and said housing is located between said first and second end of said second elongated structural member.