Method and device for adjusting an alignment microscope by means of a reflective alignment mask

Abstract

The present invention provides for a method for adjusting an alignment microscope. In the method of the present invention an alignment mask is used in which the one side comprises at least one alignment mark and the other side is reflective. For the adjustment, the microscope is first focused to the alignment mark and then refocused to the mirror image of the alignment mark generated by the reflective side. The microscope is then adjusted by comparing the positions of the alignment mark and the generated mirror image of the alignment mark until the alignment mark overlaps its mirror image. Moreover, a device for adjusting an alignment microscope in accordance with the method of the present invention.

1 . An alignment mask for adjusting an alignment microscope, wherein one side of the alignment mask comprises at least one alignment mark and the other side is reflective at least in the area opposite to the alignment mark.  
   
   
       2 . The alignment mask according to  claim 6  comprising at least one alignment cross serving as the alignment mark.  
   
   
       3 . The alignment mask according to  claim 1 , wherein the alignment mask comprises a means for shifting the focus area of the alignment microscope ( 1 ) necessary for focusing the alignment mark and the mirror image of the alignment mark.  
   
   
       4 . The alignment mask according to  claim 1 , comprising a carrier plate having a reflective side to which portions are attached which each comprise at least one alignment mark on the surface facing away from the carrier plate.  
   
   
       5 . The alignment mask according to  claim 1 , comprising a carrier plate to which an intermediate plate is attached which has a reflective side facing away from the carrier plate, wherein portions which each comprise at least one alignment mark on the side facing away from the intermediate plate are cemented to the reflective side.  
   
   
       6 . A device for adjusting the alignment microscope thereby using an alignment mask according to  claim 1 .  
   
   
       7 . A device according to  claim 6 , wherein a transparent plane-parallel correction plate is additionally provided between the alignment mask and the alignment microscope for shifting the focus area.